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1. 发明授权

US09069261B2 Surface position detection apparatus, exposure apparatus, and exposure method 有权
标题翻译：表面位置检测装置，曝光装置和曝光方法
公开(公告)号：US09069261B2
公开(公告)日：2015-06-30
申请号：US13405524
申请日：2012-02-27
申请人： Yasuhiro Hidaka , Tadashi Nagayama
发明人： Yasuhiro Hidaka , Tadashi Nagayama
IPC分类号： G03B27/42 , G03B27/72 , G03F9/00
CPC分类号： G03F7/70191 , G03F9/7026 , G03F9/7034 , G03F9/7065 , G03F9/7088 , Y10T29/49124
摘要： A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member (7) having first reflective surfaces (7b, 7c), and a light receiving system has a light receiving prism member (8) having second reflective surfaces (8b, 8c) arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces.
摘要翻译：一种表面位置检测装置，其能够高度精确地检测待检测表面的表面位置，而不会受到通过反射表面的光束中产生的偏振分量的相对位置偏移的影响。在该装置中，投影系统具有具有第一反射面（7b，7c）的突出侧棱镜部件（7），并且受光系统具有配置有第二反射面（8b，8c）的受光棱镜部件（8）与突出侧棱镜构件对应。表面位置检测装置还具有用于补偿由于通过第一和第二反射面的光束的偏振分量引起的相对位移的构件。

2. 发明授权

US08384875B2 Exposure apparatus, exposure method, and method for producing device 有权
标题翻译：曝光装置，曝光方法和制造装置的方法
公开(公告)号：US08384875B2
公开(公告)日：2013-02-26
申请号：US12461508
申请日：2009-08-13
申请人： Yasuhiro Hidaka , Tadashi Nagayama , Tohru Kiuchi
发明人： Yasuhiro Hidaka , Tadashi Nagayama , Tohru Kiuchi
IPC分类号： G03B27/44 , G03B27/42 , G03B27/70 , G03B27/32 , G03B27/54 , G03B27/72
CPC分类号： G03F7/70275 , G03F7/70208
摘要： An exposure apparatus includes a mask-moving section movable in a first direction while holding a mask formed with a pattern; an illumination system which forms first and second illumination areas separated each other by a spacing distance in the first direction; a substrate-moving section movable in a second direction while holding a photosensitive substrate; a projection optical system which forms first and second projected images of the patterns of the first and second illumination areas; and a restricting section which restricts the first and second projected images to be within first and second projection areas respectively. A spacing distance between a first conjugate area with the first projection area and a second conjugate area with the second projection area is set to be such a spacing distance that scanning exposures are successively performed for first and second transfer areas provided adjacently in the second direction.
摘要翻译：曝光装置包括：在保持形成有图案的掩模的同时沿第一方向移动的掩模移动部; 照明系统，其形成第一和第二照明区域，所述第一和第二照明区域在所述第一方向上彼此隔开间隔距离; 基板移动部，其能够在保持感光基板的同时沿第二方向移动; 投影光学系统，其形成第一和第二照明区域的图案的第一和第二投影图像; 以及限制部分，其将第一和第二投影图像分别限制在第一和第二投影区域内。与第一投影区域的第一共轭区域和与第二投影区域的第二共轭区域之间的间隔距离被设定为对于在第二方向上相邻设置的第一和第二传送区域连续进行扫描曝光的间隔距离。

3. 发明申请

US20100079743A1 Exposure apparatus, exposure method, and method for producing device 有权
标题翻译：曝光装置，曝光方法和制造装置的方法
公开(公告)号：US20100079743A1
公开(公告)日：2010-04-01
申请号：US12461508
申请日：2009-08-13
申请人： Yasuhiro Hidaka , Tadashi Nagayama , Tohru Kiuchi
发明人： Yasuhiro Hidaka , Tadashi Nagayama , Tohru Kiuchi
IPC分类号： G03B27/58 , G03B27/32
CPC分类号： G03F7/70275 , G03F7/70208
摘要： An exposure apparatus includes a mask-moving section movable in a first direction while holding a mask formed with a pattern; an illumination system which forms first and second illumination areas separated each other by a spacing distance in the first direction; a substrate-moving section movable in a second direction while holding a photosensitive substrate; a projection optical system which forms first and second projected images of the patterns of the first and second illumination areas; and a restricting section which restricts the first and second projected images to be within first and second projection areas respectively. A spacing distance between a first conjugate area with the first projection area and a second conjugate area with the second projection area is set to be such a spacing distance that scanning exposures are successively performed for first and second transfer areas provided adjacently in the second direction.
摘要翻译：曝光装置包括：在保持形成有图案的掩模的同时沿第一方向移动的掩模移动部; 照明系统，其形成第一和第二照明区域，所述第一和第二照明区域在所述第一方向上彼此隔开间隔距离; 基板移动部，其能够在保持感光基板的同时沿第二方向移动; 投影光学系统，其形成第一和第二照明区域的图案的第一和第二投影图像; 以及限制部分，其将第一和第二投影图像分别限制在第一和第二投影区域内。与第一投影区域的第一共轭区域和与第二投影区域的第二共轭区域之间的间隔距离被设定为对于在第二方向上相邻设置的第一和第二传送区域连续进行扫描曝光的间隔距离。

