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    • 4. 发明申请
    • SYSTEM AND METHOD FOR MODELING THROUGH SILICON VIA
    • 通过硅建模的系统和方法
    • US20130246990A1
    • 2013-09-19
    • US13419959
    • 2012-03-14
    • Hsiao-Tsung YENYu-Ling LinChin-Wei Kuo
    • Hsiao-Tsung YENYu-Ling LinChin-Wei Kuo
    • G06F17/50
    • G06F17/5036H01L23/49827H01L2224/13H01L2224/16225H01L2924/15311
    • A computer implemented system comprises a processor programmed to analyze a circuit to determine a response of the circuit to an input radio frequency (RF) signal, for at least one of designing, manufacturing, and testing the circuit. An interposer model is tangibly embodied in a non-transitory machine readable storage medium to be accessed by the processor. The interposer model is processed by the computer to output data representing a response of a though substrate via (TSV) to the radio frequency (RF) signal. The interposer model comprises a plurality of TSV models. Each TSV model has a respective three-port network. One of the ports of each three-port network is a floating node. The floating nodes of each of the three-port networks are connected to each other.
    • 计算机实现的系统包括被编程为分析电路以确定电路对输入射频(RF)信号的响应的处理器,用于设计,制造和测试电路中的至少一个。 中介层模型有形地体现在待处理器访问的非暂时机器可读存储介质中。 内插器模型由计算机处理以将表示通过(TSV)的基板的响应的数据输出到射频(RF)信号。 内插器模型包括多个TSV模型。 每个TSV模型都有相应的三端口网络。 每个三端口网络的一个端口是浮动节点。 每个三端口网络的浮动节点彼此连接。
    • 5. 发明申请
    • INTEGRATED CIRCUITS AND METHODS OF FORMING THE SAME
    • 集成电路及其形成方法
    • US20110298551A1
    • 2011-12-08
    • US12795734
    • 2010-06-08
    • Hsiao-Tsung YENHsien-Pin HUJhe-Ching LUChin-Wei KUOMing-Fa CHENSally LIU
    • Hsiao-Tsung YENHsien-Pin HUJhe-Ching LUChin-Wei KUOMing-Fa CHENSally LIU
    • H03B5/12H01L21/329H01L29/93
    • H01L27/016H01L29/93
    • A three-dimensional integrated circuit includes a semiconductor substrate where the substrate has an opening extending through a first surface and a second surface of the substrate and where the first surface and the second surface are opposite surfaces of the substrate. A conductive material substantially fills the opening of the substrate to form a conductive through-substrate-via (TSV). An active circuit is disposed on the first surface of the substrate, an inductor is disposed on the second surface of the substrate and the TSV is electrically coupled to the active circuit and the inductor. The three-dimensional integrated circuit may include a varactor formed from a dielectric layer formed in the opening of the substrate such that the conductive material is disposed adjacent the dielectric layer and an impurity implanted region disposed surrounding the TSV such that the dielectric layer is formed between the impurity implanted region and the TSV.
    • 三维集成电路包括半导体衬底,其中衬底具有延伸穿过衬底的第一表面和第二表面的开口,并且第一表面和第二表面与衬底相对的表面。 导电材料基本上填充衬底的开口以形成导电的通过衬底通孔(TSV)。 有源电路设置在衬底的第一表面上,电感器设置在衬底的第二表面上,并且TSV电耦合到有源电路和电感器。 三维集成电路可以包括由形成在基板的开口中的电介质层形成的变容二极管,使得导电材料邻近介电层设置,以及设置在TSV周围的杂质注入区域,使得介电层形成在 杂质注入区和TSV。