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1. 发明授权

US08006357B2 Process for fabricating piezoelectric element 有权
标题翻译：压电元件制造工艺
公开(公告)号：US08006357B2
公开(公告)日：2011-08-30
申请号：US11813551
申请日：2006-02-15
申请人： Yuki Nakamura , Yuji Murashima , Masahiro Yasumi , Kazuki Komaki
发明人： Yuki Nakamura , Yuji Murashima , Masahiro Yasumi , Kazuki Komaki
IPC分类号： H01L41/22 , H04R17/00 , B21D53/76 , B23P17/00
CPC分类号： H01L41/257 , H01L41/332 , Y10T29/42 , Y10T29/49401
摘要： In a production method of a piezoelectric element, an unneeded electric field is prevented from being applied to a piezoelectric thin film layer during the production process, resulting in a high performance piezoelectric element production method. The production method includes a first process for depositing an under electrode layer, a piezoelectric thin film layer and an upper electrode layer successively on a substrate such that the under electrode layer and the upper electrode layer form a short-circuit, a second process, after the first process, for etching including dry etching, the second process commenced while the under electrode layer and the upper electrode layer are short-circuited, a third process, after the second process, for polarizing by applying a voltage across the under electrode layer and the upper electrode layer, a fourth process, after the third process, for individualizing each piezoelectric element.
摘要翻译：在压电元件的制造方法中，在制造工序中，不需要的电场被防止施加于压电薄膜层，从而形成高性能的压电元件的制造方法。该制造方法包括：在基板上依次沉积下电极层，压电薄膜层和上电极层的第一工艺，使得下电极层和上电极层形成短路，第二工序后第一工艺，用于蚀刻包括干蚀刻，第二工艺在下电极层和上电极层短路的同时开始;第三工序，在第二工艺之后，通过施加电压跨越下电极层和上电极层，第四工序，第三工序后，用于使各压电元件个体化。

2. 发明申请

US20100125988A1 PROCESS FOR FABRICATING PIEZOELECTRIC ELEMENT 有权
标题翻译：制造压电元件的工艺
公开(公告)号：US20100125988A1
公开(公告)日：2010-05-27
申请号：US11813551
申请日：2006-02-15
申请人： Yuki Nakamura , Yuji Murashima , Masahiro Yasumi , Kazuki Komaki
发明人： Yuki Nakamura , Yuji Murashima , Masahiro Yasumi , Kazuki Komaki
IPC分类号： H01L41/22
CPC分类号： H01L41/257 , H01L41/332 , Y10T29/42 , Y10T29/49401
摘要： A method for fabricating a piezoelectric element capable of ensuring high piezoelectric characteristics by preventing generation of unnecessary electric field in a piezoelectric thin film layer during the fabrication process. The method for fabricating a piezoelectric element comprises a first step for depositing a lower electrode layer, a piezoelectric thin film layer and an upper electrode layer sequentially on a substrate, a second step for performing etching including dry etching, a third step for performing polarization by applying a voltage between the lower electrode layer and the upper electrode layer, and a fourth step for segmenting into individual piezoelectric elements wherein the lower electrode layer and the upper electrode layer are held in short circuit state at least when dry etching is performed.
摘要翻译：一种制造压电元件的方法，其能够通过在制造过程中防止在压电薄膜层中产生不必要的电场而确保高的压电特性。制造压电元件的方法包括：第一步骤，用于在衬底上依次沉积下电极层，压电薄膜层和上电极层;第二步骤，用于执行包括干蚀刻的蚀刻;第三步骤，用于通过在下电极层和上电极层之间施加电压，以及第四步骤，用于分割成各个压电元件，其中至少在进行干蚀刻时，下电极层和上电极层保持在短路状态。

