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1. 发明授权

US07538856B2 Illumination optical system and exposure apparatus including the same 失效
标题翻译：照明光学系统和包括其的曝光装置
公开(公告)号：US07538856B2
公开(公告)日：2009-05-26
申请号：US12179506
申请日：2008-07-24
申请人： Kazuhiko Kajiyama , Toshihiko Tsuji
发明人： Kazuhiko Kajiyama , Toshihiko Tsuji
IPC分类号： G03B27/54 , G03B27/42
CPC分类号： G03F7/70075 , G03B27/42
摘要： An illumination optical system includes a first optical unit that collects light emitted from a light source; a reflective integrator that has a plurality of cylindrical reflection surfaces, whose generating lines are oriented in a uniform direction, and forms a plurality of linear light sources by using the light emitted from the first optical unit; a pair of flat mirrors that are disposed parallel to the generating lines so as to face each other with the plurality of linear light sources residing therebetween; an aperture stop that is disposed perpendicular to the generating lines and has an opening for allowing the light emitted from the plurality of linear light sources to pass therethrough; and a second optical unit that integrates beams of the light emitted from the plurality of linear light sources that have passed through the opening one on top of another in an illumination target plane.
摘要翻译：照明光学系统包括：第一光学单元，其收集从光源发射的光; 反射积分器，其具有多个圆筒反射面，其发生线沿均匀方向取向，并且通过使用从第一光学单元发射的光形成多个线性光源; 一对平面反射镜，其平行于所述发生线布置成彼此面对，所述多个线性光源位于它们之间; 一个孔径光阑，其垂直于所述生成线设置并具有用于允许从所述多个线性光源发出的光通过的开口; 以及第二光学单元，其将在已经穿过所述开口的多个线性光源发射的光的光束在照明目标平面中积分。

2. 发明授权

US07714987B2 Exposure apparatus 失效
标题翻译：曝光装置
公开(公告)号：US07714987B2
公开(公告)日：2010-05-11
申请号：US11870626
申请日：2007-10-11
申请人： Kazuhiko Kajiyama , Toshihiko Tsuji
发明人： Kazuhiko Kajiyama , Toshihiko Tsuji
IPC分类号： G03B27/72
CPC分类号： G03B27/72 , G03F7/70075
摘要： An exposure apparatus includes a first optical unit configured to condense light from a light source, a catoptric integrator configured to form plural secondary light sources using light from the first optical unit, the catoptric integrator including plural cylindrical reflection surfaces having the same generatrix direction, an aperture stop arranged perpendicular to the generatrix direction, and a second optical unit configured to superpose light from each secondary light source onto an illumination surface, wherein the catoptric integrator includes plural integrator parts each having plural cylindrical reflection surfaces, and the plural integrator parts are arranged in a direction perpendicular to the generatrix direction and to an arrangement direction of the cylindrical reflection surfaces and located at an incident side of the aperture stop.
摘要翻译：曝光装置包括被配置为使来自光源的光聚光的第一光学单元，使用来自第一光学单元的光形成多个次级光源的反射积分器，该反射积分器包括具有相同母线方向的多个圆柱形反射面，孔径光阑，垂直于母线方向排列;第二光学单元，被配置为将来自每个次级光源的光叠加到照明表面上，其中，所述反射积分器包括多个具有多个圆柱形反射面的积分器部分，并且所述多个积分器部件布置在垂直于母线方向的方向和圆柱形反射表面的排列方向上并且位于孔径光阑的入射侧。

