会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Die bonding method and apparatus
    • 芯片接合方法和装置
    • US07087457B2
    • 2006-08-08
    • US10772936
    • 2004-02-05
    • Yoshiyuki OgataHisashi Arai
    • Yoshiyuki OgataHisashi Arai
    • H01L21/58H05K13/04
    • H01L21/67259H01L21/67144Y10T29/49131
    • A die bonding method and apparatus that performs bonding position detection and bonding inspection without lowering the productivity, in which after a bonding head has bonded a semiconductor chip to an island, the bonding head is moved to a wafer to pick up a semiconductor chip and is returned to the island; and during this period, an island used for bonding inspection (that is the island on which bonding has just been performed) and an island used for position detection (that is the island on which bonding is to be done next) are imaged by a camera in the same visual field, and inspection of the bonding conditions of the island used for inspection and detection of the position of the island used for position detection are performed based on the acquired image data.
    • 一种在不降低生产率的情况下执行结合位置检测和接合检查的芯片接合方法和装置,其中在将半导体芯片接合到岛上的接合头之后,将接合头移动到晶片以拾取半导体芯片,并且是 回到岛上 在此期间,用于粘接检查的岛(即刚刚进行接合的岛)和用于位置检测的岛(即接下来要进行接合的岛)用摄像机成像 在相同的视场中,基于获取的图像数据进行用于检查的岛的接合条件的检查和用于位置检测的岛的位置的检测。