会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明申请
    • INSPECTION APPARATUS AND INSPECTION SYSTEM
    • 检查装置和检查系统
    • US20130250297A1
    • 2013-09-26
    • US13990103
    • 2011-10-11
    • Masaaki ItoMinori Noguchi
    • Masaaki ItoMinori Noguchi
    • G01N21/95
    • G01N21/9501G01N21/95607
    • Disclosed here is a macro inspection apparatus for a sample such as a semiconductor wafer having a pattern formed thereon, the apparatus being capable of detecting abnormalities in dimension and size with high sensitivity.The inspection apparatus for a sample having pattern formed thereon includes: an illumination optical system which illuminates the sample having the pattern formed thereon; a detection optical system which receives scattered light from the pattern; an imaging device which is disposed over a pupil plane of the detection optical system, the imaging device acquiring Fourier images of the pattern; and a processing unit which compares the Fourier images with the Fourier image of the normal pattern to detect an irregularity of the pattern.
    • 这里公开了一种用于诸如其上形成有图案的半导体晶片的样品的宏观检查装置,该装置能够以高灵敏度检测尺寸和尺寸的异常。 用于其上形成有图案的样品的检查装置包括:照射具有形成在其上的图案的样品的照明光学系统; 检测光学系统,其接收来自图案的散射光; 成像装置,其设置在所述检测光学系统的光瞳平面上,所述成像装置获取所述图案的付里叶图像; 以及处理单元,其将傅立叶图像与正常图案的傅里叶图像进行比较,以检测图案的不规则性。
    • 9. 发明授权
    • Electro-optical device and electronic apparatus
    • 电光装置和电子设备
    • US07746659B2
    • 2010-06-29
    • US12072165
    • 2008-02-25
    • Masaaki Ito
    • Masaaki Ito
    • H05K1/18
    • G02F1/13452G02F1/133385
    • The invention provides a heat dissipater such as a heat dissipation member that dissipates heat of an integrated circuit that is formed on a flexible substrate such as a flexible printed circuit board. The heat dissipater according to an aspect of the invention includes; a main body section that is formed in the shape of a hollow sleeve in such a manner that the flexible substrate can be inserted through and inserted inside the main body section; and an adhering section that is formed on an inner surface of the main body section in such a manner that the main body section and the integrated circuit are adhered to each other via the adhering section.
    • 本发明提供一种散热器,例如散热构件,其散热形成在诸如柔性印刷电路板的柔性基板上的集成电路的热量。 根据本发明的一个方面的散热器包括: 主体部,其形成为中空套筒的形状,使得柔性基板能够插入并插入到主体部内; 以及粘附部,其以主体部和集成电路经由粘接部彼此粘合形成在主体部的内表面上。
    • 10. 发明申请
    • INSPECTION APPARATUS
    • 检查装置
    • US20090202138A1
    • 2009-08-13
    • US12361954
    • 2009-01-29
    • Masaaki ItoMinori NoguchiShigeru Matsui
    • Masaaki ItoMinori NoguchiShigeru Matsui
    • G06K9/00
    • G01N21/9501G01N21/95623G01N2021/8822G06K9/74
    • The present invention provides an inspection apparatus having a high throughput and high sensitivity with respect to a number of various manufacturing processes and defects of interest in inspection of a specimen such as a semiconductor wafer on which a pattern is formed. The apparatus illuminates with light the specimen having the pattern formed thereon, forms an image of the specimen on an image sensor through a reflective optics, and determines the existence/nonexistence of a defect. The reflective optics has a conjugate pair of Fourier transform optics. An aberration of the reflective optics is corrected off-axis. The reflective optics has a field of view in non-straight-line slit form on the specimen surface. Also, the optics is of a reflection type, includes a conjugate pair of Fourier transform optics and has a field of view in non-straight-line slit form. An optimum wavelength band is selected according to the specimen (FIG. 1).
    • 本发明提供了一种检测装置,其相对于在其上形成有图案的半导体晶片的样本的检查中的多种制造工艺和多个不同的制造工艺和缺陷而具有高生产率和高灵敏度。 该装置用光照射具有形成在其上的图案的样本,通过反射光学元件在图像传感器上形成样本的图像,并且确定缺陷的存在/不存在。 反射光学器件具有傅立叶变换光学器件的共轭对。 反射光学器件的像差被偏离校正。 反射光学元件在样品表面上具有非直线狭缝形式的视场。 此外,光学器件是反射型的,包括傅立叶变换光学器件的共轭对,并且具有非直线狭缝形式的视场。 根据样品选择最佳波长带(图1)。