3. 发明申请

US20090021119A1 Angular velocity sensor and manufacturing method thereof 审中-公开
标题翻译：角速度传感器及其制造方法
公开(公告)号：US20090021119A1
公开(公告)日：2009-01-22
申请号：US10586712
申请日：2005-02-23
申请人： Masahiro Yasumi , Kazuki Komaki , Yuji Murashima , Yuki Nakamura , Tetsuo Kawasaki
发明人： Masahiro Yasumi , Kazuki Komaki , Yuji Murashima , Yuki Nakamura , Tetsuo Kawasaki
IPC分类号： G01C19/56 , H01L41/22
CPC分类号： G01C19/5628 , G01C19/5621 , Y10T29/42
摘要： A substrate is made of single crystal silicon and having a tuning folk shape. The substrate includes plural arms extending in parallel with each other and a joint section for connecting respecting ends of the arms with each other. An angular velocity sensor includes a barrier layer containing silicon oxide provided on each of the arms of the substrate, a first adhesion layer containing titanium provided on the barrier layer a first electrode layer containing at least one of titanium and titanium oxide provided on the first adhesion layer, an orientation control layer provided on the first electrode layer, a piezoelectric layer provided on the orientation control layer, a second adhesion layer provided on the piezoelectric layer, and a second electrode layer provided on the second adhesion layer. This angular velocity sensor has a small size and stable characteristics.
摘要翻译：衬底由单晶硅制成并具有调谐民间形状。基板包括彼此平行延伸的多个臂和用于将臂的相对端彼此连接的接合部。角速度传感器包括设置在基板的每个臂上的含有氧化硅的阻挡层，在该阻挡层上含有钛的第一粘合层，该第一粘合层含有设置在第一粘合层上的钛和氧化钛中的至少一种设置在所述第一电极层上的取向控制层，设置在所述取向控制层上的压电层，设置在所述压电层上的第二粘合层，以及设置在所述第二粘合层上的第二电极层。该角速度传感器具有体积小，性能稳定的特点。

4. 发明授权

US09054293B2 Piezoelectric element and method for manufacturing the same 有权
标题翻译：压电元件及其制造方法
公开(公告)号：US09054293B2
公开(公告)日：2015-06-09
申请号：US13455315
申请日：2012-04-25
申请人： Toshinari Noda , Kazuki Komaki
发明人： Toshinari Noda , Kazuki Komaki
IPC分类号： H01L41/16 , H01L41/047 , H01L41/187 , H01L41/08 , H01L41/318
CPC分类号： H01L41/0478 , H01L41/081 , H01L41/0815 , H01L41/318 , Y10T29/42
摘要： A piezoelectric element includes a substrate, and a lower electrode layer, a piezoelectric layer, and an upper electrode layer sequentially formed on the substrate. The substrate has a linear thermal expansion coefficient higher than that of the piezoelectric layer, and the piezoelectric layer includes a polycrystalline body having an in-plane stress in a compressive direction. Thus, the piezoelectric element realizes the piezoelectric layer having a high orientation in a polarization axis direction, high proportionality of a displacement amount with respect to an applied voltage, and a large absolute value of the displacement amount.
摘要翻译：压电元件包括基板，以及顺序形成在基板上的下电极层，压电层和上电极层。基板的线膨胀系数高于压电层的热膨胀系数，压电层包括在压缩方向上具有面内应力的多晶体。因此，压电元件实现了在偏振轴方向上具有高取向的压电层，相对于施加电压的位移量的高比例性以及位移量的绝对值较大。

5. 发明授权

US08681407B2 Optical reflection element 有权
标题翻译：光反射元件
公开(公告)号：US08681407B2
公开(公告)日：2014-03-25
申请号：US13581837
申请日：2011-03-24
申请人： Soichiro Hiraoka , Kazuki Komaki , Masaki Tada , Shigeo Furukawa , Kiyomi Furukawa , Shinsuke Nakazono , Yuta Yamamoto , Toshiaki Horie
发明人： Soichiro Hiraoka , Kazuki Komaki , Masaki Tada , Shigeo Furukawa , Kiyomi Furukawa , Shinsuke Nakazono , Yuta Yamamoto , Toshiaki Horie
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , B81B3/0051 , B81B2201/042
摘要： An optical reflection element has a frame, a pair of meandering-shaped vibration elements, a mirror having a reflection surface, and a pair of protective beams. The vibration elements have their respective outer ends supported by confronting portions of an inside of the frame. The vibration elements support the mirror with respective inner ends thereof. The protective beams extend from the respective confronting portions of the inside of the frame toward the mirror with a predetermined space from the vibration elements and in parallel with a vibration axis of the vibration elements.
摘要翻译：光反射元件具有框架，一对曲折形状的振动元件，具有反射面的反射镜和一对保护光束。振动元件的各自的外端由框架内部的相对部分支撑。振动元件支撑着镜子的相应内端。保护梁从振动元件的预定空间与振动元件的振动轴线平行地从框架内部的相应的相对部分向镜子延伸。

