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1. 发明授权

US08390173B2 MEMS switch and method of manufacturing the MEMS switch 失效
标题翻译： MEMS开关和制造MEMS开关的方法
公开(公告)号：US08390173B2
公开(公告)日：2013-03-05
申请号：US12935282
申请日：2009-03-30
申请人： Takaaki Yoshihara , Yoshiki Hayasaki , Takeo Shirai , Tomoaki Matsushima , Hiroshi Kawada , Yousuke Hagihara
发明人： Takaaki Yoshihara , Yoshiki Hayasaki , Takeo Shirai , Tomoaki Matsushima , Hiroshi Kawada , Yousuke Hagihara
IPC分类号： H01L41/00 , H02N1/00 , H02N11/00
CPC分类号： B81B3/0021 , B81B2201/032 , H01H59/0009 , H01H2057/006 , Y10T29/42
摘要： The MEMS switch comprises a substrate with signal-lines having fixed-contacts, a movable-plate with a movable-contact, a flexible support-member supporting the movable-plate, a static-actuator and a piezoelectric-actuator configured to contact the movable-contact with the fixed-contact. The movable-contact is provided at its longitudinal center with the movable-contact, and its both the longitudinal ends with static-movable-electrode-plate. The support-member is four strips disposed on portions outside of the both width ends of the movable plate. The strip extends along the longitudinal direction of the movable plate, provided with a first end fixed to the movable plate, and provided with a second end fixed to the substrate. The piezoelectric-element is disposed on an upper surface of the strip to be located at a portion outside of the width ends of the movable-plate. The piezoelectric-actuator is configured to develop the stress applied to the coupling-portion which is created between each the strip and the movable-plate.
摘要翻译： MEMS开关包括具有固定触点的信号线的基板，具有可移动触点的可移动板，支撑可移动板的柔性支撑构件，静电致动器和压电致动器，其构造成接触可动触点 - 与固定联系人联系。可动触点在其纵向中心处设置有可动触头，并且其两个纵向端部具有静电可动电极板。支撑构件是设置在可动板的两个宽度端的外侧的四个条。该条带沿可移动板的纵向方向延伸，设置有固定到可移动板的第一端，并设置有固定到基板的第二端。压电元件设置在条的上表面上，以位于可移动板的宽度端的外侧的部分。压电致动器被配置为产生施加到在每个条和可移动板之间产生的联接部分的应力。

2. 发明申请

US20110024274A1 MEMS SWITCH AND METHOD OF MANUFACTURING THE MEMS SWITCH 失效
标题翻译： MEMS开关及制造MEMS开关的方法
公开(公告)号：US20110024274A1
公开(公告)日：2011-02-03
申请号：US12935282
申请日：2009-03-30
申请人： Takaaki Yoshihara , Yoshiki Hayasaki , Takeo Shirai , Tomoaki Matsushima , Hiroshi Kawada , Yousuke Hagihara
发明人： Takaaki Yoshihara , Yoshiki Hayasaki , Takeo Shirai , Tomoaki Matsushima , Hiroshi Kawada , Yousuke Hagihara
IPC分类号： H01H57/00 , H01L41/22
CPC分类号： B81B3/0021 , B81B2201/032 , H01H59/0009 , H01H2057/006 , Y10T29/42
摘要： The MEMS switch comprises a substrate with signal-lines having fixed-contacts, a movable-plate with a movable-contact, a flexible support-member supporting the movable-plate, a static-actuator and a piezoelectric-actuator configured to contact the movable-contact with the fixed-contact. The movable-contact is provided at its longitudinal center with the movable-contact, and its both the longitudinal ends with static-movable-electrode-plate. The support-member is four strips disposed on portions outside of the both width ends of the movable plate. The strip extends along the longitudinal direction of the movable plate, provided with a first end fixed to the movable plate, and provided with a second end fixed to the substrate. The piezoelectric-element is disposed on an upper surface of the strip to be located at a portion outside of the width ends of the movable-plate. The piezoelectric-actuator is configured to develop the stress applied to the coupling-portion which is created between each the strip and the movable-plate.
摘要翻译： MEMS开关包括具有固定触点的信号线的基板，具有可移动触点的可移动板，支撑可移动板的柔性支撑构件，静电致动器和压电致动器，其构造成接触可动触点 - 与固定联系人联系。可动触点在其纵向中心处设置有可动触头，并且其两个纵向端部具有静电可动电极板。支撑构件是设置在可动板的两个宽度端的外侧的四个条。该条带沿可移动板的纵向方向延伸，设置有固定到可移动板的第一端，并设置有固定到基板的第二端。压电元件设置在条的上表面上，以位于可移动板的宽度端的外侧的部分。压电致动器被配置为产生施加到在每个条和可移动板之间产生的联接部分的应力。