4. 发明申请

US20100129739A1 Surface Position Detection Apparatus, Exposure Apparatus, and Exposure Method 有权
标题翻译：表面位置检测装置，曝光装置和曝光方法
公开(公告)号：US20100129739A1
公开(公告)日：2010-05-27
申请号：US11988239
申请日：2006-06-28
申请人： Yasuhiro Hidaka , Tadashi Nagayama
发明人： Yasuhiro Hidaka , Tadashi Nagayama
IPC分类号： G03F7/20 , G03B27/54 , G01B11/14
CPC分类号： G03F7/70191 , G03F9/7026 , G03F9/7034 , G03F9/7065 , G03F9/7088 , Y10T29/49124
摘要： A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member (7) having first reflective surfaces (7b, 7c), and a light receiving system has a light receiving prism member (8) having second reflective surfaces (8b, 8c) arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces.
摘要翻译：一种表面位置检测装置，其能够高度精确地检测待检测表面的表面位置，而不会受到通过反射表面的光束中产生的偏振分量的相对位置偏移的影响。在该装置中，投影系统具有具有第一反射面（7b，7c）的突出侧棱镜部件（7），并且受光系统具有配置有第二反射面（8b，8c）的受光棱镜部件（8）与突出侧棱镜构件对应。表面位置检测装置还具有用于补偿由于通过第一和第二反射面的光束的偏振分量引起的相对位移的构件。

5. 发明申请

US20120162623A1 SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD 有权
标题翻译：表面位置检测装置，曝光装置和曝光方法
公开(公告)号：US20120162623A1
公开(公告)日：2012-06-28
申请号：US13405524
申请日：2012-02-27
申请人： Yasuhiro Hidaka , Tadashi Nagayama
发明人： Yasuhiro Hidaka , Tadashi Nagayama
IPC分类号： G03B27/34 , H05K3/00 , G03B27/58 , G01J4/00 , G01B11/14
CPC分类号： G03F7/70191 , G03F9/7026 , G03F9/7034 , G03F9/7065 , G03F9/7088 , Y10T29/49124
摘要： A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member (7) having first reflective surfaces (7b, 7c), and a light receiving system has a light receiving prism member (8) having second reflective surfaces (8b, 8c) arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces
摘要翻译：一种表面位置检测装置，其能够高度精确地检测待检测表面的表面位置，而不会受到通过反射表面的光束中产生的偏振分量的相对位置偏移的影响。在该装置中，投影系统具有具有第一反射面（7b，7c）的突出侧棱镜部件（7），并且受光系统具有配置有第二反射面（8b，8c）的受光棱镜部件（8）与突出侧棱镜构件对应。表面位置检测装置还具有用于补偿由于通过第一和第二反射面的光束的偏振分量引起的相对位移的构件

6. 发明授权

US08149382B2 Surface position detection apparatus, exposure apparatus, and exposure method 有权
标题翻译：表面位置检测装置，曝光装置和曝光方法
公开(公告)号：US08149382B2
公开(公告)日：2012-04-03
申请号：US11988239
申请日：2006-06-28
申请人： Yasuhiro Hidaka , Tadashi Nagayama
发明人： Yasuhiro Hidaka , Tadashi Nagayama
IPC分类号： G03B27/42 , G03B27/72
CPC分类号： G03F7/70191 , G03F9/7026 , G03F9/7034 , G03F9/7065 , G03F9/7088 , Y10T29/49124
摘要： A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member (7) having first reflective surfaces (7b, 7c), and a light receiving system has a light receiving prism member (8) having second reflective surfaces (8b, 8c) arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces.
摘要翻译：一种表面位置检测装置，其能够高度精确地检测待检测表面的表面位置，而不会受到通过反射表面的光束中产生的偏振分量的相对位置偏移的影响。在该装置中，投影系统具有具有第一反射面（7b，7c）的突出侧棱镜部件（7），并且受光系统具有配置有第二反射面（8b，8c）的受光棱镜部件（8）与突出侧棱镜构件对应。表面位置检测装置还具有用于补偿由于通过第一和第二反射面的光束的偏振分量引起的相对位移的构件。

