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    • 3. 发明授权
    • Catadioptric system and image pickup apparatus
    • 反射折射系统和摄像装置
    • US09019633B2
    • 2015-04-28
    • US13581663
    • 2011-05-19
    • Yuji KatashibaKazuhiko KajiyamaMasayuki Suzuki
    • Yuji KatashibaKazuhiko KajiyamaMasayuki Suzuki
    • G02B17/08
    • G02B17/0808
    • The catadioptric system includes a first optical imaging system (catadioptric part) causing a light flux from an object to form an intermediate image and a second optical imaging system (dioptric part) causing the light flux from the intermediate image to form an image. In the first optical imaging system, the light flux sequentially passes a first transmissive portion, a second reflective portion, a first reflective portion and a second transmissive portion. In the second optical imaging system, consecutive four lens surfaces among plural lens surfaces placed between an aperture stop and an image surface have a negative combined refractive power, and a condition of −0.52
    • 反折射系统包括使来自物体的光束形成中间图像的第一光学成像系统(反射折射部分)和引起来自中间图像的光束形成图像的第二光学成像系统(屈光部分)。 在第一光学成像系统中,光通​​量依次通过第一透射部分,第二反射部分,第一反射部分和第二透射部分。 在第二光学成像系统中,放置在孔径光阑和图像表面之间的多个透镜表面中的连续的四个透镜表面具有负的组合折射光焦度,并且满足-0.52 <4nm-max·Ymax <-0.14的条件 ,&phgr; 4n-max表示负组合折射光焦度的最大值,Ymax表示物体在反射折射系统的视野中的最大物体高度。
    • 4. 发明申请
    • CATADIOPTRIC SYSTEM AND IMAGE PICKUP APPARATUS EQUIPPED WITH SAME
    • CATADIOPTRIC系统和图像拾取装置配备
    • US20130063650A1
    • 2013-03-14
    • US13609677
    • 2012-09-11
    • Kazuhiko KajiyamaMasayuki SuzukiYuji Katashiba
    • Kazuhiko KajiyamaMasayuki SuzukiYuji Katashiba
    • G02B17/08H04N5/232
    • G02B17/0888G02B13/18G02B13/22G02B17/0808G02B17/0856G02B21/04
    • A catadioptric unit includes, in order from an object side to an image side, a first optical element including a first transmissive unit having positive refractive power disposed in the vicinity of an optical axis and, on the object side thereof, a first reflective unit disposed at an outer circumference relative to the first transmissive unit and having a reflective surface; and a second optical element including a second transmissive unit having negative refractive power in the vicinity of the optical axis and, on the image side thereof, a second reflective unit disposed at an outer circumference relative to the second transmissive unit and having a reflective surface. Radii of curvature of object-side and image-side surfaces of the second optical element, a thickness along the optical axis and a refractive index of a material of the second optical element are set to satisfy predetermined conditions.
    • 反射折射单元包括从物体侧到像侧的顺序,包括设置在光轴附近的具有正折光力的第一透射单元的第一光学元件,并且在物体侧具有设置在第一反射单元 在相对于第一透射单元的外圆周处,并具有反射表面; 以及第二光学元件,其包括在光轴附近具有负折光力的第二透射单元,并且在其像侧上具有相对于第二透射单元设置在外周并具有反射表面的第二反射单元。 第二光学元件的物体侧和像侧表面的曲率半径,沿着光轴的厚度和第二光学元件的材料的折射率被设定为满足预定条件。
    • 5. 发明申请
    • CATADIOPTRIC SYSTEM AND IMAGE PICKUP APPARATUS
    • CATADIOPTRIC系统和图像拾取装置
    • US20120320187A1
    • 2012-12-20
    • US13581663
    • 2011-05-19
    • Yuji KatashibaKazuhiko KajiyamaMasayuki Suzuki
    • Yuji KatashibaKazuhiko KajiyamaMasayuki Suzuki
    • G02B17/08H04N7/18
    • G02B17/0808
    • The catadioptric system includes a first optical imaging system (catadioptric part) causing a light flux from an object to form an intermediate image and a second optical imaging system (dioptric part) causing the light flux from the intermediate image to form an image. In the first optical imaging system, the light flux sequentially passes a first transmissive portion, a second reflective portion, a first reflective portion and a second transmissive portion. In the second optical imaging system, consecutive four lens surfaces among plural lens surfaces placed between an aperture stop and an image surface have a negative combined refractive power, and a condition of −0.52
    • 反折射系统包括使来自物体的光束形成中间图像的第一光学成像系统(反射折射部分)和引起来自中间图像的光束形成图像的第二光学成像系统(屈光部分)。 在第一光学成像系统中,光通​​量依次通过第一透射部分,第二反射部分,第一反射部分和第二透射部分。 在第二光学成像系统中,放置在孔径光阑和图像表面之间的多个透镜表面中的连续的四个透镜表面具有负的组合折射光焦度,并且满足-0.52 <4μm-max·Ymax <-0.14的条件 ,&phgr; 4n-max表示负组合折射光焦度的最大值,Ymax表示物体在反射折射系统的视野中的最大物体高度。
    • 7. 发明授权
    • Illumination optical system and exposure apparatus including the same
    • 照明光学系统和包括其的曝光装置
    • US07538856B2
    • 2009-05-26
    • US12179506
    • 2008-07-24
    • Kazuhiko KajiyamaToshihiko Tsuji
    • Kazuhiko KajiyamaToshihiko Tsuji
    • G03B27/54G03B27/42
    • G03F7/70075G03B27/42
    • An illumination optical system includes a first optical unit that collects light emitted from a light source; a reflective integrator that has a plurality of cylindrical reflection surfaces, whose generating lines are oriented in a uniform direction, and forms a plurality of linear light sources by using the light emitted from the first optical unit; a pair of flat mirrors that are disposed parallel to the generating lines so as to face each other with the plurality of linear light sources residing therebetween; an aperture stop that is disposed perpendicular to the generating lines and has an opening for allowing the light emitted from the plurality of linear light sources to pass therethrough; and a second optical unit that integrates beams of the light emitted from the plurality of linear light sources that have passed through the opening one on top of another in an illumination target plane.