3. 发明申请

US20100053584A1 ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS 有权
标题翻译：照明光学系统和曝光装置
公开(公告)号：US20100053584A1
公开(公告)日：2010-03-04
申请号：US12552941
申请日：2009-09-02
申请人： Kazuhiko Kajiyama , Toshihiko Tsuji
发明人： Kazuhiko Kajiyama , Toshihiko Tsuji
IPC分类号： G03B27/72
CPC分类号： G03B27/72 , G03F7/70075
摘要： An illumination optical system includes first and second reflection integrators. The second reflection integrator forms a plurality of linear light sources using light from the first reflection integrator. The illumination optical system further includes a pair of flat plane mirrors that are arranged parallel to the meridional line direction on the second reflection integrator and opposite to each other so as to sandwich the plurality of linear light sources in between, a unit for changing an aperture shape of an aperture stop arranged at an exit side of the second reflection integrator in a direction perpendicular to the meridional line direction so that the aperture stop has an optical Fourier transformation relationship with the surface to be illuminated, and an adjustment unit configured to adjust an interval between the pair of flat plane mirrors as the aperture shape of the aperture stop is changed.
摘要翻译：照明光学系统包括第一和第二反射积分器。第二反射积分器使用来自第一反射积分器的光形成多个线性光源。照明光学系统还包括一对平面镜，它们平行于第二反射积分器上的子午线方向布置并且彼此相对，以将多个线性光源夹在其间，用于改变光圈的单元形状的孔径光阑，其布置在与第二反射积分器的出射侧在垂直于子午线方向的方向上，使得孔径光阑与待照射的表面具有光学傅里叶变换关系;以及调整单元，改变孔径光阑的孔径形状的一对平面镜之间的间隔。

4. 发明授权

US08284378B2 Illumination optical system and exposure apparatus 有权
标题翻译：照明光学系统和曝光装置
公开(公告)号：US08284378B2
公开(公告)日：2012-10-09
申请号：US12552941
申请日：2009-09-02
申请人： Kazuhiko Kajiyama , Toshihiko Tsuji
发明人： Kazuhiko Kajiyama , Toshihiko Tsuji
IPC分类号： G03B27/54
CPC分类号： G03B27/72 , G03F7/70075
摘要： An illumination optical system includes first and second reflection integrators. The second reflection integrator forms a plurality of linear light sources using light from the first reflection integrator. The illumination optical system further includes a pair of flat plane mirrors that are arranged parallel to the meridional line direction on the second reflection integrator and opposite to each other so as to sandwich the plurality of linear light sources in between, a unit for changing an aperture shape of an aperture stop arranged at an exit side of the second reflection integrator in a direction perpendicular to the meridional line direction so that the aperture stop has an optical Fourier transformation relationship with the surface to be illuminated, and an adjustment unit configured to adjust an interval between the pair of flat plane mirrors as the aperture shape of the aperture stop is changed.
摘要翻译：照明光学系统包括第一和第二反射积分器。第二反射积分器使用来自第一反射积分器的光形成多个线性光源。照明光学系统还包括一对平面镜，它们平行于第二反射积分器上的子午线方向布置并且彼此相对，以将多个线性光源夹在其间，用于改变光圈的单元形状的孔径光阑，其布置在与第二反射积分器的出射侧在垂直于子午线方向的方向上，使得孔径光阑与待照射的表面具有光学傅里叶变换关系;以及调整单元，改变孔径光阑的孔径形状的一对平面镜之间的间隔。

5. 发明申请

US20090027641A1 ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS INCLUDING THE SAME 失效
标题翻译：照明光学系统和曝光装置，包括它们
公开(公告)号：US20090027641A1
公开(公告)日：2009-01-29
申请号：US12179506
申请日：2008-07-24
申请人： Kazuhiko Kajiyama , Toshihiko Tsuji
发明人： Kazuhiko Kajiyama , Toshihiko Tsuji
IPC分类号： G03B27/42 , G03B27/72
CPC分类号： G03F7/70075 , G03B27/42
摘要： An illumination optical system includes a first optical unit that collects light emitted from a light source; a reflective integrator that has a plurality of cylindrical reflection surfaces, whose generating lines are oriented in a uniform direction, and forms a plurality of linear light sources by using the light emitted from the first optical unit; a pair of flat mirrors that are disposed parallel to the generating lines so as to face each other with the plurality of linear light sources residing therebetween; an aperture stop that is disposed perpendicular to the generating lines and has an opening for allowing the light emitted from the plurality of linear light sources to pass therethrough; and a second optical unit that integrates beams of the light emitted from the plurality of linear light sources that have passed through the opening one on top of another in an illumination target plane.
摘要翻译：照明光学系统包括：第一光学单元，其收集从光源发射的光; 反射积分器，其具有多个圆筒反射面，其发生线沿均匀方向取向，并且通过使用从第一光学单元发射的光形成多个线性光源; 一对平面反射镜，其平行于所述发生线布置成彼此面对，所述多个线性光源位于它们之间; 一个孔径光阑，其垂直于所述生成线设置并具有用于允许从所述多个线性光源发出的光通过的开口; 以及第二光学单元，其将在已经穿过所述开口的多个线性光源发射的光的光束在照明目标平面中积分。

