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1. 发明申请

US20130078391A1 Complexes Of Imidazole Ligands 有权
标题翻译：咪唑配体配合物
公开(公告)号：US20130078391A1
公开(公告)日：2013-03-28
申请号：US13363918
申请日：2012-02-01
申请人： John Anthony Thomas Norman , Melanie K. Perez , Xinjian Lei , Daniel P. Spence , Sergie Vladimirovich Ivanov , Wade Hampton Bailey, III
发明人： John Anthony Thomas Norman , Melanie K. Perez , Xinjian Lei , Daniel P. Spence , Sergie Vladimirovich Ivanov , Wade Hampton Bailey, III
IPC分类号： C07F17/02
CPC分类号： C07F17/02 , C07F5/00 , C07F5/003 , C07F7/003 , C07F7/28 , C07F15/02 , C07F15/04 , C07F15/06 , C07F17/00
摘要： Metal imidazolate complexes are described where imidazoles ligands functionalized with bulky groups and their anionic counterpart, i.e., imidazolates are described. Compounds comprising one or more such polyalkylated imidazolate anions coordinated to a metal or more than one metal, selected from the group consisting of alkali metals, transition metals, lanthanide metals, actinide metals, main group metals, including the chalcogenides, are contemplated. Alternatively, multiple different imidazole anions, in addition to other different anions, can be coordinated to metals to make new complexes. The synthesis of novel compounds and their use to form thin metal containing films is also contemplated.
摘要翻译：描述了金属咪唑盐络合物，其中描述了用大体积基团官能化的咪唑配体及其阴离子配对物，即咪唑盐。包括一种或多种这样的多烷基化咪唑酸盐阴离子配位到金属或一种以上选自碱金属，过渡金属，镧系元素金属，锕系金属，主要金属（包括硫族化物）的金属中。或者，除了其它不同的阴离子之外，多种不同的咪唑阴离子可以与金属配位以制备新的络合物。还考虑了新化合物的合成及其用于形成含薄金属膜的用途。

2. 发明申请

US20120121806A1 Complexes Of Imidazole Ligands 有权
标题翻译：咪唑配体配合物
公开(公告)号：US20120121806A1
公开(公告)日：2012-05-17
申请号：US13152885
申请日：2011-06-03
申请人： John Anthony Thomas Norman , Melanie K. Perez , Xinjian Lei , Daniel P. Spence , Sergei Vladimirovich Ivanov , Wade Hampton Bailey, III
发明人： John Anthony Thomas Norman , Melanie K. Perez , Xinjian Lei , Daniel P. Spence , Sergei Vladimirovich Ivanov , Wade Hampton Bailey, III
IPC分类号： C07F7/28 , C07F13/00 , B05D3/12 , C23C16/50 , C23C16/44 , C07F15/02 , C07F5/00
CPC分类号： C07F17/02 , C07F5/00 , C07F5/003 , C07F7/003 , C07F7/28 , C07F15/02 , C07F15/04 , C07F15/06 , C07F17/00
摘要： Metal imidazolate complexes are described where imidazoles ligands functionalized with bulky groups and their anionic counterpart, i.e., imidazolates are described. Compounds comprising one or more such polyalkylated imidazolate anions coordinated to a metal or more than one metal, selected from the group consisting of alkali metals, transition metals, lanthanide metals, actinide metals, main group metals, including the chalcogenides, are contemplated. Alternatively, multiple different imidazole anions, in addition to other different anions, can be coordinated to metals to make new complexes. The synthesis of novel compounds and their use to form thin metal containing films is also contemplated.
摘要翻译：描述了金属咪唑盐络合物，其中描述了用大体积基团官能化的咪唑配体及其阴离子配对物，即咪唑盐。包括一种或多种这样的多烷基化咪唑酸盐阴离子配位到金属或一种以上选自碱金属，过渡金属，镧系元素金属，锕系金属，主要金属（包括硫族化物）的金属中。或者，除了其它不同的阴离子之外，多种不同的咪唑阴离子可以与金属配位以制备新的络合物。还考虑了新化合物的合成及其用于形成含薄金属膜的用途。

