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    • 1. 发明申请
    • METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM
    • 制造磁记录介质的方法
    • US20110024388A1
    • 2011-02-03
    • US12842502
    • 2010-07-23
    • Takahiro SUWANarutoshi FukuzawaShuichi OkawaYoshinori Uchiyama
    • Takahiro SUWANarutoshi FukuzawaShuichi OkawaYoshinori Uchiyama
    • G11B5/84
    • G11B5/855
    • A method for manufacturing a magnetic recording medium is provided which can sufficiently reduce variations in surface roughness even in the simultaneous presence of a region of a relatively wide concave and convex portion and a region of a relatively narrow concave and convex portion in the recording layer. The method includes the steps of etching a recording layer based on a (first) mask layer to process it in a concavo-convex pattern, and depositing a filler over the recording layer and the mask layer to fill a concave portion with the filler. In between those steps, provided is the step of removing part of the first mask layer over a recording element (a convex portion of the recording layer) by dry etching in which an etching rate for the mask layer is higher than that for the recording layer so that the mask layer remains over the recording element.
    • 提供了一种用于制造磁记录介质的方法,即使在相对较宽的凹凸部分的区域和记录层中相对窄的凹凸部分的区域同时存在的情况下,也可以充分减小表面粗糙度的变化。 该方法包括以下步骤:基于(第一)掩模层蚀刻记录层,以凹凸图案处理该记录层;以及在记录层和掩模层上沉积填料以填充填料的凹部。 在这些步骤之间,提供了通过干蚀刻在记录元件(记录层的凸部)上去除部分第一掩模层的步骤,其中掩模层的蚀刻速率高于记录层的蚀刻速率 使得掩模层保留在记录元件上。