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    • 7. 发明授权
    • Movable micro-device
    • 移动微型装置
    • US08031459B2
    • 2011-10-04
    • US12071746
    • 2008-02-26
    • Xiaoyu MiTakeaki ShimanouchiMasahiko ImaiSatoshi Ueda
    • Xiaoyu MiTakeaki ShimanouchiMasahiko ImaiSatoshi Ueda
    • H01G5/01H01G5/04H01G7/00
    • H01G5/16H01G5/011H01G5/06H03J3/20
    • A micro-device includes a movable part, a frame and a connecting part. The movable part has a main portion, a first capacitor electrode and a first driver electrode. The capacitor electrode and the driver electrode have electrode teeth extending from the main portion. The frame includes second capacitor and driver electrodes, where the second capacitor electrode has electrode teeth extending toward the first capacitor electrode, and the second driver electrode has electrode teeth extending toward the first driver electrode. The connecting part connects the movable part to the frame. The first and second capacitor electrodes have their electrode teeth overlapped in their initial position. The movable part is rotatable for varying the extent of the overlapping between the first and second driver electrodes.
    • 微型装置包括可移动部件,框架和连接部件。 可动部具有主要部分,第一电容电极和第一驱动电极。 电容电极和驱动电极具有从主要部分延伸的电极齿。 该框架包括第二电容器和驱动电极,其中第二电容器电极具有朝着第一电容器电极延伸的电极齿,并且第二驱动电极具有朝向第一驱动电极延伸的电极齿。 连接部将可动部连接到框架。 第一和第二电容器电极的电极齿在其初始位置重叠。 可移动部分可旋转以改变第一和第二驱动器电极之间的重叠程度。
    • 8. 发明申请
    • Movable micro-device
    • 移动微型装置
    • US20080218933A1
    • 2008-09-11
    • US12071746
    • 2008-02-26
    • Xiaoyu MiTakeaki ShimanouchiMasahiko ImaiSatoshi Ueda
    • Xiaoyu MiTakeaki ShimanouchiMasahiko ImaiSatoshi Ueda
    • H01G5/011
    • H01G5/16H01G5/011H01G5/06H03J3/20
    • A micro-device includes a movable part, a frame and a connecting part. The movable part has a main portion, a first capacitor electrode and a first driver electrode. The capacitor electrode and the driver electrode have electrode teeth extending from the main portion. The frame includes second capacitor and driver electrodes, where the second capacitor electrode has electrode teeth extending toward the first capacitor electrode, and the second driver electrode has electrode teeth extending toward the first driver electrode. The connecting part connects the movable part to the frame. The first and second capacitor electrodes have their electrode teeth overlapped in their initial position. The movable part is rotatable for varying the extent of the overlapping between the first and second driver electrodes.
    • 微型装置包括可移动部件,框架和连接部件。 可动部具有主要部分,第一电容电极和第一驱动电极。 电容电极和驱动电极具有从主要部分延伸的电极齿。 该框架包括第二电容器和驱动电极,其中第二电容器电极具有朝着第一电容器电极延伸的电极齿,并且第二驱动电极具有朝向第一驱动电极延伸的电极齿。 连接部将可动部连接到框架。 第一和第二电容器电极的电极齿在其初始位置重叠。 可移动部分可旋转以改变第一和第二驱动器电极之间的重叠程度。
    • 9. 发明申请
    • Variable capacitor and method of making the same
    • 可变电容器及其制作方法
    • US20100246088A1
    • 2010-09-30
    • US12662177
    • 2010-04-05
    • Takeaki ShimanouchiMasahiko ImaiSatoshi Ueda
    • Takeaki ShimanouchiMasahiko ImaiSatoshi Ueda
    • H01G7/06B05D5/12
    • H01G5/18H01G5/38
    • A capacitor manufacturing method provides variable capacitors whose capacitances remain stable under the influence of temperature change. Such a variable capacitor includes a fixed electrode, a movable electrode film facing the fixed electrode, and an anchor portion that provides partial connection between the fixed electrode and the movable electrode film. For making this variable capacitor, a first electrode is formed to serve as the fixed electrode. Then, an anchor portion is formed on the fixed electrode, and a sacrifice film is formed to cover the fixed electrode but partially expose the anchor portion. A second electrode is formed on the sacrifice film to serve as the movable electrode film, bonded to the anchor portion. Finally, the sacrifice film is removed.
    • 电容器制造方法提供了可变电容器,其电容在温度变化的影响下保持稳定。 这种可变电容器包括固定电极,与固定电极相对的可动电极膜,以及在固定电极和可动电极膜之间提供部分连接的锚固部分。 为了制造该可变电容器,形成第一电极用作固定电极。 然后,在固定电极上形成锚定部,并且形成牺牲膜以覆盖固定电极,但是部分地露出锚定部。 在牺牲膜上形成第二电极,作为可动电极膜,结合到锚定部。 最后,牺牲片被去除。