3. 发明申请

US20110135838A1 Liquid Precursor for Depositing Group 4 Metal Containing Films 有权
标题翻译：用于沉积第4组含金属膜的液体前体
公开(公告)号：US20110135838A1
公开(公告)日：2011-06-09
申请号：US12950352
申请日：2010-11-19
申请人： Xinjian Lei , John Anthony Thomas Norman , Daniel P. Spence
发明人： Xinjian Lei , John Anthony Thomas Norman , Daniel P. Spence
IPC分类号： C23C16/30 , C07F7/28 , C23C16/44 , C23C16/50 , C23C16/48 , C23C16/56
CPC分类号： C07F17/00 , C07F7/003
摘要： The present invention is related to a family of liquid group 4 precursors represented by the formula: (pyr*)M(OR1)(OR2)(OR3) wherein pyr* is an alkyl substituted pyrrolyl, wherein M is group 4 metals include Ti, Zr, and Hf; wherein R1-3 can be same or different and selected from group consisting of linear or branched C1-6 alkyls; preferably C1-3 alkyls; R4 is selected from the group consisting of C1-6 alkyls, preferably branched C3-5 alkyls substituted at 2, 5 positions to prevent the pyrrolyl coordinated to the metal center in η1 fashion; n=2, 3, 4. Most preferably the invention is directed to (2,5-di-tert-butylpyrrolyl)(tris(ethoxy)titanium, (2,5-di-tert-amylpyrrolyl)(tris(ethoxy)titanium, and (2,5-di-tert-amylpyrrolyl)(tris(iso-propoxy)titanium. The invention is also directed to (cyclopentadienyl)(2,5-di-methylpyrrolyl)(bis(ethoxy))titanium. Deposition methods using these compounds are also contemplated.
摘要翻译：本发明涉及一种由式（pyr *）M（OR1）（OR2）（OR3）表示的液体组4前体，其中pyr *是烷基取代的吡咯基，其中M是第4族金属包括Ti， Zr和Hf; 其中R1-3可以相同或不同，并且选自直链或支链C 1-6烷基; 优选C 1-3烷基; R 4选自C 1-6烷基，优选在2,5位取代的支链C 3-5烷基，以防止以“1”方式与金属中心配位的吡咯基; 最优选本发明涉及（2,5-二叔丁基吡咯基）（三（乙氧基）钛，（2,5-二叔戊基吡咯基）（三（乙氧基）钛本发明还涉及（环戊二烯基）（2,5-二甲基吡咯基）（双（乙氧基））钛。沉积方法也考虑使用这些化合物。

4. 发明授权

US09018387B2 Complexes of imidazole ligands 有权
标题翻译：咪唑配体的配合物
公开(公告)号：US09018387B2
公开(公告)日：2015-04-28
申请号：US13152885
申请日：2011-06-03
申请人： John Anthony Thomas Norman , Melanie K. Perez , Xinjian Lei , Daniel P. Spence , Sergei Vladimirovich Ivanov , Wade Hampton Bailey, III
发明人： John Anthony Thomas Norman , Melanie K. Perez , Xinjian Lei , Daniel P. Spence , Sergei Vladimirovich Ivanov , Wade Hampton Bailey, III
IPC分类号： C07F5/00 , C07F7/28 , C07F15/00 , C07F17/02 , C07F15/02 , C07F15/04 , C07F15/06 , C07F17/00 , C07F7/00
CPC分类号： C07F17/02 , C07F5/00 , C07F5/003 , C07F7/003 , C07F7/28 , C07F15/02 , C07F15/04 , C07F15/06 , C07F17/00
摘要： Metal imidazolate complexes are described where imidazoles ligands functionalized with bulky groups and their anionic counterpart, i.e., imidazolates are described. Compounds comprising one or more such polyalkylated imidazolate anions coordinated to a metal or more than one metal, selected from the group consisting of alkali metals, transition metals, lanthanide metals, actinide metals, main group metals, including the chalcogenides, are contemplated. Alternatively, multiple different imidazole anions, in addition to other different anions, can be coordinated to metals to make new complexes. The synthesis of novel compounds and their use to form thin metal containing films is also contemplated.
摘要翻译：描述了金属咪唑盐络合物，其中描述了用大体积基团官能化的咪唑配体及其阴离子配对物，即咪唑盐。包括一种或多种这样的多烷基化咪唑酸盐阴离子配位到金属或一种以上选自碱金属，过渡金属，镧系元素金属，锕系金属，主要金属（包括硫族化物）的金属中。或者，除了其它不同的阴离子之外，多种不同的咪唑阴离子可以与金属配位以制备新的络合物。还考虑了新化合物的合成及其用于形成含薄金属膜的用途。

