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    • 2. 发明授权
    • Maintenance information management server maintenance information management system using the same, as well as method of managing maintenance information
    • 维护信息管理服务器维护信息管理系统采用相同的方式,以及管理维护信息的方法
    • US06873999B2
    • 2005-03-29
    • US10226201
    • 2002-08-23
    • Kouichi Hirayama
    • Kouichi Hirayama
    • G05B19/418G05B23/02G06F7/00G06F17/30G06Q50/00G06Q50/04G06Q50/10
    • G05B19/4184G05B23/0283G05B2219/33284G05B2219/33313G05B2219/33318Y02P90/14Y02P90/18Y10S707/99945Y10S707/99948
    • A maintenance information management server stores: apparatus information related to apparatus name and apparatus model of semiconductor manufacturing apparatuses for each apparatus code; facility information about semiconductor manufacturing apparatuses installed in each factory/manufacturing line associated with the apparatus code; defect countermeasure information showing a content of a defect associated with the apparatus code; and defect countermeasure information. When defect information related to a semiconductor manufacturing apparatus installed in a factory/manufacturing line and countermeasure information to cope with the defect, as defect countermeasure information, are given, the maintenance information management server registers the defect countermeasure information based on the apparatus code and distributes the defect countermeasure information as maintenance information to all other factories/manufacturing lines having installed therein semiconductor manufacturing apparatuses with an apparatus code identical with that of the semiconductor manufacturing apparatus having the defect.
    • 维护信息管理服务器存储与各设备代码的半导体制造装置的设备名称和装置型号相关的装置信息; 关于安装在与设备代码相关联的每个工厂/生产线中的半导体制造装置的设备信息; 表示与设备代码相关联的缺陷的内容的缺陷对策信息; 和缺陷对策信息。 当提供与安装在工厂/生产线上的半导体制造装置相关的缺陷信息和对策缺陷信息作为缺陷对策信息时,维护信息管理服务器根据设备代码登记缺陷对策信息并分发 将缺陷对策信息作为维护信息提供给其中安装有具有与具有缺陷的半导体制造设备的设备代码相同的设备代码的半导体制造设备的所有其他工厂/生产线。