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1. 发明申请

US20110090512A1 SURFACE INSPECTION TOOL AND SURFACE INSPECTION METHOD 有权
标题翻译：表面检查工具和表面检查方法
公开(公告)号：US20110090512A1
公开(公告)日：2011-04-21
申请号：US12979885
申请日：2010-12-28
申请人： Yuji MIYOSHI , Tomohiro Funakoshi
发明人： Yuji MIYOSHI , Tomohiro Funakoshi
IPC分类号： G01N21/94 , G01N21/95 , G01B11/30
CPC分类号： G01B11/303 , G01B11/30 , G01N21/9501
摘要： An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In order to solve the object, in a surface inspection tool 110 which measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200, the surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.
摘要翻译：本发明的目的是提供一种表面检查工具，其中可以无视觉地搜索能够以高精度和非破坏性的方式测量具有图案的晶片的表面粗糙度的平坦检查范围。为了解决该问题，在表面检查工具110中，通过与图案的晶片200上的测定坐标相关联地测量由照射的照射光产生的散射光的散射光强度并检查晶片200的表面粗糙度的表面检查工具110，检查工具包括提取等于或大于下限阈值L的测量散射光强度的测量坐标的控制器250，将部分布局405a中的部分布局405a的表面粗糙度检查的检查范围406设置为整体的一部分对应于提取的测量坐标的周边的图案的布局401，并且获得检查范围406中的表面粗糙度。

2. 发明申请

US20120262723A1 SURFACE INSPECTION TOOL AND SURFACE INSPECTION METHOD 有权
标题翻译：表面检查工具和表面检查方法
公开(公告)号：US20120262723A1
公开(公告)日：2012-10-18
申请号：US13450226
申请日：2012-04-18
申请人： Yuji MIYOSHI , Tomohiro Funakoshi
发明人： Yuji MIYOSHI , Tomohiro Funakoshi
IPC分类号： G01B11/30
CPC分类号： G01B11/303 , G01B11/30 , G01N21/9501
摘要： A surface inspection tool 110 measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200. The surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.
摘要翻译：表面检查工具110通过与图案的晶片200上的测量坐标相关联地测量由照射的照射光产生的散射光的散射光强度并检查晶片200的表面粗糙度。表面检查工具包括控制器250，其提取测量将测量的散射光强度的坐标设定为等于或大于下限阈值L，设定与周边相对应的图案的整体布局401的一部分的部分布局405a中的表面粗糙度检查的检查范围406 提取测量坐标，并获得检查范围406中的表面粗糙度。

3. 发明申请

US20150354487A1 CONTROL DEVICE FOR INTERNAL COMBUSTION ENGINE 有权
标题翻译：内燃机控制装置
公开(公告)号：US20150354487A1
公开(公告)日：2015-12-10
申请号：US14763592
申请日：2013-01-29
申请人： Takanori SASAKI , Go HAYASHITA , Yuji MIYOSHI
发明人： Takanori SASAKI , Go HAYASHITA , Yuji MIYOSHI
IPC分类号： F02D41/14 , F01N3/22
CPC分类号： F02D41/1444 , F01N3/225 , F01N2900/0402 , F01N2900/0416 , F02D41/0295 , F02D41/1402 , F02D41/1439 , F02D41/1454 , F02D41/1456 , F02D41/1473 , F02D41/1475 , F02D41/1477 , F02D2041/1422 , F02D2200/0814 , G01N27/41
摘要： A control device for an internal combustion engine, equipped with: an exhaust purification catalyst provided in the exhaust passage of the internal combustion engine and capable of absorbing oxygen; a downstream air-fuel ratio sensor provided downstream from the exhaust purification catalyst in the direction of the exhaust flow; and an engine control device that controls the internal combustion engine in response to the output from the downstream air-fuel ratio sensor. The downstream air-fuel ratio sensor is configured such that the applied voltage for which the output current is zero changes in response to the exhaust air-fuel ratio, and such that when the exhaust air-fuel ratio equals the theoretical air-fuel ratio and the applied voltage in the downstream air-fuel ratio sensor is increased, the output current increases in conjunction therewith. When the air-fuel ratio of the exhaust gas is detected by the downstream air-fuel ratio sensor, the applied voltage in the downstream air-fuel ratio sensor is fixed at a constant voltage, with this constant voltage being a voltage for which the output current is zero when the exhaust air-fuel ratio is a predetermined air-fuel ratio that is leaner than the theoretical air-fuel ratio.
摘要翻译：一种内燃机的控制装置，具备：排气净化催化剂，其设置在内燃机的排气通路中，能够吸收氧气; 下游空燃比传感器，其设置在所述排气净化催化剂的排出流动方向的下游; 以及发动机控制装置，其响应于来自下游空燃比传感器的输出来控制内燃机。下游空燃比传感器被配置为使得输出电流为零的施加电压响应于排气空燃比而变化，并且当排气空燃比等于理论空燃比时，以及下游空燃比传感器中的施加电压增加，输出电流随之增加。当通过下游空燃比传感器检测到排气的空燃比时，下游空燃比传感器中的施加电压被固定为恒定电压，该恒定电压为输出当排气空燃比是比理论空燃比稀的预定空燃比时，电流为零。