5. 发明申请

US20080254218A1 Metal Precursor Solutions For Chemical Vapor Deposition 审中-公开
标题翻译：用于化学气相沉积的金属前体溶液
公开(公告)号：US20080254218A1
公开(公告)日：2008-10-16
申请号：US12058200
申请日：2008-03-28
申请人： Xinjian Lei , Liam Quinn , John Anthony Thomas Norman , William Franklin Burgoyne , Gauri Sankar Lal , Michael Ulman , Daniel P. Spence
发明人： Xinjian Lei , Liam Quinn , John Anthony Thomas Norman , William Franklin Burgoyne , Gauri Sankar Lal , Michael Ulman , Daniel P. Spence
IPC分类号： C23C18/44
CPC分类号： C23C16/18 , C23C16/16
摘要： Metal source containing precursor liquid solutions for chemical vapor deposition processes, including atomic layer deposition, for fabricating conformal metal-containing films on substrates are described. More specifically, the metal source precursor liquid solutions are comprised of (i) at least one metal complex selected from β-diketonates, β-ketoiminates, β-diiminates, alkyl metal, metal carbonyl, alkyl metal carbonyl, aryl metal, aryl metal carbonyl, cyclopentadienyl metal, cyclopentadienyl metal isonitrile, cyclopentadienyl metal nitrile, cyclopentadienyl metal carbonyl, metal alkoxide, metal ether alkoxide, and metal amides wherein the ligand can be monodentate, bidentate and multidentate coordinating to the metal atom and the metal is selected from group 2 to 14 elements, and (ii) a solvent selected from organic amides including linear amides and cyclic amides for such metal source containing precursors.
摘要翻译：描述了用于在衬底上制造保形的含金属膜的用于化学气相沉积工艺的包含原子层沉积的前体液体溶液的金属源。更具体地说，金属源前体液体溶液包括（i）至少一种选自β-二酮酸酯，β-酮亚胺酸酯，β-二亚胺，烷基金属，金属羰基，烷基金属羰基，芳基金属，芳基金属羰基，环戊二烯基金属，环戊二烯基金属异腈，环戊二烯基金属腈，环戊二烯基金属羰基，金属醇盐，金属醚醇盐和金属酰胺，其中配体可以是单齿，双齿和多齿配位的金属原子，金属选自组2 14元素，和（ii）选自有机酰胺的溶剂，包括用于这种含金属源的前体的线性酰胺和环状酰胺。

6. 发明授权

US08592606B2 Liquid precursor for depositing group 4 metal containing films 有权
标题翻译：用于沉积第4组含金属膜的液体前体
公开(公告)号：US08592606B2
公开(公告)日：2013-11-26
申请号：US12950352
申请日：2010-11-19
申请人： Xinjian Lei , John Anthony Thomas Norman , Daniel P. Spence
发明人： Xinjian Lei , John Anthony Thomas Norman , Daniel P. Spence
IPC分类号： C07F7/00 , C07F7/28 , C23C16/00
CPC分类号： C07F17/00 , C07F7/003
摘要： The present invention is related to a family of liquid group 4 precursors represented by the formula: (pyr*)M(OR1)(OR2)(OR3) wherein pyr* is an alkyl substituted pyrrolyl, wherein M is group 4 metals include Ti, Zr, and Hf; wherein R1-3 can be same or different and selected from group consisting of linear or branched C1-6 alkyls; preferably C1-3 alkyls; R4 is selected from the group consisting of C1-6 alkyls, preferably branched C3-5 alkyls substituted at 2, 5 positions to prevent the pyrrolyl coordinated to the metal center in η1 fashion; n=2, 3, 4. Most preferably the invention is directed to (2,5-di-tert-butylpyrrolyl)(tris(ethoxy)titanium, (2,5-di-tert-amylpyrrolyl)(tris(ethoxy)titanium, and (2,5-di-tert-amylpyrrolyl)(tris(iso-propoxy)titanium. The invention is also directed to (cyclopentadienyl)(2,5-di-methylpyrrolyl)(bis(ethoxy))titanium. Deposition methods using these compounds are also contemplated.
摘要翻译：本发明涉及一种由式（pyr *）M（OR1）（OR2）（OR3）表示的液体组4前体，其中pyr *是烷基取代的吡咯基，其中M是第4族金属包括Ti， Zr和Hf; 其中R1-3可以相同或不同，并且选自直链或支链C 1-6烷基; 优选C 1-3烷基; R4选自C1-6烷基，优选在2,5位取代的支链C3-5烷基，以防止以eta1方式与金属中心配位的吡咯啉; 最优选本发明涉及（2,5-二叔丁基吡咯基）（三（乙氧基）钛，（2,5-二叔戊基吡咯基）（三（乙氧基）钛本发明还涉及（环戊二烯基）（2,5-二甲基吡咯基）（双（乙氧基））钛。沉积方法也考虑使用这些化合物。

