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    • 3. 发明申请
    • Gas sensor
    • 气体传感器
    • US20060185420A1
    • 2006-08-24
    • US11358621
    • 2006-02-21
    • Shinichi NakagawaYoshihiro NakanoMasahito KidaTakio Kojima
    • Shinichi NakagawaYoshihiro NakanoMasahito KidaTakio Kojima
    • G01N7/00
    • G01N27/125
    • The present invention provides a gas sensor having excellent humidity resistance even if used in a high temperature and high humidity atmosphere. According to the present invention, a gas sensor is comprised of: a silicon substrate; a metal-oxide semiconductor portion comprised mainly of SnO2 and formed on the substrate; and a catalytic portion comprised of Pd and dispersed on a surface of the metal-oxide semiconductor portion, wherein the metal-oxide semiconductor portion and the catalytic portion constitute a gas sensing portion. Furthermore, an insulating portion comprised mainly of SiO2 is formed dispersedly on a surface of the gas sensing portion. Further, the catalytic portion and the insulating portion are formed on the surface of the metal-oxide semiconductor portion so that the surface additive rate, which is expressed by Si/(Pd+Si) representing the ratio in the number of atoms of Si to Pd, of the gas sensing portion having the insulating portion may be 65% or more to 97% or less, and so that the surface additive rate, which is expressed by Si/(Sn+Si) representing the ratio in the number of atoms of Si to Sn, of the gas sensing portion may be 75% or more to 97% or less.
    • 本发明提供即使在高温高湿环境下使用也具有优异的耐湿性的气体传感器。 根据本发明,气体传感器包括:硅衬底; 主要由SnO 2 N 2组成并形成在基板上的金属氧化物半导体部分; 以及由Pd构成并分散在金属氧化物半导体部分的表面上的催化部分,其中金属氧化物半导体部分和催化部分构成气体感测部分。 此外,主要由SiO 2 2组成的绝缘部分分散地形成在气体感测部分的表面上。 此外,催化剂部分和绝缘部分形成在金属氧化物半导体部分的表面上,使得由Si /(Pd + Si)表示的表示添加剂率表示Si原子数与Si 具有绝缘部分的气体感测部分的Pd可以为65%以上至97%以下,并且表示以表示原子数比的Si /(Sn + Si)表示的表面添加率 Si至Sn的气体检测部分可以为75%以上至97%以下。
    • 4. 发明授权
    • Gas sensor
    • 气体传感器
    • US07276745B2
    • 2007-10-02
    • US11358621
    • 2006-02-21
    • Shinichi NakagawaYoshihiro NakanoMasahito KidaTakio Kojima
    • Shinichi NakagawaYoshihiro NakanoMasahito KidaTakio Kojima
    • H01L23/58G01N7/00
    • G01N27/125
    • The present invention provides a gas sensor having excellent humidity resistance even if used in a high temperature and high humidity atmosphere. According to the present invention, a gas sensor is comprised of: a silicon substrate; a metal-oxide semiconductor portion comprised mainly of SnO2 and formed on the substrate; and a catalytic portion comprised of Pd and dispersed on a surface of the metal-oxide semiconductor portion, wherein the metal-oxide semiconductor portion and the catalytic portion constitute a gas sensing portion. Furthermore, an insulating portion comprised mainly of SiO2 is formed dispersedly on a surface of the gas sensing portion. Further, the catalytic portion and the insulating portion are formed on the surface of the metal-oxide semiconductor portion so that the surface additive rate, which is expressed by Si/(Pd+Si) representing the ratio in the number of atoms of Si to Pd, of the gas sensing portion having the insulating portion may be 65% or more to 97% or less, and so that the surface additive rate, which is expressed by Si/(Sn+Si) representing the ratio in the number of atoms of Si to Sn, of the gas sensing portion may be 75% or more to 97% or less.