3. 发明申请

US20100067084A1 OPTICAL SCANNING MIRROR, SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF 失效
标题翻译：光学扫描镜，半导体结构及其制造方法
公开(公告)号：US20100067084A1
公开(公告)日：2010-03-18
申请号：US12524375
申请日：2008-01-23
申请人： Yousuke Hagihara , Kiyohiko Kawano , Hiroshi Noge
发明人： Yousuke Hagihara , Kiyohiko Kawano , Hiroshi Noge
IPC分类号： G02B26/08 , C23F1/00
CPC分类号： G02B26/0841 , G02B26/101 , H04N1/113
摘要： A semiconductor structure provided with an insulation structure in a moving unit is manufactured easily. An optical scanning mirror (semiconductor structure) is formed by processing an SOI substrate consists of a first silicon layer, an oxide film and a second silicon layer. A moving unit, which is supported on a fixed frame through first hinges, is formed on the first silicon layer. The moving unit is divided into a plurality of regions by forming trenches (insulation structure). A supporting member formed of the oxide film and the second silicon layer is formed just below the trenches. The plurality of regions of the moving frame divided by the trenches are joined to the supporting member so that the moving unit is swingable with the supporting member. Thereby, the supporting member is formed by simple etching processes, and thus, mechanical strength of the moving unit is ensured.
摘要翻译：容易地制造在移动单元中设置有绝缘结构的半导体结构。通过处理由第一硅层，氧化膜和第二硅层组成的SOI衬底来形成光学扫描镜（半导体结构）。通过第一铰链支撑在固定框架上的移动单元形成在第一硅层上。移动单元通过形成沟槽（绝缘结构）被分成多个区域。由沟槽正下方形成由氧化膜和第二硅层构成的支撑构件。由沟槽分隔的移动框架的多个区域与支撑构件接合，使得移动单元能够与支撑构件摆动。因此，通过简单的蚀刻工艺形成支撑构件，因此确保了移动单元的机械强度。

4. 发明授权

US08164812B2 Optical scanning mirror, semiconductor structure and manufacturing method thereof 失效
标题翻译：光学扫描镜，半导体结构及其制造方法
公开(公告)号：US08164812B2
公开(公告)日：2012-04-24
申请号：US12524375
申请日：2008-01-23
申请人： Yousuke Hagihara , Kiyohiko Kawano , Hiroshi Noge
发明人： Yousuke Hagihara , Kiyohiko Kawano , Hiroshi Noge
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , G02B26/101 , H04N1/113
摘要： A semiconductor structure provided with an insulation structure in a moving unit is manufactured easily. An optical scanning mirror (semiconductor structure) is formed by processing an SOI substrate consists of a first silicon layer, an oxide film and a second silicon layer. A moving unit, which is supported on a fixed frame through first hinges, is formed on the first silicon layer. The moving unit is divided into a plurality of regions by forming trenches (insulation structure). A supporting member formed of the oxide film and the second silicon layer is formed just below the trenches. The plurality of regions of the moving frame divided by the trenches are joined to the supporting member, so that the moving unit is swingable with the supporting member. Thereby, the supporting member is formed by simple etching processes, and thus, mechanical strength of the moving unit is ensured.
摘要翻译：容易地制造在移动单元中设置有绝缘结构的半导体结构。通过处理由第一硅层，氧化膜和第二硅层组成的SOI衬底来形成光学扫描镜（半导体结构）。通过第一铰链支撑在固定框架上的移动单元形成在第一硅层上。移动单元通过形成沟槽（绝缘结构）被分成多个区域。由沟槽正下方形成由氧化膜和第二硅层构成的支撑构件。由沟槽分隔的移动框架的多个区域与支撑构件接合，使得移动单元能够与支撑构件一起摆动。因此，通过简单的蚀刻工艺形成支撑构件，因此确保了移动单元的机械强度。

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