7. 发明授权

US07919409B2 Materials for adhesion enhancement of copper film on diffusion barriers 失效
标题翻译：扩散壁上铜膜粘附增强的材料
公开(公告)号：US07919409B2
公开(公告)日：2011-04-05
申请号：US12192603
申请日：2008-08-15
申请人： Hansong Cheng , Xinjian Lei , Daniel P. Spence , John Anthony Thomas Norman , David Allen Roberts , Bo Han , Chenggang Zhou , Jinping Wu
发明人： Hansong Cheng , Xinjian Lei , Daniel P. Spence , John Anthony Thomas Norman , David Allen Roberts , Bo Han , Chenggang Zhou , Jinping Wu
IPC分类号： H01L21/285
CPC分类号： H01L21/76846
摘要： We have used the state-of-the-art computational chemistry techniques to identify adhesion promoting layer materials that provide good adhesion of copper seed layer to the adhesion promoting layer and the adhesion promoting layer to the barrier layer. We have identified factors responsible for providing good adhesion of copper layer on various metallic surfaces and circumstances under which agglomeration of copper film occur. Several promising adhesion promoting layer materials based on chromium alloys have been predicted to be able to significantly enhance the adhesion of copper films. Chromium containing complexes of a polydentate β-ketoiminate have been identified as chromium containing precursors to make the alloys with chromium.
摘要翻译：我们使用最先进的计算化学技术来鉴别提供铜种子层对粘合促进层和粘附促进层对阻挡层的良好粘附性的粘附促进层材料。我们已经确定了在各种金属表面上提供铜层的良好附着力以及发生铜膜附聚的情况的因素。已经预测了几种基于铬合金的有希望的粘合促进层材料能够显着增强铜膜的粘附性。已经鉴定了多齿和重铬酸盐的含铬络合物是含铬的前体，以使铬合金化。

8. 发明申请

US20100119726A1 Group 2 Metal Precursors For Deposition Of Group 2 Metal Oxide Films 审中-公开
标题翻译：第2组金属前体用于沉积第2组金属氧化物膜
公开(公告)号：US20100119726A1
公开(公告)日：2010-05-13
申请号：US12266806
申请日：2008-11-07
申请人： Xinjian Lei , Daniel P. Spence , John Anthony Thomas Norman , Michael Ulman
发明人： Xinjian Lei , Daniel P. Spence , John Anthony Thomas Norman , Michael Ulman
IPC分类号： C07C249/00 , C07D307/08 , C09D4/00 , B05D5/12 , C23C4/10
CPC分类号： C07C225/14 , C23C16/403 , C23C16/404
摘要： This invention is related to Group 2 metal-containing polydentate β-ketoiminate precursors and compositions comprising Group 2 metal-containing polydentate β-ketoiminate precursors, wherein the polydentate β-ketoiminate precursors incorporate an alkoxy group in the imino portion of the molecule. The compounds and compositions are useful for fabricating metal containing films on substrates such as silicon, metal nitride, metal oxide and other metal layers via chemical vapor deposition (CVD) processes.
摘要翻译：本发明涉及含有第2族金属的多齿骨架和酮基组合物前体和包含第2族金属的多齿骨架 - 酮基亚胺前体的组合物，其中多齿骨架和重沸石前体在分子的亚氨基部分中并入烷氧基。这些化合物和组合物可用于通过化学气相沉积（CVD）工艺在诸如硅，金属氮化物，金属氧化物和其它金属层的衬底上制造含金属膜。