6. 发明申请

US20090213355A1 ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS USING THE SAME AND DEVICE MANUFACTURING METHOD 有权
标题翻译：照明光学系统，使用它的曝光装置和装置制造方法
公开(公告)号：US20090213355A1
公开(公告)日：2009-08-27
申请号：US12390315
申请日：2009-02-20
申请人： Kazuhiko Kajiyama
发明人： Kazuhiko Kajiyama
IPC分类号： G03B27/72
CPC分类号： G03B27/72 , G03F7/70075
摘要： An illumination optical system includes a pair of fly-eye mirrors configured to receive light from a light source, a first condenser configured to condense light from the pair of fly-eye mirrors, a reflection type integrator configured to receive light from the first condenser, the reflection type integrator including a plurality of cylindrical reflective surfaces having parallel generating line directions, an aperture stop arranged perpendicular to the generating line direction, and a second condenser configured to superpose on an illuminated surface luminous fluxes from a plurality of cylindrical reflective surfaces of the reflection type integrator.
摘要翻译：一种照明光学系统，包括配置成从光源接收光的一对飞眼镜，被配置为使来自该一对飞眼镜的光聚光的第一聚光镜，被配置为接收来自第一冷凝器的光的反射型积分器，所述反射型积分器包括具有平行的生成线方向的多个圆柱形反射表面，垂直于所述生成线方向布置的孔径光阑;以及第二聚光器，被配置为在照射表面上叠加来自所述发光线方向的多个圆柱形反射表面的光通量反射型积分器。

7. 发明授权

US5615145A Semiconductor memory with ferroelectric capacitors 失效
标题翻译：半导体存储器与铁电电容器
公开(公告)号：US5615145A
公开(公告)日：1997-03-25
申请号：US580090
申请日：1995-12-20
申请人： Kan Takeuchi , Katsumi Matsuno , Kazuhiko Kajiyama , Osamu Nagashima , Masatoshi Hasegawa
发明人： Kan Takeuchi , Katsumi Matsuno , Kazuhiko Kajiyama , Osamu Nagashima , Masatoshi Hasegawa
IPC分类号： G11C11/22 , G11C14/00 , H01L21/8242 , H01L21/8246 , H01L27/10 , H01L27/105 , H01L27/108
CPC分类号： G11C11/22
摘要： A semiconductor memory which includes a plurality of memory cells each having first and second capacitors connected in series and a field-effect transistor whose source or drain is connected to a node between the first and second capacitors. The memory cells are arranged at intersections of bit lines and word lines thereby forming a matrix. The first capacitor of each memory cell is a ferroelectric capacitor using a ferroelectric material as an insulating film. A plate electrode of the first capacitor of each memory cell is held at a first potential when the memory is operated in a first mode and the plate electrode of the first capacitor is held at a second potential when the memory is operated in a second mode. The first potential is different from the second potential.
摘要翻译：一种半导体存储器，包括多个存储单元，每个存储单元均具有串联连接的第一和第二电容器，以及源极或漏极连接到第一和第二电容器之间的节点的场效应晶体管。存储单元布置在位线和字线的交点处，从而形成矩阵。每个存储单元的第一电容器是使用铁电材料作为绝缘膜的铁电电容器。当存储器以第一模式操作时，每个存储单元的第一电容器的平板电极被保持在第一电位，并且当存储器在第二模式下操作时，第一电容器的平板电极被保持在第二电位。第一个潜力与第二个潜力不同。

