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    • 5. 发明申请
    • SUBSTRATE PROCESSING APPARATUS INSPECTION METHOD AND METHOD FOR REDUCING QUANTITY OF PARTICLES ON SUBSTRATE
    • 基板处理装置检查方法和方法,用于减少基板上颗粒的数量
    • US20080213082A1
    • 2008-09-04
    • US12023316
    • 2008-01-31
    • Yoshiyuki KATO
    • Yoshiyuki KATO
    • H01L21/677
    • H01L21/67069H01L21/67253H01L21/67288
    • It is intended to prevent an increase in the quantity of particles on a test-piece substrate having undergone processing executed at a low temperature equal to or lower than 0° C. In an inspection method adopted when inspecting the state inside a processing chamber by measuring the quantity of particles on a test-piece substrate, i.e., a test-piece wafer, the test-piece wafer W having undergone a specific type of test processing inside the processing chamber is carried out into a transfer chamber via a loadlock chamber after holding it in the loadlock chamber over a predetermined length of time while delivering a dried inert gas into the loadlock chamber. The predetermined length of time is set to a value at which the increase in the quantity of particles on the test-piece wafer can be kept down at least within an acceptable range.
    • 旨在防止在等于或低于0℃的低温下进行的经过处理的试验片基板上的颗粒数量的增加。在通过测量检查处理室内的状态时所采用的检查方法 在试片基片即试片晶片上,在处理室内进行了特定类型的试验处理的试片晶片W在保持后通过负载锁定室进行转印室 将其在负载锁定室中预定长度的时间,同时将干燥的惰性气体输送到负载锁定室中。 预定的时间长度被设定为可以将试片晶片上的颗粒数量的增加保持在至少在可接受的范围内的值。
    • 7. 发明申请
    • IMAGING APPARATUS CAPABLE OF CHANGING FRAME RATE
    • 成像装置可以更改帧率
    • US20090147122A1
    • 2009-06-11
    • US12329956
    • 2008-12-08
    • Yoshiyuki KATO
    • Yoshiyuki KATO
    • H04N5/235H04N5/222
    • H04N5/2352H04N5/23245
    • The invention is provided to perform exposure control that uses a diagram for monitor-through in a shooting waiting state in which the output frame rate of an image sensor is set into 30 fps and that for high-speed movie recording is performed during move images shooting with the high-speed movie mode in which the output frame rate is set into 300 fps. Upon shifting to exposure control at the high-speed movie mode, the aperture value to be first set is determined uniquely from the current LV value by using a program diagram for preparing to start high-speed movie recording in which the space scale of the program diagram for monitor-through is converted into a space scale similar to that of the diagram for high-speed movie recording. Then, the exposure adjustment that sets the determined aperture value, and the shutter speed and the gain corresponding to thereof as exposure control values.
    • 提供本发明以在图像传感器的输出帧速率被设置为30fps并且在移动图像拍摄期间执行高速动画记录的拍摄等待状态下执行使用图表进行监视的图像的曝光控制 其中输出帧速率设置为300fps的高速电影模式。 在高速电影模式转换到曝光控制时,通过使用用于准备开始高速动画录制的程序图,唯一地从当前LV值确定要首先设定的光圈值,其中程序的空间尺度 用于监视的图被转换成与用于高速电影录制的图的类似的空间大小。 然后,将确定的光圈值设定的曝光调整和与其对应的快门速度和增益作为曝光控制值。
    • 10. 发明申请
    • IMAGING APPARATUS AND IMAGING METHOD FOR TAKING MOVING IMAGE
    • 用于拍摄移动图像的成像装置和成像方法
    • US20120189263A1
    • 2012-07-26
    • US13352607
    • 2012-01-18
    • Yoshiyuki KATOTakeharu Takeuchi
    • Yoshiyuki KATOTakeharu Takeuchi
    • H04N5/91
    • H04N5/23245H04N5/772H04N5/783
    • An imaging apparatus including: an imaging section that sequentially takes images of an object; a moving image recording section that sequentially records the images of the object as a series of moving image data; an adjuster that adjusts an imaging condition for imaging the object in accordance with a change in state of the object during imaging and recording of the series of moving image data; a switching section that switches between a first recording frame rate and a second recording frame rate that is higher than the first recording frame rate; and an adjustment controller that controls adjustment of the imaging condition made by the adjuster during the recording of the moving image data at the second recording frame rate, when the switching section switches from the first recording frame rate to the second recording frame rate.
    • 一种成像装置,包括:成像部,其顺序地拍摄物体的图像; 运动图像记录部分,其顺序地将所述对象的图像记录为一系列运动图像数据; 调节器,其调整成像条件以根据所述对象在所述一系列运动图像数据的成像和记录期间的状态的变化来成像所述物体; 切换部分,其在第一记录帧速率和高于第一记录帧速率的第二记录帧速率之间切换; 以及调节控制器,当切换部从第一记录帧速率切换到第二记录帧速率时,控制在以第二记录帧速率记录运动图像数据期间由调节器进行的成像条件的调整。