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    • 4. 发明授权
    • Dielectric element and method for fabricating the same
    • 介电元件及其制造方法
    • US06597027B1
    • 2003-07-22
    • US09709423
    • 2000-11-13
    • Akira HashimotoYoshimi SatoAtsushi KawakamiHideya KobariTetsuya Nakajima
    • Akira HashimotoYoshimi SatoAtsushi KawakamiHideya KobariTetsuya Nakajima
    • H01L2100
    • H01L28/75H01L28/55Y10S438/957
    • It is disclosed a dielectric element comprising a lower electrode, a dielectric layer, and an upper electrode which are provided on a substrate, in which at least one of the electrodes is a Pt layer, a Ru layer is used as a base layer for the Pt layer. In the fabrication of the dielectric element, the Pt layer is formed by electroplating, a photoresist pattern is used as a plating mask, and an Ru layer is formed as a seed layer. The present invention makes it possible to provide a dielectric element using Pt as an electrode material, that is capable of easily forming a Pt electrode having excellent electrical characteristics without generating voids or seams, that is capable of forming a fine pattern, and that does not occur contamination in a processing chamber, and a method for fabricating a dielectric element of having the characteristics mentioned above.
    • 公开了一种介电元件,其包括设置在基板上的下电极,电介质层和上电极,其中至少一个电极为Pt层,Ru层用作基极层 Pt层。 在电介质元件的制造中,通过电镀形成Pt层,使用光致抗蚀剂图案作为电镀掩模,并且形成Ru层作为籽晶层。 本发明使得可以提供使用Pt作为电极材料的电介质元件,其能够容易地形成能够形成精细图案的电气特性优异的Pt电极而不产生空隙或接缝,并且不 在处理室中发生污染,以及具有上述特征的制造电介质元件的方法。
    • 5. 发明授权
    • Dielectric element and method for fabricating the same
    • 介电元件及其制造方法
    • US06787412B2
    • 2004-09-07
    • US10458199
    • 2003-06-11
    • Akira HashimotoYoshimi SatoAtsushi KawakamiHideya KobariTetsuya Nakajima
    • Akira HashimotoYoshimi SatoAtsushi KawakamiHideya KobariTetsuya Nakajima
    • H01L218242
    • H01L28/75H01L28/55Y10S438/957
    • It is disclosed a dielectric element comprising a lower electrode, a dielectric layer, and an upper electrode which are provided on a substrate, in which at least one of the electrodes is a Pt layer, a Ru layer is used as a base layer for the Pt layer. In the fabrication of the dielectric element, the Pt layer is formed by electroplating, a photoresist pattern is used as a plating mask, and an Ru layer is formed as a seed layer. The present invention makes it possible to provide a dielectric element using Pt as an electrode material, that is capable of easily forming a Pt electrode having excellent electrical characteristics without generating voids or seams, that is capable of forming a fine pattern, and that does not occur contamination in a processing chamber, and a method for fabricating a dielectric element of having the characteristics mentioned above.
    • 公开了一种介电元件,其包括设置在基板上的下电极,电介质层和上电极,其中至少一个电极为Pt层,Ru层用作基极层 Pt层。 在电介质元件的制造中,通过电镀形成Pt层,使用光致抗蚀剂图案作为电镀掩模,并且形成Ru层作为籽晶层。 本发明使得可以提供使用Pt作为电极材料的电介质元件,其能够容易地形成能够形成精细图案的电气特性优异的Pt电极而不产生空隙或接缝,并且不 在处理室中发生污染,以及具有上述特征的制造电介质元件的方法。