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    • 3. 发明授权
    • Apparatus for forming a thin film
    • 用于形成薄膜的装置
    • US4867859A
    • 1989-09-19
    • US81450
    • 1987-08-04
    • Shigeru HaradaTakeshi NoguchiHiroshi Mochizuki
    • Shigeru HaradaTakeshi NoguchiHiroshi Mochizuki
    • H01L21/26C23C14/00C23C14/22C23C14/32H01L21/203
    • C23C14/0036C23C14/32
    • An apparatus for forming a thin film on a substrate has a first reaction chamber in which a thin film is formed by gaseous discharge and a second reaction chamber in which reactive atoms are generated. The first and second reaction chambers commuicate with one another through an orifice in the first reaction chamber. The first reaction chamber houses a device for generating a film on a substrate, and the second reaction chamber houses a device for generating reactive atoms. The orifice is disposed in the vicinity of both a film-forming region in the first reaction chamber and a reactive atom-generating region in the second reaction chamber so that reactive atoms from the second reaction chamber will pass through the orifice and enter the film-forming region in the first reaction chamber, combine with particles in the film-forming region to form a chemical compound, and accumulate on the substrate. In preferred embodiments, the reaction chambers are formed by a single housing having a partition which has an orifice therein and which divides the housing into two reaction chambers.
    • 在基板上形成薄膜的装置具有通过气体放电形成薄膜的第一反应室和产生反应性原子的第二反应室。 第一和第二反应室通过第一反应室中的孔而彼此通过。 第一反应室容纳用于在基板上产生膜的装置,第二反应室容纳用于产生反应性原子的装置。 孔口设置在第一反应室中的成膜区域和第二反应室中的反应性原子产生区域附近,使得来自第二反应室的反应性原子将通过孔口并进入膜 - 在第一反应室中形成区域与成膜区域中的颗粒结合以形成化合物,并积聚在基材上。 在优选实施例中,反应室由具有在其中具有孔口并将壳体分成两个反应室的隔板的单个壳体形成。
    • 5. 发明授权
    • Process for removing metals from vinylphenol-type polymers
    • 从乙烯基苯酚型聚合物中除去金属的方法
    • US5929204A
    • 1999-07-27
    • US16248
    • 1998-01-30
    • Takeshi NoguchiTadashi Matsumoto
    • Takeshi NoguchiTadashi Matsumoto
    • C08F6/02C08F6/06C08F12/24C08F6/08
    • C08F6/02C08F6/06
    • Vinylphenol-type polymers are useful materials and are used in many fields such as photoresist, packaging material for IC, printed circuit board, lense, etc. When the polymers are used in an electronic field such as photoresist and packaging material for IC, it is desired to reduce metal concentration in the polymer in the order of ppb units. A simple and effective process for removing metals from vinylphenol-type polymers is disclosed. The process comprises passing an organic solvent solution of a vinylphenol-type polymer either through (a) a filter containing an ion exchange material and/or a chelate-forming material and generating a zeta (.zeta.) potential by a cationic charge modifying agent or through (b) (i) a filter containing an ion exchange material and/or a chelate-forming material and (ii) a filter generating a zeta (.zeta.) potential by a cationic charge modifying agent.
    • 乙烯基酚型聚合物是有用的材料,可用于许多领域,例如光致抗蚀剂,IC封装材料,印刷电路板,透镜等。当聚合物用于电子领域如光致抗蚀剂和用于IC的包装材料时,它是 希望以ppb单位的量级降低聚合物中的金属浓度。 公开了一种用于从乙烯基苯酚型聚合物中除去金属的简单且有效的方法。 该方法包括使乙烯基酚型聚合物的有机溶剂溶液通过(a)含有离子交换材料和/或螯合形成材料的过滤器,并通过阳离子电荷改性剂产生ζ(ζ)电位,或通过 (b)(i)含有离子交换材料和/或螯合形成材料的过滤器和(ii)通过阳离子电荷改性剂产生ζ(ζ)电位的过滤器。
    • 7. 发明授权
    • Vibration isolating apparatus
    • 隔振装置
    • US5280885A
    • 1994-01-25
    • US821852
    • 1992-01-14
    • Takeshi Noguchi
    • Takeshi Noguchi
    • F16F13/14F16F13/00
    • F16F13/14
    • A vibration isolating apparatus is disclosed which comprises an inner tube and an outer tube disposed in a parallel axis state to each other and an elastic member stretched therebetween, the elastic member being provided with a pair of liquid chambers disposed in the interior thereof at opposite sides through the inner tube. These liquid chambers communicate with each other through a restricted passage. The elastic member is provided with a pair of cavities on opposite outer sides of the inner tube. The cavities absorb relative displacement between the inner tube and the outer tube. When an amount of absorption becomes a predetermined amount, a compressing force is applied to the liquid chambers.
    • 公开了一种隔振装置,其包括彼此平行的轴状状的内管和外管以及在它们之间延伸的弹性构件,弹性构件设置在其内部设置在相对侧的一对液室 通过内管。 这些液体室通过限制通道相互连通。 弹性构件在内管的相对的外侧上设置有一对空腔。 空腔吸收内管和外管之间的相对位移。 当吸收量成为预定量时,对液体室施加压缩力。