8. 发明授权

US09110274B2 Catadioptric optical system and image-pickup apparatus having the same 有权
标题翻译：反折射光学系统和具有其的摄像装置
公开(公告)号：US09110274B2
公开(公告)日：2015-08-18
申请号：US13579100
申请日：2011-04-20
申请人： Kazuhiko Kajiyama , Masayuki Suzuki , Yuji Katashiba
发明人： Kazuhiko Kajiyama , Masayuki Suzuki , Yuji Katashiba
IPC分类号： G02B17/08
CPC分类号： G02B17/0808 , G02B17/0856
摘要： A catadioptric optical system of the present invention includes a catadioptric unit configured to condense light fluxes from an object and to form an intermediate image of the object, a field lens disposed at a position where the intermediate image are formed, and a dioptric unit configured to form the intermediate image on an image surface, and when νcat denotes a smallest Abbe number in Abbe numbers of materials of the first and second optical elements configuring the catadioptric unit and νdio denotes a smallest Abbe number in Abbe numbers of materials of a plurality of dioptric optical elements configuring the dioptric unit, νdio
摘要翻译：本发明的反折射光学系统包括：折反射单元，被配置为使来自物体的光束冷凝并形成物体的中间像;设置在形成中间像的位置的场透镜;以及折射单元，被配置为在图像表面上形成中间图像，并且当＆ngr; cat表示构成反射折射单元的第一和第二光学元件的材料的阿贝数中的最小阿贝数时，dio表示阿贝的最小阿贝数配置多个度数光学元件，构成度数单元，满足目标。

9. 发明申请

US20120314052A1 CATADIOPTRIC OPTICAL SYSTEM AND IMAGE-PICKUP APPARATUS HAVING THE SAME 有权
标题翻译：有源光学系统和具有该光学系统的图像拾取器具
公开(公告)号：US20120314052A1
公开(公告)日：2012-12-13
申请号：US13579100
申请日：2011-04-20
申请人： Kazuhiko Kajiyama , Masayuki Suzuki , Yuji Katashiba
发明人： Kazuhiko Kajiyama , Masayuki Suzuki , Yuji Katashiba
IPC分类号： G02B17/08 , H04N7/18
CPC分类号： G02B17/0808 , G02B17/0856
摘要： A catadioptric optical system of the present invention includes a catadioptric unit configured to condense light fluxes from an object and to form an intermediate image of the object, a field lens disposed at a position where the intermediate image are formed, and a dioptric unit configured to form the intermediate image on an image surface, and when νcat denotes a smallest Abbe number in Abbe numbers of materials of the first and second optical elements configuring the catadioptric unit and νdio denotes a smallest Abbe number in Abbe numbers of materials of a plurality of dioptric optical elements configuring the dioptric unit, νdio
摘要翻译：本发明的反折射光学系统包括：折反射单元，被配置为使来自物体的光束冷凝并形成物体的中间像;设置在形成中间像的位置的场透镜;以及折射单元，被配置为在图像表面上形成中间图像，并且当＆ngr; cat表示构成反射折射单元的第一和第二光学元件的材料的阿贝数中的最小阿贝数时，dio表示阿贝的最小阿贝数配置多个度数光学元件，构成度数单元，满足目标。

10. 发明授权

US08149386B2 Illumination optical system, exposure apparatus using the same and device manufacturing method 有权
标题翻译：照明光学系统，使用相同的曝光装置和装置制造方法
公开(公告)号：US08149386B2
公开(公告)日：2012-04-03
申请号：US12390315
申请日：2009-02-20
申请人： Kazuhiko Kajiyama
发明人： Kazuhiko Kajiyama
IPC分类号： G03B27/70
CPC分类号： G03B27/72 , G03F7/70075
摘要： An illumination optical system includes a pair of fly-eye mirrors configured to receive light from a light source, a first condenser configured to condense light from the pair of fly-eye mirrors, a reflection type integrator configured to receive light from the first condenser, the reflection type integrator including a plurality of cylindrical reflective surfaces having parallel generating line directions, an aperture stop arranged perpendicular to the generating line direction, and a second condenser configured to superpose on an illuminated surface luminous fluxes from a plurality of cylindrical reflective surfaces of the reflection type integrator.
摘要翻译：一种照明光学系统，包括配置成从光源接收光的一对飞眼镜，被配置为使来自该一对飞眼镜的光聚光的第一聚光镜，被配置为接收来自第一冷凝器的光的反射型积分器，所述反射型积分器包括具有平行的生成线方向的多个圆柱形反射表面，垂直于所述生成线方向布置的孔径光阑;以及第二聚光器，被配置为在照射表面上叠加来自所述发光线方向的多个圆柱形反射表面的光通量反射型积分器。

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