6. 发明授权

US08508826B2 Meandering oscillator, optical reflecting element using meandering oscillator, and image projection device using meandering oscillator 有权
标题翻译：蜿蜒振荡器，使用蜿蜒振荡器的光学反射元件，以及使用曲折振荡器的图像投影装置
公开(公告)号：US08508826B2
公开(公告)日：2013-08-13
申请号：US12937299
申请日：2009-04-23
申请人： Jirou Terada , Shinsuke Nakazono , Kazuki Komaki , Kiyomi Furukawa
发明人： Jirou Terada , Shinsuke Nakazono , Shigeo Furukawa , Kazuki Komaki
IPC分类号： G02B26/08
CPC分类号： H01L41/0953 , G02B26/0858
摘要： A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved.
摘要翻译：曲折振荡器包括按预定方向弯曲和耦合的多个振荡板，并且按压力驱动器依次叠置在振荡板上的压电致动器各自包括下电极，压电体和上电极，并且其中压电致动器交替布置在摆动板。因此，即使使元件变小，也可以容易地布置电极。结果，可以提高生产率。

7. 发明授权

US09261669B2 Vibrating element having meandering shape, and optical reflection element 有权
标题翻译：具有曲折形状的振动元件和光学反射元件
公开(公告)号：US09261669B2
公开(公告)日：2016-02-16
申请号：US13978386
申请日：2012-02-16
申请人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki
发明人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki
IPC分类号： G02B26/10 , G02B7/182 , G02B26/08 , H02N2/10 , B81B3/00 , H01L41/08 , H01L41/09
CPC分类号： G02B7/1821 , B81B3/0043 , B81B3/007 , B81B2203/0109 , B81B2203/0163 , G02B26/0858 , G02B26/101 , G02B26/105 , H01L41/081 , H01L41/0953 , H02N2/10 , H02N2/108
摘要： A vibrating element having a meandering shape includes a vibrating beam and a piezoelectric actuator provided on the vibrating beam. The vibrating beam has a meandering-shape substantially formed into the plurality of continuous turned-down shapes. The vibrating beam includes the plurality of turned-down units and the plurality of coupling units coupled to the turned-down units, and the coupling units and the turned-down units are alternately disposed. The piezoelectric actuator includes a lower electrode provided on the vibrating beam, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A non-existence region where the piezoelectric film does not exist is provided in at least one of a neighborhood of a midpoint of an inner circumference of each of the turned-down units and a neighborhood of a curvature changing point in which a curvature of the inner circumference of each of the turned-down shapes changes.
摘要翻译：具有曲折形状的振动元件包括振动梁和设置在振动梁上的压电致动器。振动梁具有大致形成为多个连续折弯形状的曲折形状。振动梁包括多个折弯单元和耦合到折弯单元的多个联接单元，并且联接单元和下降单元交替地设置。压电致动器包括设置在振动梁上的下电极，设置在下电极上的压电膜和设置在压电膜上的上电极。不存在压电膜的不存在区域设置在每个折射单元的内周的中点附近和曲率变化点的附近中的至少一个中，其中曲率每个倒下的形状的内圆周都会发生变化。

8. 发明申请

US20130271804A1 VIBRATING ELEMENT HAVING MEANDERING SHAPE, AND OPTICAL REFLECTION ELEMENT 有权
标题翻译：具有形状的振动元件和光学反射元件
公开(公告)号：US20130271804A1
公开(公告)日：2013-10-17
申请号：US13978386
申请日：2012-02-16
申请人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki
发明人： Toshiaki Horie , Shinsuke Nakazono , Soichiro Hiraoka , Yuta Yamamoto , Kazuki Komaki
IPC分类号： G02B7/182 , H01L41/08
CPC分类号： G02B7/1821 , B81B3/0043 , B81B3/007 , B81B2203/0109 , B81B2203/0163 , G02B26/0858 , G02B26/101 , G02B26/105 , H01L41/081 , H01L41/0953 , H02N2/10 , H02N2/108
摘要： A vibrating element having a meandering shape includes a vibrating beam and a piezoelectric actuator provided on the vibrating beam. The vibrating beam has a meandering-shape substantially formed into the plurality of continuous turned-down shapes. The vibrating beam includes the plurality of turned-down units and the plurality of coupling units coupled to the turned-down units, and the coupling units and the turned-down units are alternately disposed. The piezoelectric actuator includes a lower electrode provided on the vibrating beam, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A non-existence region where the piezoelectric film does not exist is provided in at least one of a neighborhood of a midpoint of an inner circumference of each of the turned-down units and a neighborhood of a curvature changing point in which a curvature of the inner circumference of each of the turned-down shapes changes.
摘要翻译：具有曲折形状的振动元件包括振动梁和设置在振动梁上的压电致动器。振动梁具有大致形成为多个连续折弯形状的曲折形状。振动梁包括多个折弯单元和耦合到折弯单元的多个联接单元，并且联接单元和下降单元交替地设置。压电致动器包括设置在振动梁上的下电极，设置在下电极上的压电膜和设置在压电膜上的上电极。不存在压电膜的不存在区域设置在每个折射单元的内周的中点附近和曲率变化点的附近中的至少一个中，其中曲率每个倒下的形状的内圆周都会发生变化。