7. 发明授权

US08411249B2 Surface position detecting apparatus, exposure apparatus, surface position detecting method, and device manufacturing method 有权
标题翻译：表面位置检测装置，曝光装置，表面位置检测方法和装置制造方法
公开(公告)号：US08411249B2
公开(公告)日：2013-04-02
申请号：US12466934
申请日：2009-05-15
申请人： Yasuhiro Hidaka , Motofusa Ishikawa
发明人： Yasuhiro Hidaka , Motofusa Ishikawa
IPC分类号： G03B27/52
CPC分类号： G03F9/7049 , G03F9/7026 , G03F9/7034
摘要： An apparatus is provided with a light-sending optical system which makes first light from a first pattern and second light from a second pattern incident to a predetermined surface to project intermediate images of the first and second patterns onto the predetermined surface respectively; a light-receiving optical system which guides the first and second light reflected on the predetermined surface, to first and second observation surfaces to form observation images of the first and second patterns, respectively; and a detecting section which detects position information of the observation images of the first and second patterns on the first and second observation surfaces respectively and which calculates a surface position of the predetermined surface, based on the position information. The light-sending optical system projects the intermediate image of the second pattern as an inverted image in a predetermined direction relative to the intermediate image of the first pattern.
摘要翻译：一种装置设置有发光光学系统，其使来自第一图案的第一光和从入射到预定表面的第二图案的第二光分别将第一和第二图案的中间图像投影到预定表面上; 光接收光学系统，其将在预定表面上反射的第一和第二光引导到第一和第二观察表面，以分别形成第一和第二图案的观察图像; 以及检测部分，其基于所述位置信息分别检测所述第一和第二观察表面上的所述第一和第二图案的观察图像的位置信息，并且计算所述预定表面的表面位置。发光光学系统相对于第一图案的中间图像将预定方向的第二图案的中间图像投影为反转图像。

8. 发明申请

US20120127478A1 REFLECTOR, OPTICAL ELEMENT, INTERFEROMETER SYSTEM, STAGE DEVICE, EXPOSURE APPARATUS, AND DEVICE FABRICATING METHOD 审中-公开
标题翻译：反射器，光学元件，干涉仪系统，阶段装置，曝光装置和装置制造方法
公开(公告)号：US20120127478A1
公开(公告)日：2012-05-24
申请号：US13357161
申请日：2012-01-24
申请人： Yuichi SHIBAZAKI , Yasuhiro Hidaka
发明人： Yuichi SHIBAZAKI , Yasuhiro Hidaka
IPC分类号： G01B11/14 , G01B9/02 , B01J19/08 , G01B11/24
CPC分类号： G02B5/08 , G03F7/70775
摘要： A reflecting member has: a first reflecting surface, which extends in a second direction that includes a first direction component; a second reflecting surface, which extends in a third direction that includes the first direction component, that is substantially symmetric to the first reflecting surface; and a third reflecting surface, which extends in a fourth direction, that is substantially orthogonal to the first direction.
摘要翻译：反射构件具有：第一反射面，其在包括第一方向分量的第二方向上延伸; 第二反射面，其在包括第一方向分量的第三方向上延伸，其与第一反射面大致对称; 以及第三反射面，其在与第一方向大致正交的第四方向上延伸。