    • 照明光学系统包括:第一光学单元,其收集从光源发射的光; 反射积分器,其具有多个圆筒反射面,其发生线沿均匀方向取向,并且通过使用从第一光学单元发射的光形成多个线性光源; 一对平面反射镜,其平行于所述发生线布置成彼此面对,所述多个线性光源位于它们之间; 一个孔径光阑,其垂直于所述生成线设置并具有用于允许从所述多个线性光源发出的光通过的开口; 以及第二光学单元,其将在已经穿过所述开口的多个线性光源发射的光的光束在照明目标平面中积分。
    • 8. 发明申请
    • ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS USING THE SAME AND DEVICE MANUFACTURING METHOD
    • 照明光学系统,使用它的曝光装置和装置制造方法
    • US20090213355A1
    • 2009-08-27
    • US12390315
    • 2009-02-20
    • Kazuhiko Kajiyama
    • Kazuhiko Kajiyama
    • G03B27/72
    • G03B27/72G03F7/70075
    • An illumination optical system includes a pair of fly-eye mirrors configured to receive light from a light source, a first condenser configured to condense light from the pair of fly-eye mirrors, a reflection type integrator configured to receive light from the first condenser, the reflection type integrator including a plurality of cylindrical reflective surfaces having parallel generating line directions, an aperture stop arranged perpendicular to the generating line direction, and a second condenser configured to superpose on an illuminated surface luminous fluxes from a plurality of cylindrical reflective surfaces of the reflection type integrator.
    • 一种照明光学系统,包括配置成从光源接收光的一对飞眼镜,被配置为使来自该一对飞眼镜的光聚光的第一聚光镜,被配置为接收来自第一冷凝器的光的反射型积分器, 所述反射型积分器包括具有平行的生成线方向的多个圆柱形反射表面,垂直于所述生成线方向布置的孔径光阑;以及第二聚光器,被配置为在照射表面上叠加来自所述发光线方向的多个圆柱形反射表面的光通量 反射型积分器。
    • 10. 发明授权
    • Illumination optical system, exposure apparatus using the same and device manufacturing method
    • 照明光学系统,使用相同的曝光装置和装置制造方法
    • US08149386B2
    • 2012-04-03
    • US12390315
    • 2009-02-20
    • Kazuhiko Kajiyama
    • Kazuhiko Kajiyama
    • G03B27/70
    • G03B27/72G03F7/70075
    • An illumination optical system includes a pair of fly-eye mirrors configured to receive light from a light source, a first condenser configured to condense light from the pair of fly-eye mirrors, a reflection type integrator configured to receive light from the first condenser, the reflection type integrator including a plurality of cylindrical reflective surfaces having parallel generating line directions, an aperture stop arranged perpendicular to the generating line direction, and a second condenser configured to superpose on an illuminated surface luminous fluxes from a plurality of cylindrical reflective surfaces of the reflection type integrator.
    • 一种照明光学系统,包括配置成从光源接收光的一对飞眼镜,被配置为使来自该一对飞眼镜的光聚光的第一聚光镜,被配置为接收来自第一冷凝器的光的反射型积分器, 所述反射型积分器包括具有平行的生成线方向的多个圆柱形反射表面,垂直于所述生成线方向布置的孔径光阑;以及第二聚光器,被配置为在照射表面上叠加来自所述发光线方向的多个圆柱形反射表面的光通量 反射型积分器。