9. 发明申请

US20120113492A1 OPTICAL REFLECTION ELEMENT 有权
标题翻译：光学反射元件
公开(公告)号：US20120113492A1
公开(公告)日：2012-05-10
申请号：US13265139
申请日：2010-04-16
申请人： Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Kiyomi Furukawa , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
发明人： Shinsuke Nakazono , Soichiro Hiraoka , Jirou Terada , Shigeo Furukawa , Kiyomi Furukawa , Toshiaki Horie , Kazuki Komaki , Masaki Tada , Yuta Yamamoto
IPC分类号： G02B26/08
CPC分类号： G02B26/0858
摘要： An optical reflecting element includes a mirror, and a pair of high-frequency vibrators and a pair of low-frequency vibrators for vibrating the mirror. The high-frequency vibrators include a substrate, a bottom electrode layer formed on the substrate, a piezoelectric layer, and a drive electrode and a first monitor electrode as the top electrode layer. One end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, and a second monitor electrode as the top electrode layer. The other end of the low-frequency vibrator has the substrate shared with the high-frequency vibrator, a bottom electrode layer, a piezoelectric layer, a drive electrode, a first monitor electrode, and an insulator layer as a dead zone for preventing a piezoelectric effect due to the piezoelectric layer from reaching the first monitor electrode. The first monitor electrode provided on the low-frequency vibrator is connected from the top of the vibrator to an extraction electrode.
摘要翻译：光反射元件包括反射镜，一对高频振动器和用于振动反射镜的一对低频振动器。高频振动器包括基板，形成在基板上的底部电极层，压电层和驱动电极以及作为顶部电极层的第一监视电极。低频振动器的一端具有与高频振动器共用的基板，底部电极层，压电层，驱动电极和作为顶部电极层的第二监视电极。低频振动器的另一端具有与高频振子共用的基板，底电极层，压电层，驱动电极，第一监视电极和绝缘体层，作为防止压电的死区由于压电层到达第一监视电极的作用。设置在低频振动器上的第一监视电极从振动器的顶部连接到提取电极。

10. 发明申请

US20110032590A1 MEANDERING OSCILLATOR, OPTICAL REFLECTING ELEMENT USING MEANDERING OSCILLATOR, AND IMAGE PROJECTION DEVICE USING MEANDERING OSCILLATOR 有权
标题翻译：使用振动振荡器的光学振荡器，光学反射元件和使用振动振荡器的图像投影设备
公开(公告)号：US20110032590A1
公开(公告)日：2011-02-10
申请号：US12937299
申请日：2009-04-23
申请人： Jirou Terada , Shinsuke Nakazono , Shigeo Furukawa , Kiyomi Furukawa , Kazuki Komaki
发明人： Jirou Terada , Shinsuke Nakazono , Shigeo Furukawa , Kiyomi Furukawa , Kazuki Komaki
IPC分类号： G02B27/18 , H01L41/047 , G02B26/08
CPC分类号： H01L41/0953 , G02B26/0858
摘要： A meandering oscillator includes a plurality of oscillating plates bent and coupled in predetermined directions and piezoelectric actuators each including a lower electrode, a piezoelectric body, and an upper electrode stacked on the oscillating plate in this order, and wherein the piezoelectric actuators are alternately arranged on the oscillating plates. Thus, even when an element is made smaller, electrodes can be easily arranged. As a result, the productivity can be improved.
摘要翻译：曲折振荡器包括按预定方向弯曲和耦合的多个振荡板，并且按压力驱动器依次叠置在振荡板上的压电致动器各自包括下电极，压电体和上电极，并且其中压电致动器交替布置在摆动板。因此，即使使元件变小，也可以容易地布置电极。结果，可以提高生产率。

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