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    • 3. 发明授权
    • Method of manufacturing stamper for manufacturing information medium, stamper, and photoresist master
    • 用于制造信息介质,压模和光致抗蚀剂母版的压模的方法
    • US07204188B2
    • 2007-04-17
    • US10500816
    • 2003-01-06
    • Hisaji OyakeHiroaki TakahataKenji YoneyamaYuuichi Kawaguchi
    • Hisaji OyakeHiroaki TakahataKenji YoneyamaYuuichi Kawaguchi
    • B41F33/00
    • G11B7/263G11B7/261
    • A stamper with a sharp uneven pattern for manufacturing high precision information media and a method of manufacturing a stamper. The method includes (1) manufacturing a photoresist master by forming a light absorption layer and a photoresist layer on substrate, (2) forming a latent image on the photoresist layer, and an uneven pattern in the photoresist layer by developing the latent image, (3) forming a Ni thin film on the uneven pattern by electroless plating, (4) forming a Ni film on the Ni thin film, and (5) removing the Ni thin film and the Ni film from the photoresist master. The method also includes, prior to the step of forming the Ni thin film on the photoresist layer, a metal catalyst being provided on the surface of the uneven pattern, the metal catalyst being activated, and the surface of the uneven pattern being washed with ultra pure water.
    • 具有用于制造高精度信息介质的尖锐不均匀图案的压模以及制造压模的方法。 该方法包括:(1)通过在基板上形成光吸收层和光致抗蚀剂层来制造光致抗蚀剂母版,(2)通过显影潜像在光致抗蚀剂层上形成潜像和不透明图案( 3)通过化学镀在不平坦图案上形成Ni薄膜,(4)在Ni薄膜上形成Ni膜,(5)从光致抗蚀剂母版中去除Ni薄膜和Ni薄膜。 该方法还包括在光致抗蚀剂层上形成Ni薄膜的步骤之前,在不均匀图案的表面上设置金属催化剂,使金属催化剂活化,不均匀图案的表面用超级清洗 纯净水。
    • 5. 发明申请
    • Method of manufacturing stamper for manufacturing information medium, stamper, and photoresist master
    • 用于制造信息介质,压模和光致抗蚀剂母版的压模的方法
    • US20050039621A1
    • 2005-02-24
    • US10500816
    • 2003-01-06
    • Hisaji OyakeHiroaki TakahataKenji YoneyamaYuuichi Kawaguchi
    • Hisaji OyakeHiroaki TakahataKenji YoneyamaYuuichi Kawaguchi
    • G11B7/26B41C1/00
    • G11B7/263G11B7/261
    • A stamper with a sharp uneven pattern is obtained, and high precision information media can be manufactured using this stamper. A method of manufacturing a stamper comprises the steps of manufacturing a photoresist master 100 by forming a light absorption layer 103 and a photoresist layer 104 on top of a substrate 102, forming a latent image on the photoresist layer 104, and then forming an uneven pattern 106 in the photoresist layer 104 by developing the latent image, forming a Ni thin film 108 on the uneven pattern 106 of the photoresist master 100 by electroless plating, forming a Ni film 110 on top of the Ni thin film 108, and then removing the Ni thin film 108 and the Ni film 110 from the photoresist master 100 to form the stamper 120, wherein as preliminary treatments prior to the step of forming the Ni thin film 108 on the photoresist layer 104, a metal catalyst is provided on the surface of the uneven pattern 106, the metal catalyst is activated, and the surface of the uneven pattern 106 on which the metal catalyst has been provided is washed with ultra pure water.
    • 获得具有尖锐不均匀图案的压模,并且可以使用该压模来制造高精度的信息介质。 制造压模的方法包括以下步骤:通过在衬底102的顶部上形成光吸收层103和光致抗蚀剂层104,在光致抗蚀剂层104上形成潜像,然后形成不均匀图案来制造光致抗蚀剂母版100 通过显影潜像在光致抗蚀剂层104中,通过无电镀在光致抗蚀剂母版100的不平坦图案106上形成Ni薄膜108,在Ni薄膜108的顶部形成Ni膜110,然后除去 Ni薄膜108和来自光致抗蚀剂母版100的Ni膜110以形成压模120,其中作为在光致抗蚀剂层104上形成Ni薄膜108的步骤之前的预处理,在 不均匀图案106,金属催化剂被活化,并且用超纯水洗涤其上提供金属催化剂的不平坦图案106的表面。