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    • 8. 发明授权
    • Piezoelectric/electrostrictive actuator having ceramic substrate with
auxiliary windows in addition to pressure chamber windows
    • 压电/电致伸缩致动器,其具有除了压力室窗口之外的具有辅助窗口的陶瓷基板
    • US5376856A
    • 1994-12-27
    • US199606
    • 1994-02-22
    • Yukihisa TakeuchiHideo MasumoriKatsuyuki Takeuchi
    • Yukihisa TakeuchiHideo MasumoriKatsuyuki Takeuchi
    • B06B1/06H01L41/083H01L41/09H01L41/08
    • H01L41/0973
    • A piezoelectric/electrostrictive actuator including a ceramic substrate and piezoelectric/electrostrictive elements is disclosed. The ceramic substrate includes: a spacer plate having a plurality of windows formed in a row in the longitudinal direction of the spacer plate, and auxiliary windows formed adjacent to respective two outermost windows which are located at the opposite ends of the row of the plurality of windows, such that the auxiliary windows sandwich the row of the plurality of windows; and a closure plate superposed on one of opposite major surfaces of the spacer plate, so that the plurality of windows and the auxiliary windows of the spacer plate are closed by the closure plate to provide pressure chambers and enclosed spaces, respectively, within the substrate. The spacer plate and the closure plate are formed from respective ceramic green sheets which are laminated on each other and fired into an integral structure as the ceramic substrate. The piezoelectric/electrostrictive elements are disposed on respective portions of the closure plate which partially define the pressure chambers, respectively, but are not disposed on respective portions of the closure plate which partially define the enclosed spaces corresponding to the auxiliary windows.
    • 公开了一种包括陶瓷基板和压电/电致伸缩元件的压电/电致伸缩致动器。 陶瓷基板包括:间隔板,其具有沿间隔板的纵向方向成一列排列的多个窗口,以及邻近相邻的两个最外窗部形成的辅助窗口,所述两个窗口位于多个 窗口,使得辅助窗口夹着多个窗口的行; 以及重叠在间隔板的相对主表面之一上的封闭板,使得隔离板的多个窗口和辅助窗口被封闭板封闭,以在基板内分别提供压力室和封闭空间。 间隔板和封闭板由相互叠层的陶瓷生片形成,并作为陶瓷基板烧成一体结构。 压电/电致伸缩元件设置在封闭板的分别部分地限定压力室的相应部分上,但是不设置在封闭板的相应部分上,其部分地限定对应于辅助窗口的封闭空间。