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    • 6. 发明授权
    • MEMS switch and method of manufacturing the MEMS switch
    • MEMS开关和制造MEMS开关的方法
    • US08390173B2
    • 2013-03-05
    • US12935282
    • 2009-03-30
    • Takaaki YoshiharaYoshiki HayasakiTakeo ShiraiTomoaki MatsushimaHiroshi KawadaYousuke Hagihara
    • Takaaki YoshiharaYoshiki HayasakiTakeo ShiraiTomoaki MatsushimaHiroshi KawadaYousuke Hagihara
    • H01L41/00H02N1/00H02N11/00
    • B81B3/0021B81B2201/032H01H59/0009H01H2057/006Y10T29/42
    • The MEMS switch comprises a substrate with signal-lines having fixed-contacts, a movable-plate with a movable-contact, a flexible support-member supporting the movable-plate, a static-actuator and a piezoelectric-actuator configured to contact the movable-contact with the fixed-contact. The movable-contact is provided at its longitudinal center with the movable-contact, and its both the longitudinal ends with static-movable-electrode-plate. The support-member is four strips disposed on portions outside of the both width ends of the movable plate. The strip extends along the longitudinal direction of the movable plate, provided with a first end fixed to the movable plate, and provided with a second end fixed to the substrate. The piezoelectric-element is disposed on an upper surface of the strip to be located at a portion outside of the width ends of the movable-plate. The piezoelectric-actuator is configured to develop the stress applied to the coupling-portion which is created between each the strip and the movable-plate.
    • MEMS开关包括具有固定触点的信号线的基板,具有可移动触点的可移动板,支撑可移动板的柔性支撑构件,静电致动器和压电致动器,其构造成接触可动触点 - 与固定联系人联系。 可动触点在其纵向中心处设置有可动触头,并且其两个纵向端部具有静电可动电极板。 支撑构件是设置在可动板的两个宽度端的外侧的四个条。 该条带沿可移动板的纵向方向延伸,设置有固定到可移动板的第一端,并设置有固定到基板的第二端。 压电元件设置在条的上表面上,以位于可移动板的宽度端的外侧的部分。 压电致动器被配置为产生施加到在每个条和可移动板之间产生的联接部分的应力。
    • 8. 发明申请
    • MEMS SWITCH AND METHOD OF MANUFACTURING THE MEMS SWITCH
    • MEMS开关及制造MEMS开关的方法
    • US20110024274A1
    • 2011-02-03
    • US12935282
    • 2009-03-30
    • Takaaki YoshiharaYoshiki HayasakiTakeo ShiraiTomoaki MatsushimaHiroshi KawadaYousuke Hagihara
    • Takaaki YoshiharaYoshiki HayasakiTakeo ShiraiTomoaki MatsushimaHiroshi KawadaYousuke Hagihara
    • H01H57/00H01L41/22
    • B81B3/0021B81B2201/032H01H59/0009H01H2057/006Y10T29/42
    • The MEMS switch comprises a substrate with signal-lines having fixed-contacts, a movable-plate with a movable-contact, a flexible support-member supporting the movable-plate, a static-actuator and a piezoelectric-actuator configured to contact the movable-contact with the fixed-contact. The movable-contact is provided at its longitudinal center with the movable-contact, and its both the longitudinal ends with static-movable-electrode-plate. The support-member is four strips disposed on portions outside of the both width ends of the movable plate. The strip extends along the longitudinal direction of the movable plate, provided with a first end fixed to the movable plate, and provided with a second end fixed to the substrate. The piezoelectric-element is disposed on an upper surface of the strip to be located at a portion outside of the width ends of the movable-plate. The piezoelectric-actuator is configured to develop the stress applied to the coupling-portion which is created between each the strip and the movable-plate.
    • MEMS开关包括具有固定触点的信号线的基板,具有可移动触点的可移动板,支撑可移动板的柔性支撑构件,静电致动器和压电致动器,其构造成接触可动触点 - 与固定联系人联系。 可动触点在其纵向中心处设置有可动触头,并且其两个纵向端部具有静电可动电极板。 支撑构件是设置在可动板的两个宽度端的外侧的四个条。 该条带沿可移动板的纵向方向延伸,设置有固定到可移动板的第一端,并设置有固定到基板的第二端。 压电元件设置在条的上表面上,以位于可移动板的宽度端的外侧的部分。 压电致动器被配置为产生施加到在每个条和可移动板之间产生的联接部分的应力。