9. 发明申请

US20110070275A1 CRYSTALLINE PYRITHIONE/ZINC OXIDE COMPOSITE AND PHYSIOLOGIC/ANTIBIOTIC COMPOSITION CONTAINING THE SAME 审中-公开
标题翻译：晶体氧化锌/氧化锌复合材料和含有它们的生理/抗生素组合物
公开(公告)号：US20110070275A1
公开(公告)日：2011-03-24
申请号：US12992679
申请日：2009-05-27
申请人： Yasuhiro Hidaka
发明人： Yasuhiro Hidaka
IPC分类号： A61K8/02 , A61K9/00 , A01N25/02 , A61K33/30 , A01N59/16 , A61Q5/00 , A61Q5/02 , A01P3/00
CPC分类号： A61Q5/006 , A01N55/02 , A61K8/27 , A61K8/4933 , A61K2800/412 , A61Q5/02 , A61Q7/00 , C01G9/02 , C07D213/70 , C09D5/1618 , A01N25/04 , A01N59/16 , A01N2300/00
摘要： Although zinc pyrithione is known as an excellent antidandruff component, there is a demand for an effort to reduce the blending amount without lowering the effects from the viewpoint of environmental pollution. Also, there is a demand for developing a technique that enables combining zinc pyrithione with cuprous oxide to be used as an antifouling component for a ship-bottom paint. Moreover, also as an antiseptic and anti-mold component for polymer materials, further enhancement of the antimicrobial activity of zinc pyrithione has been demanded.It has been elucidated that a new composite of the present invention obtained by treating an aqueous suspension or an aqueous paste containing zinc pyrithione or a zinc pyrithione/zinc oxide complex compound and ultrafine zinc oxide having an average particle diameter of 0.01 to 0.15 μM at pH 8 to 12 exerts an excellent physiologic/antibiotic activity such as an anti-dandruff and hair restoration effect and an underwater antifouling, antiseptic and anti-mold effect. Thus, the above-described problems have been solved.
摘要翻译：虽然吡啶硫酮锌被称为优异的去头皮屑组分，但是由于环境污染的观点，需要努力降低混合量而不降低其效果。而且，需要开发能够将吡啶硫酮锌与氧化亚铜组合用作船底涂料的防污组分的技术。此外，作为聚合物材料的防腐和防霉成分，还要求进一步提高吡啶硫酮锌的抗菌活性。已经阐明了通过在pH值下处理含有水悬浮液或含有吡啶硫酮锌或吡啶硫酮锌/氧化锌络合物化合物的水性糊剂和平均粒径为0.01至0.15μM的超细氧化锌而获得的本发明的新型复合材料 8〜12具有优异的生理/抗生素活性，如头皮屑和头发恢复效果，以及水下防污，防腐和防霉效果。因此，解决了上述问题。

10. 发明申请

US20090026485A1 LIGHT-EMITTING DEVICE 有权
标题翻译：发光装置
公开(公告)号：US20090026485A1
公开(公告)日：2009-01-29
申请号：US11993956
申请日：2006-06-30
申请人： Youji Urano , Takuya Nakatani , Yasuhiro Hidaka
发明人： Youji Urano , Takuya Nakatani , Yasuhiro Hidaka
IPC分类号： H01L33/00
CPC分类号： H01L33/483 , F21K9/00 , F21V21/30 , F21Y2105/00 , F21Y2115/10 , H01L33/58 , H01L33/62 , H01L33/64 , H01L2224/48091 , H01L2224/73265 , H01L2924/00014
摘要： A light-emitting device of the present invention includes: a LED chip 10; a chip mounting member 70 having a conductive plate (heat transfer plate) 71 one surface side of which the LED chip 10 is mounted on and a conductor patterns 73, 73 which is formed on the one surface side of the conductive plate 71 through an insulating part 72 and electrically connected to the LED chip 10; and a sheet-shaped connecting member 80 disposed on the other surface side of the conductive plate 71 to connect the conductive plate 71 to a body of the luminaire 90 which is a metal member for holding the chip mounting member 70. The connecting member 80 is made of a resin sheet which includes a filler and whose viscosity is reduced by heating, and the connecting member 80 has an electrical insulating property and thermally connects the conductive plate 71 and the body 90 of the luminaire to each other.
摘要翻译：本发明的发光装置包括：LED芯片10; 具有其一个表面侧安装有LED芯片10的导电板（传热板）71的芯片安装构件70和通过绝缘体形成在导电板71的一个表面侧上的导体图案73,73 部分72并且电连接到LED芯片10; 以及布置在导电板71的另一个表面侧上的片状连接件80，以将导电板71连接到作为用于保持芯片安装部件70的金属部件的照明器90的主体。连接部件80是由包含填料的树脂片制成，其粘度通过加热而降低，并且连接构件80具有电绝缘性能，并且将导电板71和照明器的主体90彼此热连接。

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