9. 发明授权

US08680289B2 Complexes of imidazole ligands 有权
标题翻译：咪唑配体的配合物
公开(公告)号：US08680289B2
公开(公告)日：2014-03-25
申请号：US13363918
申请日：2012-02-01
申请人： John Anthony Thomas Norman , Melanie K. Perez , Xinjian Lei , Daniel P. Spence , Sergei Vladimirovich Ivanov , Wade Hampton Bailey, III
发明人： John Anthony Thomas Norman , Melanie K. Perez , Xinjian Lei , Daniel P. Spence , Sergei Vladimirovich Ivanov , Wade Hampton Bailey, III
IPC分类号： C07F15/00 , C23C16/18
CPC分类号： C07F17/02 , C07F5/00 , C07F5/003 , C07F7/003 , C07F7/28 , C07F15/02 , C07F15/04 , C07F15/06 , C07F17/00
摘要： Metal imidazolate complexes are described where imidazoles ligands functionalized with bulky groups and their anionic counterpart, i.e., imidazolates are described. Compounds comprising one or more such polyalkylated imidazolate anions coordinated to a metal or more than one metal, selected from the group consisting of alkali metals, transition metals, lanthanide metals, actinide metals, main group metals, including the chalcogenides, are contemplated. Alternatively, multiple different imidazole anions, in addition to other different anions, can be coordinated to metals to make new complexes. The synthesis of novel compounds and their use to form thin metal containing films is also contemplated.
摘要翻译：描述了金属咪唑盐络合物，其中描述了用大体积基团官能化的咪唑配体及其阴离子配对物，即咪唑盐。包括一种或多种这样的多烷基化咪唑酸盐阴离子配位到金属或一种以上选自碱金属，过渡金属，镧系元素金属，锕系金属，主要金属（包括硫族化物）的金属中。或者，除了其它不同的阴离子之外，多种不同的咪唑阴离子可以与金属配位以制备新的络合物。还考虑了新化合物的合成及其用于形成含薄金属膜的用途。

10. 发明授权

US08507704B2 Liquid composition containing aminoether for deposition of metal-containing films 有权
标题翻译：含有含有金属的膜的氨基醚的液体组合物
公开(公告)号：US08507704B2
公开(公告)日：2013-08-13
申请号：US12871284
申请日：2010-08-30
申请人： Sergei Vladimirovich Ivanov , Xinjian Lei , Daniel P. Spence , John Anthony Thomas Norman , Laura M. Matz
发明人： Sergei Vladimirovich Ivanov , Xinjian Lei , Daniel P. Spence , John Anthony Thomas Norman , Laura M. Matz
IPC分类号： C07F5/00 , C07F5/06 , C07F9/00 , C07F13/00 , C07F7/00 , C07F11/00 , C07F1/00 , C07F3/00 , C07F15/00 , C07C49/92
CPC分类号： C09D1/00 , C23C16/18 , C23C16/404 , C23C16/448
摘要： A formulation, comprising: a) at least one metal-ligand complex, wherein one or more ligands are selected from the group consisting of β-diketonates, β-ketoiminates, β-ketoesterates, β-diiminates, alkyls, carbonyls, alkyl carbonyls, cyclopentadienyls, pyrrolyls, alkoxides, amidinates, imidazolyls, and mixtures thereof; and the metal is selected from Group 2 to 16 elements of the Periodic Table of the Elements; and, b) at least one aminoether selected from the group consisting of R1R2NR3OR4NR5R6, R1OR4NR5R6, O(CH2CH2)2NR1, R1R2NR3N(CH2CH2)2O, R1R2NR3OR4N(CH2CH2)2O, O(CH2CH2)2NR1OR2N(CH2CH2)2O, and mixtures thereof, wherein R1-6 are independently selected from group consisting of C1-10 linear alkyl, C1-10 branched alkyl, C1-10 cyclic alkyl, C6-C10 aromatic, C1-10 alkylamine, C1-10 alkylaminoalkyl, C1-10 ether, C4-C10 cyclic ether, C4-C10 cyclic aminoether, and mixture thereof.
摘要翻译：一种制剂，其包含：a）至少一种金属 - 配体配合物，其中一个或多个配体选自β-二酮酸酯，β-酮亚胺酸酯，β-酮酯酸酯，β-二亚胺酯，烷基，羰基，烷基羰基，环戊二烯基，吡咯烷基，烷氧基化物，脒基，咪唑啉及其混合物; 金属选自元素周期表第2〜16族元素; 和（b）至少一种选自下组的氨基醚：R1R2NR3OR4NR5R6，R1OR4NR5R6，O（CH2CH2）2NR1，R1R2NR3N（CH2CH2）2O，R1R2NR3OR4N（CH2CH2）2O，O（CH2CH2）2NR1OR2N（CH2CH2）其中R1-6独立地选自C1-10直链烷基，C1-10支链烷基，C1-10环烷基，C6-C10芳族，C1-10烷基胺，C1-10烷基氨基烷基，C1-10醚，C4 -C 10环醚，C 4 -C 10环氨基醚及其混合物。

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