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    • 3. 发明授权
    • Light-emitting device and method for manufacturing the same
    • 发光装置及其制造方法
    • US07598129B2
    • 2009-10-06
    • US10576692
    • 2004-11-05
    • Yohei KannoGen Fujii
    • Yohei KannoGen Fujii
    • H01L21/00H01L21/84
    • H01L27/12H01L27/1285H01L27/1292H01L29/42384H01L29/66765H01L29/78696
    • Especially in case that a light-emitting element composed of layers containing organic compounds or inorganic compounds is driven by a thin film transistor (TFT), a structure having at least two transistors installed with a drive TFT is required to prevent irregularities of ON current of a switching TFT provided to a pixel region. Hence, the simplification of a semiconductor element structure and a process for manufacturing a semiconductor element becomes an urgent task as a large substrate is frequently used. According to the present invention, after that a source region and a drain region are formed, an insulating film serving as a channel protective film is formed to cover a portion for serving as a channel region, then, an island-like semiconductor film is formed. Accordingly, a semiconductor element can be manufactured by using only a metallic mask without forming a resist mask, and so the process can be simplified.
    • 特别是在由薄膜晶体管(TFT)驱动由含有有机化合物或无机化合物的层构成的发光元件的情况下,需要具有安装有驱动TFT的至少两个晶体管的结构来防止导通电流的不均匀性 提供给像素区域的开关TFT。 因此,通常使用大的基板,半导体元件结构的简化和半导体元件的制造工艺成为迫切的任务。 根据本发明,在形成源极区域和漏极区域之后,形成作为沟道保护膜的绝缘膜覆盖用作沟道区域的部分,然后形成岛状半导体膜 。 因此,可以仅使用金属掩模而不形成抗蚀剂掩模来制造半导体元件,因此可以简化该工艺。
    • 4. 发明申请
    • Light-emitting device and method for manufacturing the same
    • 发光元件及其制造方法
    • US20070090358A1
    • 2007-04-26
    • US10576692
    • 2004-11-05
    • Yohei KannoGen Fujii
    • Yohei KannoGen Fujii
    • H01L29/04
    • H01L27/12H01L27/1285H01L27/1292H01L29/42384H01L29/66765H01L29/78696
    • Especially in case that a light-emitting element composed of layers containing organic compounds or inorganic compounds is driven by a thin film transistor (TFT), a structure having at least two transistors installed with a drive TFT is required to prevent irregularities of ON current of a switching TFT provided to a pixel region. Hence, the simplification of a semiconductor element structure and a process for manufacturing a semiconductor element becomes an urgent task as a large substrate is frequently used. According to the present invention, after that a source region and a drain region are formed, an insulating film serving as a channel protective film is formed to cover a portion for serving as a channel region, then, an island-like semiconductor film is formed. Accordingly, a semiconductor element can be manufactured by using only a metallic mask without forming a resist mask, and so the process can be simplified.
    • 特别是在由薄膜晶体管(TFT)驱动由含有有机化合物或无机化合物的层构成的发光元件的情况下,需要具有安装有驱动TFT的至少两个晶体管的结构来防止导通电流的不均匀性 提供给像素区域的开关TFT。 因此,通常使用大的基板,半导体元件结构的简化和半导体元件的制造工艺成为迫切的任务。 根据本发明,在形成源极区域和漏极区域之后,形成作为沟道保护膜的绝缘膜覆盖用作沟道区域的部分,然后形成岛状半导体膜 。 因此,可以仅使用金属掩模而不形成抗蚀剂掩模来制造半导体元件,因此可以简化该工艺。
    • 8. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07994617B2
    • 2011-08-09
    • US10587237
    • 2005-02-01
    • Yasuyuki AraiYuko TachimuraYohei KannoMai Akiba
    • Yasuyuki AraiYuko TachimuraYohei KannoMai Akiba
    • H01L23/02
    • H01L27/1266G06K19/025G06K19/07728G06K19/07749H01L27/1214H01L27/13H01L2221/6835H01L2224/73204
    • An object of the present invention is providing a semiconductor device that is capable of improving the reliability of a semiconductor element and enhancing the mechanical strength without suppressing the scale of a circuit. The semiconductor device includes an integrated circuit sandwiched between first and second sealing films, an antenna electrically connected to the integrated circuit, the first sealing film sandwiched between a substrate and the integrated circuit, which includes a plurality of first insulating films and at least one second insulating film sandwiched therebetween, the second sealing film including a plurality of third insulating films and at least one fourth insulating film sandwiched therebetween. The second insulating film has lower stress than the first insulting film and the fourth insulating film has lower stress than the third insulating film. The first and third insulating films are inorganic insulating films.
    • 本发明的目的在于提供一种能够提高半导体元件的可靠性并提高机械强度而不抑制电路规模的半导体装置。 半导体器件包括夹在第一和第二密封膜之间的集成电路,与集成电路电连接的天线,夹在基板和集成电路之间的第一密封膜,其包括多个第一绝缘膜和至少一个第二绝缘膜 夹在其间的绝缘膜,所述第二密封膜包括多个第三绝缘膜和夹在其间的至少一个第四绝缘膜。 第二绝缘膜具有比第一绝缘膜低的应力,并且第四绝缘膜具有比第三绝缘膜更低的应力。 第一和第三绝缘膜是无机绝缘膜。
    • 10. 发明授权
    • Liquid droplet ejection system and control program of ejection condition of compositions
    • 液滴喷射系统和组合物喷射条件控制程序
    • US08322847B2
    • 2012-12-04
    • US13049078
    • 2011-03-16
    • Shunpei YamazakiJun KoyamaYasuyuki AraiShinji MaekawaYohei Kanno
    • Shunpei YamazakiJun KoyamaYasuyuki AraiShinji MaekawaYohei Kanno
    • B41J2/01B05B7/06H01L21/36
    • H01L51/0004H01L51/56H05K1/0269H05K3/0008H05K3/1241
    • When using a liquid droplet ejection method, a conventional photomask is not required, however, it is required instead that a moving path of a nozzle or a substrate is controlled with accuracy at least in ejecting liquid droplets. According to the characteristics of compositions to be ejected or their pattern, such ejection conditions are desirably set as the moving rate of a nozzle or a substrate, ejection quantity, ejection distance and ejection rate of compositions, atmosphere of the space that the compositions are ejected, the temperature and moisture of the space, and heating temperature of the substrate. A liquid droplet ejection system in accordance with the invention comprises an input means for inputting data of a thin film pattern, a set means for setting a nozzle for a ejecting a composition containing a material for forming the thin film or setting a moving path of the substrate to which the composition is ejected, an image pick-up means for detecting an alignment marker formed on a substrate and a control means for controlling the moving path of the nozzle or the substrate.
    • 当使用液滴喷射方法时,不需要常规的光掩模,然而,需要至少在喷射液滴时精确地控制喷嘴或基板的移动路径。 根据要喷射的组合物或其图案的特征,这种喷射条件期望设置为喷嘴或基底的移动速率,喷射量,喷射距离和组合物的喷射速率,组合物喷出的空间的气氛 ,空间的温度和湿度,以及基板的加热温度。 根据本发明的液滴喷射系统包括用于输入薄膜图案的数据的输入装置,用于设置用于喷射包含用于形成薄膜的材料的组合物的喷嘴的设定装置或设置该薄膜图案的移动路径 用于检测形成在基板上的取向标记的图像拾取装置和用于控制喷嘴或基板的移动路径的控制装置。