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    • 2. 发明授权
    • Method for fabricating triode-structure carbon nanotube field emitter array
    • 制造三极管结构碳纳米管场发射极阵列的方法
    • US06339281B2
    • 2002-01-15
    • US09754148
    • 2001-01-05
    • Hang-woo LeeNae-sung LeeYong-soo ChoiJong-min Kim
    • Hang-woo LeeNae-sung LeeYong-soo ChoiJong-min Kim
    • H01J1304
    • B82Y10/00H01J1/3042H01J9/025H01J2201/30469Y10S977/842
    • A method for fabricating a triode field emitter array using carbon nanotubes having excellent electron emission characteristics is provided. In the method for fabricating a triode-structure carbon nanotube field emitter array, a catalyst layer is formed on a cathode electrode without forming a base layer, and carbon nanotubes are grown on the catalyst layer using a Spind't process. In this method, a non-reactive layer is formed on a catalyst layer outside the micro-cavity such that the carbon nanotubes can be grown only on the catalyst within the micro-cavity. Accordingly, even through a separation layer is etched and removed, since carbon nanotubes do not exist outside the micro-cavity, it does not happen that carbon nanotubes are drifted into the micro-cavities. Therefore, the fabrication yield is increased, and the fabrication cost is decreased.
    • 提供了使用具有优异的电子发射特性的碳纳米管制造三极管场发射器阵列的方法。 在制造三极管结构碳纳米管场发射极阵列的方法中,在阴极上形成催化剂层而不形成基底层,并且使用Spind't工艺在催化剂层上生长碳纳米管。 在该方法中,在微腔外部的催化剂层上形成非反应性层,使得碳纳米管只能在微腔内的催化剂上生长。 因此,即使通过分离层被蚀刻和去除,由于碳纳米管不存在于微腔外部,碳纳米管不会漂移到微腔中。 因此,制造成品率增加,制造成本降低。
    • 4. 发明授权
    • Method of manufacturing triode carbon nanotube field emitter array
    • 制造三极管碳纳米管场发射极阵列的方法
    • US06699642B2
    • 2004-03-02
    • US10035438
    • 2002-01-04
    • Deuk-seok ChungJong-min KimShang-hyeun ParkNae-sung LeeHang-woo Lee
    • Deuk-seok ChungJong-min KimShang-hyeun ParkNae-sung LeeHang-woo Lee
    • G03F726
    • B82Y10/00H01J9/022H01J2201/30469
    • A method of manufacturing a field emitter array using carbon nanotubes, low voltage field emission material, is provided. The method includes the steps of (a) forming a conductive thin film layer on the top of a transparent substrate having a transparent electrode and exposing a predetermined portion of the transparent electrode; (b) forming an opaque thin film layer on the exposed predetermined portion of the transparent electrode; (c) depositing an insulation material on the entire top surface of the transparent substrate and removing the insulation material from the top surfaces of the conductive thin film layer and the opaque thin film layer, thereby forming an insulation layer; (d) forming a gate layer on the top of the insulation layer; and (e) removing the opaque thin film layer and forming carbon nanotube tips on the top of the exposed transparent electrode. Accordingly, the triode carbon nanotube field emitter array can be easily manufactured using a small number of mask layers and without using a special aligner.
    • 提供了使用碳纳米管制造场致发射体阵列的方法,即低电压场发射材料。 该方法包括以下步骤:(a)在具有透明电极的透明基板的顶部上形成导电薄膜层,并暴露出透明电极的预定部分; (b)在所述透明电极的暴露的预定部分上形成不透明薄膜层; (c)在透明基板的整个顶表面上沉积绝缘材料,并从导电薄膜层和不透明薄膜层的顶表面去除绝缘材料,由此形成绝缘层; (d)在绝缘层的顶部上形成栅极层; 和(e)去除不透明薄膜层并在暴露的透明电极的顶部上形成碳纳米管尖端。 因此,可以使用少量掩模层容易地制造三极管碳纳米管场发射极阵列,并且不使用特殊的对准器。
    • 5. 发明授权
    • Method of vertically aligning carbon nanotubes on substrates at low pressure using thermal chemical vapor deposition with DC bias
    • 使用具有直流偏压的热化学气相沉积在低压下在基板上垂直排列碳纳米管的方法
    • US06673392B2
    • 2004-01-06
    • US09808011
    • 2001-03-15
    • Young-hee LeeNae-sung LeeJong-min Kim
    • Young-hee LeeNae-sung LeeJong-min Kim
    • C23C1626
    • B82Y30/00B82Y10/00B82Y40/00C01B32/162C01B2202/08C23C16/26C23C16/44C30B25/00C30B25/02C30B29/605H01J9/025H01J2201/30469Y10S427/102Y10S977/742Y10S977/842Y10S977/843Y10S977/89Y10S977/891
    • A method of vertically aligning pure carbon nanotubes on a large glass or silicon substrate at a low temperature using a low pressure DC thermal chemical vapor deposition method is provided. In this method, catalytic decomposition with respect to hydro-carbon gases is performed in two steps. Basically, an existing thermal chemical vapor deposition method using hydro-carbon gases such as acetylene, ethylene, methane or propane is used. To be more specific, the hydro-carbon gases are primarily decomposed at a low temperature of 400-500° C. by passing the hydro-carbon gases through a mesh-structure catalyst which is made of Ni, Fe, Co, Y, Pd, Pt, Au or an alloy of two or more of these materials. Secondly, the catalytically- and thermally-decomposed hydro-carbon gases pass through the space between a carbon nanotube growing substrate and an electrode substrate made of Ni, Fe, Co, Y, Pd, Pt, Au or an alloy of two or more of these materials or an electrode substrate on which Ni, Fe, Co, Y, Pd, Pt, Au or an alloy of two or more of these materials is thinly deposited by sputtering or electron-beam evaporation, the space to which DC voltage has been applied.
    • 提供了一种使用低压DC热化学气相沉积方法在低温下在大玻璃或硅衬底上将纯碳纳米管垂直排列的方法。 在这种方法中,相对于氢气气体的催化分解分两步进行。 基本上,使用使用诸如乙炔,乙烯,甲烷或丙烷之类的氢气气体的现有热化学气相沉积方法。 更具体地说,通过将碳氢气体通过由Ni,Fe,Co,Y,Pd制成的网状结构催化剂,氢气在400-500℃的低温下主要分解 ,Pt,Au或这些材料中的两种或更多种的合金。 其次,催化裂解和热分解的氢碳气体通过碳纳米管生长衬底和由Ni,Fe,Co,Y,Pd,Pt,Au或两种或更多种的合金制成的电极衬底之间的空间 这些材料或这些材料中的Ni,Fe,Co,Y,Pd,Pt,Au或这些材料中的两种或更多种的合金通过溅射或电子束蒸发薄片沉积在其上的电极基板,直流电压的空间 应用。