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    • 9. 发明授权
    • Apparatus for manufacturing semiconductor
    • 半导体制造装置
    • US08246747B2
    • 2012-08-21
    • US13347896
    • 2012-01-11
    • Sang Joon ParkYoung Jun Kim
    • Sang Joon ParkYoung Jun Kim
    • C23C16/00C23C16/455C23C16/458C23C16/46
    • H01L21/67757H01L21/67303H01L21/67309H01L21/68771
    • Disclosed is an apparatus for manufacturing semiconductors, to be used for various processes in semiconductor manufacture processing, such as the forming of layers on wafers. A tube has a processing space therein and a discharge hole at a side thereof. A boat can be loaded and unloaded through a lower opening of the tube. Susceptors are vertically separated from one another and supported within the boat, have a central hole defined in the respective centers of rotation thereof, and have a plurality of wafers stacked around a central perimeter on the respective top surfaces thereof. A supply tube is installed at the top of the boat and passes through each central hole of the susceptors, and defines discharge holes for discharging processing gas supplied from the outside onto each top surface of the susceptors.
    • 公开了一种半导体制造装置,用于半导体制造加工中的各种工艺,例如在晶片上形成层。 管内具有处理空间,其一侧具有排出孔。 船可以通过管的下部开口装载和卸载。 感受器彼此垂直分离并支撑在船内,具有限定在其各自旋转中心中的中心孔,并且在其各自的顶表面上具有围绕中心周边堆叠的多个晶片。 供应管安装在船的顶部并穿过基座的每个中心孔,并且限定用于将从外部供应的处理气体排放到基座的每个顶表面上的排放孔。