4. 发明申请

US20160138504A1 DIAGNOSIS SYSTEM OF INTERNAL COMBUSTION ENGINE 有权
标题翻译：内燃机诊断系统
公开(公告)号：US20160138504A1
公开(公告)日：2016-05-19
申请号：US14900792
申请日：2013-06-26
申请人： Hiroshi MIYAMOTO , Yuji MIYOSHI , Yasushi IWAZAKI , Toru KIDOKORO , Keiichiro AOKI
发明人： Hiroshi MIYAMOTO , Yuji MIYOSHI , Yasushi IWAZAKI , Toru KIDOKORO , Keiichiro AOKI
IPC分类号： F02D41/12 , F01N3/08 , F02D41/14
CPC分类号： F02D41/126 , F01N3/08 , F01N13/009 , F01N2560/025 , F01N2560/14 , F01N2900/0416 , F02D41/1439 , F02D41/1441 , F02D41/1456 , F02D41/1495
摘要： An internal combustion engine comprises an exhaust purification catalyst and an air-fuel ratio sensor arranged at a downstream side of the exhaust purification catalyst, stops or decreases a feed of fuel as fuel cut control, and controls an air-fuel ratio of exhaust gas to a rich air-fuel ratio after the end of the fuel cut control as post reset rich control. A first characteristic of change of air-fuel ratio at the time the output air-fuel ratio first passes a first air-fuel ratio region and a second characteristic of change of air-fuel ratio at the time when the output air-fuel ratio first passes a second air-fuel ratio region different from the first air-fuel ratio region are calculated. The diagnosis system judges any one of normality, abnormality, and whether a hold should be put on judgment for the state of the air-fuel ratio sensor, based on the first characteristic of change of air-fuel ratio and, if it is judged that a hold should be put on judgment, judges if the state of the air-fuel ratio sensor is normal or abnormal based on the second characteristic of change of air-fuel ratio. As a result, it is possible to suppress the effects of the change of state of the exhaust purification catalyst while accurately diagnosing the abnormality of deterioration of response of a downstream side air-fuel ratio sensor.
摘要翻译：内燃机包括排气净化催化剂和布置在排气净化催化剂的下游侧的空燃比传感器，停止或减少作为燃料切断控制的燃料进料，并将废气的空燃比控制为燃油切断控制结束后的空燃比较高，作为后复位浓缩控制。输出空燃比首先通过第一空燃比区域时的空燃比变化的第一特征，以及输出空燃比首先通过时的空燃比变化的第二特性计算与第一空燃比区域不同的第二空燃比区域。基于空燃比变化的第一特征，诊断系统判断空气 - 燃料比传感器的状态的正常性，异常性以及是否应该判断保持状态，并且如果判断为应判断暂停状态，根据空燃比变化的第二特征判断空燃比传感器的状态是正常还是异常。结果，能够精确地诊断下游侧空燃比传感器的响应的劣化的异常，能够抑制排气净化催化剂的状态变化的影响。

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