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    • 2. 发明授权
    • Interlock apparatus for a transfer machine
    • 用于转印机的联锁装置
    • US06336054B1
    • 2002-01-01
    • US09291045
    • 1999-04-14
    • Yoshiharu OtaMasaaki YoshidaShinya TanoueTatsuya Iwasaki
    • Yoshiharu OtaMasaaki YoshidaShinya TanoueTatsuya Iwasaki
    • G06F1900
    • H01L21/67748H01L21/67242H01L21/67259
    • A processing system for processing a substrate. The processing system includes a plurality of processing machines, a machine movable along a transfer path for transferring the substrate to the machines, a drive unit for driving the machine, and a control unit. The control unit includes a memory for storing a teaching threshold in a teaching mode and a practical operation threshold in a practical operation mode that is higher than the teaching threshold when a moving parameter of the drive unit exceeds a given value. The control unit also includes a controller monitoring a parameter representing a moving state of the drive unit to stop the drive unit when the parameter exceeds the practical operation threshold in the practical operation mode or when the parameter exceeds the teaching threshold in the teaching mode.
    • 一种用于处理衬底的处理系统。 处理系统包括多个处理机器,沿着用于将基板传送到机器的传送路径移动的机器,用于驱动机器的驱动单元和控制单元。 控制单元包括存储器,用于在实际操作模式中存储教学阈值和实际操作阈值,该实际操作模式当驱动单元的移动参数超过给定值时高于教学阈值。 控制单元还包括控制器,当在实践操作模式中参数超过实际操作阈值时或者当教学模式中参数超过教学阈值时,监控表示驱动单元的移动状态的参数以停止驱动单元。
    • 3. 发明授权
    • Conveying unit and substrate processing unit
    • 输送单元和基板处理单元
    • US06203617B1
    • 2001-03-20
    • US09272315
    • 1999-03-19
    • Shinya TanoueShinichiro ArakiTatsuya IwasakiEiichiro Kamada
    • Shinya TanoueShinichiro ArakiTatsuya IwasakiEiichiro Kamada
    • B05C1100
    • H01L21/67276H01L21/67271H01L21/68707Y10S414/137
    • The present invention is a conveying unit having a controller for detecting information corresponding to the thickness of each of a plurality of raw substrates, assigning desired identifiers to the raw substrates, storing the identifiers, and causing a conveyor to convey each of the raw substrates or controlling processing conditions for a plurality of processing chambers with the identifiers corresponding to the thickness of each of the raw substrates. Thus, even if one cassette accommodates a plurality of raw substrates, the conveyor can smoothly load the same type of raw substrates to the accommodating cassette and unload them therefrom in a simple structure. The controller sets desired processing conditions for each of the processing portions corresponding to the identifiers.
    • 本发明是一种输送单元,其具有用于检测与多个原始基板中的每一个的厚度对应的信息的控制器,将原始基板分配所需的标识符,存储标识符,并使输送机输送每个原始基板或 控制具有对应于每个原始基板的厚度的标识符的多个处理室的处理条件。 因此,即使一个盒子容纳多个原始基板,输送机也可以将相同类型的原始基板平滑地装载到收纳盒中,并以简单的结构将其卸载。 控制器为与标识符对应的每个处理部分设置所需的处理条件。
    • 4. 发明授权
    • Thin-film transistor and thin-film diode having amorphous-oxide semiconductor layer
    • 具有非晶氧化物半导体层的薄膜晶体管和薄膜二极管
    • US08716711B2
    • 2014-05-06
    • US13012125
    • 2011-01-24
    • Tatsuya Iwasaki
    • Tatsuya Iwasaki
    • H01L29/04
    • H01L29/7869
    • A thin-film transistor including a channel layer being formed of an oxide semiconductor transparent to visible light and having a refractive index of nx, a gate-insulating layer disposed on one face of the channel layer, and a transparent layer disposed on the other face of the channel layer and having a refractive index of nt, where there is a relationship of nx>nt. A thin-film transistor including a substrate having a refractive index of no, a transparent layer disposed on the substrate and having a refractive index of nt, and a channel layer disposed on the transparent layer and having a refractive index of nx, where there is a relationship of nx>nt>no.
    • 一种薄膜晶体管,包括由对可见光透明且具有折射率nx的氧化物半导体形成的沟道层,设置在沟道层的一个面上的栅极绝缘层和设置在另一个面上的透明层 的沟道层,折射率为nt,其中nx> nt的关系。 一种薄膜晶体管,包括折射率为no的衬底,设置在衬底上的折射率为nt的透明层,以及设置在透明层上并且折射率为nx的沟道层,其中存在 nx> nt> no的关系。
    • 10. 发明授权
    • Current detection circuit
    • 电流检测电路
    • US07807956B2
    • 2010-10-05
    • US12254470
    • 2008-10-20
    • Tatsuya IwasakiKoki TamakawaIsao Yamamoto
    • Tatsuya IwasakiKoki TamakawaIsao Yamamoto
    • H01J40/14
    • G01J1/44G01R19/0092
    • A current detection circuit detects photoelectric current that flows through a phototransistor, and outputs a current, which is proportional to the photoelectric current, via an output terminal. An input-side transistor is a PNP bipolar transistor, and is provided on a current path for the phototransistor. Output-side transistors are PNP bipolar transistors. The base terminals thereof are connected to that of the input-side transistor so as to form a common base terminal, and the emitter terminals thereof are connected to that of the input-side transistor so as to form a common emitter terminal, thereby forming a current mirror circuit. Each of first switches is provided between the collector of the corresponding output-side transistor and an output terminal. Each of second switches is provided between the collector of the corresponding output-side transistor and the ground terminal. A control unit controls the ON/OFF operations of the first switches and the second switches.
    • 电流检测电路检测流过光电晶体管的光电流,并通过输出端输出与光电流成比例的电流。 输入侧晶体管是PNP双极晶体管,并且设置在用于光电晶体管的电流路径上。 输出侧晶体管是PNP双极晶体管。 其基极连接到输入侧晶体管的基极以形成公共基极,并且其发射极端子连接到输入侧晶体管的发射极端子,以形成公共发射极端子,从而形成 电流镜电路。 每个第一开关设置在相应的输出侧晶体管的集电极和输出端之间。 每个第二开关设置在相应的输出侧晶体管的集电极和接地端子之间。 控制单元控制第一开关和第二开关的ON / OFF操作。