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    • 7. 发明授权
    • Method for growing silicon carbide single crystal
    • 生长碳化硅单晶的方法
    • US08702864B2
    • 2014-04-22
    • US12812613
    • 2009-01-14
    • Yukio TerashimaYasuyuki Fujiwara
    • Yukio TerashimaYasuyuki Fujiwara
    • C30B9/00
    • C30B29/36C30B17/00
    • In a method for growing a silicon carbide single crystal on a silicon carbide single crystal substrate by contacting the substrate with a solution containing C prepared by dissolving C into the melt that contains Cr and X, which consists of at least one element of Ce and Nd, such that a proportion of Cr in a whole composition of the melt is in a range of 30 to 70 at. %, and a proportion of X in the whole composition of the melt is in a range of 0.5 at. % to 20 at. % in the case where X is Ce, or in a range of 1 at. % to 25 at. % in the case where X is Nd, and the silicon carbide single crystal is grown from the solution.
    • 在碳化硅单晶衬底上生长碳化硅单晶的方法中,通过使衬底与含有C的溶液接触,所述溶液通过将C溶解到含有Cr和X的熔体中,所述熔体包含​​至少一种Ce和Nd元素 使得熔体的整个组成中的Cr的比例在30〜70at 3的范围内。 %,并且熔体的整个组成中的X的比例在0.5at。的范围内。 %至20 at。 在X为Ce的情况下,或在1at的范围内。 %至25点。 在X为Nd的情况下,从溶液中生长碳化硅单晶。