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    • 3. 发明申请
    • Method of nitriding metal ring and apparatus therefor
    • 金属环渗氮方法及其设备
    • US20050247375A1
    • 2005-11-10
    • US10528362
    • 2003-09-22
    • Teiji SuzukiMasaomi SaruyamaMasashi TakagakiNaoki Narita
    • Teiji SuzukiMasaomi SaruyamaMasashi TakagakiNaoki Narita
    • C23C8/02C23C8/26F16G5/16B21C37/30C23C8/30
    • C23C8/02C23C8/26C23G5/00F16G5/16
    • A metal ring made of maraging steel is heated in the presence of a halogen compound gas, so as to eliminate an oxide film from the surface of the metal ring and to form a halogenous compound film. Thereafter, the metal ring is heated under a vacuum or reduced pressure atmosphere to eliminate the halogenous compound film, and then it is maintained under an atmosphere comprising ammonia at a processing temperature ranging between 450° C. and 500° C. for a processing time ranging between 30 and 120 minutes, so as to carry out a nitriding processing. The above nitriding processing comprises the steps of: placing the above metal ring into a heating furnace and raising the temperature inside the heating furnace to the above processing temperature; introducing a first mixed gas consisting of 50% to 90% ammonia byvolume, 0.1% to 0.9% oxygen by volume, and a residual volume consisting of nitrogen into the heating furnace, and maintaining the above processing temperature, so as to form a nitrided layer on the surface of the metal ring; and when the one-third to one-half of the processing time has passed, replacing the atmosphere inside the heating furnace by a second mixed gas consisting of 0% to 25% ammonia by volume and a residual volume consisting of nitrogen, and maintaining the above processing temperature until the remaining processing time passes.
    • 由马氏体时效钢制成的金属环在卤素化合物气体的存在下被加热,从而从金属环的表面除去氧化膜并形成卤化合物膜。 此后,在真空或减压气氛下加热金属环以除去卤化合物膜,然后在450℃至500℃的加工温度下将其保持在包含氨的气氛下进行加工时间 范围在30到120分钟之间,以便进行氮化处理。 上述氮化处理包括以下步骤:将上述金属环放入加热炉中并将加热炉内的温度升高至上述处理温度; 将由体积比为50%至90%的氨,0.1体积%至0.9体积%的氧气和由氮气组成的残余体积加入到加热炉中的第一混合气体,并保持上述处理温度,以形成氮化层 在金属环的表面上; 并且当处理时间的三分之一到一半之后,通过由0体积%至25体积%的氨和由氮组成的残留体积的第二混合气体代替加热炉内部的气氛,并且保持 高于处理温度,直到剩余的处理时间过去。
    • 4. 发明申请
    • NITRIDING PROCESS FOR MARAGING STEEL
    • 用于制钢的氮化工艺
    • US20120241050A1
    • 2012-09-27
    • US13514062
    • 2010-12-07
    • Masashi TakagakiHiroaki MaseNaoki Narita
    • Masashi TakagakiHiroaki MaseNaoki Narita
    • C23C8/02
    • C23C8/02C21D1/68C21D1/70C21D1/72C21D6/02C21D9/40C22C38/08C22C38/12C23C8/26C23C8/50C23C8/80
    • A nitriding process for a maraging steel is provided in order to increase the compressive residual stress of the maraging steel. A workpiece is made of maraging steel in which titanium is solid solved, and a partial amount of the titanium is oxidized at the surface of the workpiece so that titanium oxide is positively generated and concentrated at the surface. Then a reducing treatment is sufficiently performed as a pretreatment of a nitriding step, thereby removing oxygen. As a result, surface concentration of the titanium in an activated state is increased. Next, by performing the nitriding treatment, the reduced titanium and the solid solved titanium combine with nitrogen as titanium nitride. The titanium is in the activated state and is thereby easily nitrided. Moreover, the surface concentration of the titanium in the activated state is high, whereby a large amount of nitrogen infiltrates into the workpiece.
    • 提供了马氏体时效钢的渗氮工艺,以增加马氏体时效钢的压缩残余应力。 工件由马氏体时效钢制成,其中固溶钛,部分钛在工件的表面被氧化,从而在表面上积极地产生氧化钛并浓缩。 然后,作为氮化步骤的预处理充分进行还原处理,从而除去氧气。 结果,活化状态的钛的表面浓度增加。 接下来,通过进行氮化处理,还原的钛和固溶的钛与氮结合,作为氮化钛。 钛处于活化状态,因此易于氮化。 此外,活性状态的钛的表面浓度高,因此大量的氮渗透到工件中。
    • 5. 发明授权
    • Aligning apparatus for substrate
    • 基板对准装置
    • US5177528A
    • 1993-01-05
    • US887789
    • 1992-05-26
    • Isao KoromegawaTerumi OgawaMasashi TakagakiHironori Toyoshima
    • Isao KoromegawaTerumi OgawaMasashi TakagakiHironori Toyoshima
    • H05K13/04B23P21/00H01L21/00H05K13/08
    • H01L21/67259H05K13/08
    • The present invention provides an aligning apparatus which is capable of aligning auxiliary connecting plates such as a testing fixture plate so as to fit to both sides of a substrate. A camera 13a monitors aligning marks provided on a substrate 6 and a first auxiliary connecting plate (i.e. a lower surface testing fixture plate) 8 to carry out an aligning operation by moving the substrate 6 by means of an XY.THETA. table 5. A first plate-fitting member (a vacuum suction member) 32 fixes the substrate 6 and the first auxiliary connecting plate 8. On the other hand, a camera 13b monitors aligning marks provided on the substrate 6 and a second auxiliary connecting plate (i.e. an upper surface testing fixture plate) 11 to carry out an aligning operation by moving the second auxiliary connecting plate 11 by means of the XY.THETA. table 5. A second plate-fitting member (a vacuum suction member) 33 fixes the substrate 6 and the second auxiliary connecting plate 11. Thus, the auxiliary connecting plates can be accurately aligned on both sides of the substrate through one table.
    • 本发明提供一种对准装置,其能够将诸如测试夹具板的辅助连接板对准以适合于基板的两侧。 相机13a监视设置在基板6上的对准标记和第一辅助连接板(即,下表面测试固定板)8,以通过借助XY THETA表5移动基板6来执行对准操作。第一板 固定构件(真空抽吸构件)32固定基板6和第一辅助连接板8.另一方面,相机13b监视设置在基板6上的对准标记和第二辅助连接板(即,上表面测试 固定板)11通过XY THETA台5移动第二辅助连接板11进行对准操作。第二板件(真空抽吸构件)33将基板6和第二辅助连接板 因此,可以通过一个工作台将辅助连接板精确对准在基板的两侧。