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    • 3. 发明申请
    • METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM
    • 制造磁记录介质的方法
    • US20110024388A1
    • 2011-02-03
    • US12842502
    • 2010-07-23
    • Takahiro SUWANarutoshi FukuzawaShuichi OkawaYoshinori Uchiyama
    • Takahiro SUWANarutoshi FukuzawaShuichi OkawaYoshinori Uchiyama
    • G11B5/84
    • G11B5/855
    • A method for manufacturing a magnetic recording medium is provided which can sufficiently reduce variations in surface roughness even in the simultaneous presence of a region of a relatively wide concave and convex portion and a region of a relatively narrow concave and convex portion in the recording layer. The method includes the steps of etching a recording layer based on a (first) mask layer to process it in a concavo-convex pattern, and depositing a filler over the recording layer and the mask layer to fill a concave portion with the filler. In between those steps, provided is the step of removing part of the first mask layer over a recording element (a convex portion of the recording layer) by dry etching in which an etching rate for the mask layer is higher than that for the recording layer so that the mask layer remains over the recording element.
    • 提供了一种用于制造磁记录介质的方法,即使在相对较宽的凹凸部分的区域和记录层中相对窄的凹凸部分的区域同时存在的情况下,也可以充分减小表面粗糙度的变化。 该方法包括以下步骤:基于(第一)掩模层蚀刻记录层,以凹凸图案处理该记录层;以及在记录层和掩模层上沉积填料以填充填料的凹部。 在这些步骤之间,提供了通过干蚀刻在记录元件(记录层的凸部)上去除部分第一掩模层的步骤,其中掩模层的蚀刻速率高于记录层的蚀刻速率 使得掩模层保留在记录元件上。
    • 6. 发明申请
    • Method for manufacturing magnetic recording medium
    • 磁记录介质的制造方法
    • US20090242508A1
    • 2009-10-01
    • US12382653
    • 2009-03-20
    • Kazuhiro HattoriShuichi OkawaNarutoshi FukuzawaTakahiro Suwa
    • Kazuhiro HattoriShuichi OkawaNarutoshi FukuzawaTakahiro Suwa
    • B44C1/22
    • G11B5/855B82Y10/00G11B5/743
    • A filling material different from a first mask layer (temporary coating material) is deposited over a workpiece to fill concave portions. At least part of excess portions of the filling material is removed by a dry etching method such that at least part of the side surfaces of the first mask layer over recording elements are exposed. Then, the first mask layer is removed by a dry etching method which uses a reactive gas having the property of chemically reacting with and removing both the filling material and the first mask layer as a processing gas and in which an etching rate for the first mask layer is higher than that for the filling material, and the etching rate for the filling material is higher than that for a recording layer (a lower layer that is in contact with a lower surface of the first mask layer over recording elements).
    • 不同于第一掩模层(临时涂层材料)的填充材料沉积在工件上以填充凹部。 通过干蚀刻方法去除填充材料的多余部分的至少一部分,使得第一掩模层的超过记录元件的侧表面的至少一部分被暴露。 然后,通过干式蚀刻法除去第一掩模层,该干蚀刻方法使用具有与填充材料和第一掩模层化学反应的特性的反应气体作为处理气体,并且其中第一掩模的蚀刻速率 层高于填充材料的蚀刻速率,并且对于记录层(与记录元件上的第一掩模层的下表面接触的下层)的填充材料的蚀刻速率高。
    • 8. 发明申请
    • MAGNETIC RECORDING MEDIUM, RECORDING/REPRODUCING APPARATUS, AND STAMPER
    • 磁记录介质,记录/再现设备和印章
    • US20100195237A1
    • 2010-08-05
    • US12698228
    • 2010-02-02
    • Takahiro SuwaNarutoshi Fukuzawa
    • Takahiro SuwaNarutoshi Fukuzawa
    • G11B5/09G11B17/00
    • G11B5/82B82Y10/00G11B5/59655G11B5/743G11B5/746G11B5/855G11B5/865
    • A magnetic recording medium has data track patterns formed by concave/convex patterns in data recording regions on at least one surface of a substrate and servo patterns formed by concave/convex patterns in servo pattern regions between the data recording regions. The concave/convex patterns include convexes, at least protruding end portions of which are formed of magnetic material, and concaves. A burst pattern region of each servo pattern region includes N (where N is at least two) burst regions, in which burst patterns, where plural burst signal unitary parts are aligned along a direction of rotation, are formed as the servo patterns. The burst signal unitary parts formed in M (where M is no greater than (N−1)) out of the N burst regions are concaves, and the burst signal unitary parts formed in L (where L is equal to (N−M)) out of the N burst regions are convexes.
    • 磁记录介质具有在基板的至少一个表面上的数据记录区域中由凹/凸图案形成的数据轨道图案,以及在数据记录区域之间的伺服图案区域中由凹/凸图案形成的伺服图案。 凹凸图案包括至少凸出的端部由磁性材料形成的凸起和凹部。 每个伺服模式区域的脉冲串模式区域包括N(其中N是至少两个)脉冲串区域,其中多个脉冲信号单位部分沿着旋转方向排列的脉冲串模式被形成为伺服模式。 在N个突发区域中,在M(其中M不大于(N-1))形成的突发信号单位部分是凹陷,并且形成在L中的突发信号单位部分(其中L等于(N-M) )在N个突发区域中是凸的。