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    • 1. 发明授权
    • Piezoelectric device and a package
    • 压电器件和封装
    • US5589724A
    • 1996-12-31
    • US350717
    • 1994-12-07
    • Yuki SatohToshio IshizakiTsuyoshi SakaueKoji HashimotoTohru YamadaTomoki Uwano
    • Yuki SatohToshio IshizakiTsuyoshi SakaueKoji HashimotoTohru YamadaTomoki Uwano
    • H01C1/02H01L23/08H01L41/053H03H3/007H03H9/02H03H9/05H03H9/10H03H9/13H03H9/17H03H9/25H03H9/56H05K5/06H01L41/08
    • H03H9/1071H03H9/1035
    • A piezoelectric device includes a piezoelectric plate provided with at least one electrode at almost a central portion of each face; a first plate made of an ionic material having a recessed portion to cover the at least one electrode at one face to face the piezoelectric plate; and a second plate made of an ionic material having a recessed portion to cover the at least one electrode at one face to face the piezoelectric plate. Each of the at least one electrode is packaged by direct bonding the piezoelectric plate with the first plate and the second plate so as to be sandwiched therebetween. A package includes a body member made of an ionic material provided with a recessed portion or an opening, having a flat face around the recessed portion or the opening; and a covering member made of an ionic material having a flat face to cover the body member. The flat face of the body member and the flat face of the covering member are cleaned and attached to each other so as to be direct bonded with each other using hydrogen bonds generated between the ionic materials, thereby packaging the recessed portion or the opening.
    • 压电装置包括在每个面的几乎中心部分设置有至少一个电极的压电板; 由离子材料制成的第一板,具有在一个面上覆盖所述至少一个电极的凹部以面对所述压电板; 以及由具有凹部的离子材料制成的第二板,以在一个面上覆盖所述至少一个电极以面对所述压电板。 通过将压电板与第一板和第二板直接接合以夹在它们之间来封装至少一个电极中的每一个。 一种包装体,包括由设置有凹部或开口的离子性材料制成的本体部件,该凹部或开口具有围绕凹部或开口的平坦面; 以及由具有平坦面的离子材料制成的覆盖部件,以覆盖主体部件。 本体构件的平面和覆盖构件的平面被清洁并彼此附接,以便使用在离子材料之间产生的氢键彼此直接接合,从而封装凹部或开口。
    • 7. 发明申请
    • INERTIAL FORCE SENSOR
    • 惯性力传感器
    • US20110271760A1
    • 2011-11-10
    • US13143099
    • 2010-02-16
    • Hideo OhkoshiShigehiro YoshiuchiTsuyoshi Sakaue
    • Hideo OhkoshiShigehiro YoshiuchiTsuyoshi Sakaue
    • G01C19/56
    • G01P3/02G01C19/574G01C19/5769G01P15/02G01P15/125G01P15/18G01P2015/0845G01P2015/0857
    • An inertial force sensor includes a detector element, a supporting body supporting the detector element, and a case holding the detector element via the first supporting body. The supporting body has flexibility and has a plate shape. The detector element includes a weight, a flexible coupling portion extending along a plane and supporting the weight, a fixing portion holding the weight via the coupling portion, and a detector detecting angular velocities about at least two axes non-parallel to each other. The supporting body extends in parallel with the plane from the detector element, and bends at a bending portion in a direction away from the plane. This inertial force sensor can detect the angular velocities while preventing erroneous detection caused by external impacts and vibrations.
    • 惯性力传感器包括检测器元件,支撑检测器元件的支撑体以及经由第一支撑体保持检测器元件的壳体。 支撑体具有柔性并具有板形。 检测器元件包括重物,沿着平面延伸并支撑重物的柔性联接部分,通过联接部分保持重物的固定部分,以及检测围绕彼此不平行的至少两个轴线的角速度的检测器。 支撑体与来自检测器元件的平面平行地延伸,并且在远离平面的方向上在弯曲部弯曲。 该惯性力传感器可以检测角速度,同时防止由外部冲击和振动引起的错误检测。