    • 本发明提供即使在高温高湿环境下使用也具有优异的耐湿性的气体传感器。 根据本发明,气体传感器包括:硅衬底; 主要由SnO 2 N 2组成并形成在基板上的金属氧化物半导体部分; 以及由Pd构成并分散在金属氧化物半导体部分的表面上的催化部分,其中金属氧化物半导体部分和催化部分构成气体感测部分。 此外,主要由SiO 2 2组成的绝缘部分分散地形成在气体感测部分的表面上。 此外,催化剂部分和绝缘部分形成在金属氧化物半导体部分的表面上,使得由Si /(Pd + Si)表示的表示添加剂率表示Si原子数与Si 具有绝缘部分的气体感测部分的Pd可以为65%以上至97%以下,并且表示以表示原子数比的Si /(Sn + Si)表示的表面添加率 Si至Sn的气体检测部分可以为75%以上至97%以下。
    • 7. 发明申请
    • GAS SENSOR
    • 气体传感器
    • US20100147685A1
    • 2010-06-17
    • US12527824
    • 2008-12-12
    • Koichi IkawaMasahito KidaShinichiro KitoYoshinori TsujimuraTakio Kojima
    • Koichi IkawaMasahito KidaShinichiro KitoYoshinori TsujimuraTakio Kojima
    • G01N27/26
    • G01N27/128
    • Between a gas sensing layer (4) and a base member (15) composed of a silicon substrate (2) and an insulating coat layer (3), there is formed an adhesion layer 7, to improve the adhesion therebetween, and to prevent separation. The gas sensing layer (4) and sensing electrodes (6) are electrically connected by abutment of a confronting surface (61) of sensing electrodes (6) confronting the gas sensing layer (4) and sides surfaces of the sensing electrodes on both sides, on the gas sensing layer (4), and accordingly the gas sensor properly senses an electric characteristic of the gas sensing layer (4) varied in accordance with a concentration variation of a specified gas. Furthermore, the sensing electrodes (6) are in contact with the gas sensing layer (4), but the sensing electrodes are not in contact with the adhesion layer (7). Therefore, the adhesion layer (7) need not be a complete insulating layer, and it is possible to use, as the adhesion layer, an incomplete insulating film or a conductive film, so that options of the adhesion layer (7) are increased.
    • 在气体感测层(4)和由硅衬底(2)和绝缘涂层(3)组成的基底构件(15)之间形成粘合层7,以改善它们之间的粘附性并防止分离 。 气体感测层(4)和感测电极(6)通过面对气体感测层(4)的感测电极(6)的相对表面(61)和两侧的感测电极的侧表面的邻接电连接, 在气体感测层(4)上,因此气体传感器适当地感测根据特定气体的浓度变化而变化的气体感测层(4)的电特性。 此外,感测电极(6)与气体感测层(4)接触,但感测电极不与粘附层(7)接触。 因此,粘合层(7)不需要是完整的绝缘层,并且可以使用不完全绝缘膜或导电膜作为粘合层,使得粘附层(7)的选项增加。
    • 8. 发明授权
    • Gas sensor
    • 气体传感器
    • US08393196B2
    • 2013-03-12
    • US12527824
    • 2008-12-12
    • Koichi IkawaMasahito KidaShinichiro KitoYoshinori TsujimuraTakio Kojima
    • Koichi IkawaMasahito KidaShinichiro KitoYoshinori TsujimuraTakio Kojima
    • G01N7/00
    • G01N27/128
    • Between a gas sensing layer (4) and a base member (15) composed of a silicon substrate (2) and an insulating coat layer (3), there is formed an adhesion layer 7, to improve the adhesion therebetween, and to prevent separation. The gas sensing layer (4) and sensing electrodes (6) are electrically connected by abutment of a confronting surface (61) of sensing electrodes (6) confronting the gas sensing layer (4) and sides surfaces of the sensing electrodes on both sides, on the gas sensing layer (4), and accordingly the gas sensor properly senses an electric characteristic of the gas sensing layer (4) varied in accordance with a concentration variation of a specified gas. Furthermore, the sensing electrodes (6) are in contact with the gas sensing layer (4), but the sensing electrodes are not in contact with the adhesion layer (7). Therefore, the adhesion layer (7) need not be a complete insulating layer, and it is possible to use, as the adhesion layer, an incomplete insulating film or a conductive film, so that options of the adhesion layer (7) are increased.
    • 在气体感测层(4)和由硅衬底(2)和绝缘涂层(3)组成的基底构件(15)之间形成粘合层7,以改善它们之间的粘附性并防止分离 。 气体感测层(4)和感测电极(6)通过面对气体感测层(4)的感测电极(6)的相对表面(61)和两侧的感测电极的侧表面的邻接电连接, 在气体感测层(4)上,因此气体传感器适当地感测根据特定气体的浓度变化而变化的气体感测层(4)的电特性。 此外,感测电极(6)与气体感测层(4)接触,但感测电极不与粘附层(7)接触。 因此,粘合层(7)不需要是完整的绝缘层,并且可以使用不完全绝缘膜或导电膜作为粘合层,使得粘附层(7)的选项增加。