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    • 10. 发明申请
    • Manufacturing apparatus for oriented film, liquid crystal device and electronic device
    • 取向膜,液晶装置和电子装置的制造装置
    • US20070013845A1
    • 2007-01-18
    • US11484490
    • 2006-07-11
    • Yasushi NagataYuichi Shimizu
    • Yasushi NagataYuichi Shimizu
    • G02F1/1337
    • G02F1/133734C23C14/044C23C14/545G02F2001/1316
    • A manufacturing apparatus for manufacturing an oriented film of a liquid crystal device holding a liquid crystal between a pair of substrates facing each other, includes: a film formation chamber; an evaporation section evaporating an oriented film material on the substrate by a physical vapor deposition, and forming the oriented film in the film formation chamber; a shielding plate formed between the evaporation section and the substrate, having an elongated opening for selectively evaporating the oriented film material, and covering an area of the substrate on which the oriented film is not formed; and a cleaning section providing a cleaning medium for removing the oriented film material adhered on the shielding plate, toward the opening of the shielding plate, and on the side of the shielding plate that faces the evaporation section.
    • 一种用于制造在彼此面对的一对基板之间保持液晶的液晶装置的取向膜的制造装置包括:成膜室; 蒸发部通过物理气相沉积在基板上蒸发定向膜材料,并在成膜室中形成取向膜; 形成在所述蒸发部和所述基板之间的遮蔽板,具有用于选择性地蒸发所述取向膜材料的细长开口,并覆盖未形成所述取向膜的所述基板的区域; 以及清洁部,其提供用于去除附着在所述屏蔽板上的取向膜材料,朝向所述屏蔽板的开口以及所述屏蔽板的面对所述蒸发部的一侧的清洁介质。