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    • 6. 发明授权
    • Composite sheet material selection method for use in ultra-fast laser patterning
    • 用于超快速激光图案化的复合片材选择方法
    • US07773216B2
    • 2010-08-10
    • US11579521
    • 2005-05-10
    • Chen-Hsiung ChengXinbing Liu
    • Chen-Hsiung ChengXinbing Liu
    • G01J3/00
    • B23K26/032B23K26/03B23K2103/30B23K2103/50B32B38/10B32B2310/0843
    • The present invention is a method of selecting composite sheet materials for use in ultra-fast laser patterning of layers of organic thin film material such as OLEDs. The material is selected to accomplish patterning of upper layers without damaging underlying layers by using an ultra-fast laser programmed with the appropriate laser processing parameters. These parameters are derived by examining each layer's absorption spectra, thermal, and chemical characteristics. The method of the present invention includes measuring each layer's absorption spectrum, examining each layer's thermal and chemical characteristics, determining if the layer is ablatable, determining the laser setup, patterning the layer through laser ablation processing, and determining if more layers need to be ablated. Further, the method includes a sub-method of selecting an alternate material if a layer's material characteristics are not favorable for ablation without damaging underlying layers.
    • 本发明是选择用于有机薄膜材料如OLED的超快速激光图案化的复合片材的方法。 选择材料以通过使用用适当的激光加工参数编程的超快速激光来实现上层的图案化而不损坏下层。 这些参数是通过检查每层的吸收光谱,热和化学特性得出的。 本发明的方法包括测量每层的吸收光谱,检查每层的热和化学特性,确定层是否可消融,确定激光设置,通过激光烧蚀处理对层进行图案化,以及确定是否需要消除更多的层 。 此外,该方法包括如果层的材料特性不利于消融而不损坏下层,则选择替代材料的子方法。
    • 9. 发明授权
    • Workpiece stabilization with gas flow
    • 工件稳定与气流
    • US06621045B1
    • 2003-09-16
    • US10266936
    • 2002-10-08
    • Xinbing LiuMing LiChen-Hsiung Cheng
    • Xinbing LiuMing LiChen-Hsiung Cheng
    • B23K2638
    • B23K26/38B23K26/0624B23K26/142B23K26/1435B23K26/1436B23K26/1437B23K26/1438B23K26/147
    • A method is provided for maintaining a workpiece in a focal plane of a laser drilling system. The method includes: providing a workpiece holder that is adapted to releasably retain a workpiece on a planar surface thereof, the planar surface having a recess extending therein; positioning the workpiece onto a planar surface of a workpiece holder, such that the workpiece extends across the recess formed in the workpiece holder and an exposed surface of the workpiece aligns with a focal plane of a laser drilling system; projecting a laser beam from the laser drilling system onto the exposed surface of the workpiece, thereby forming an ablation on the exposed surface of the workpiece; and directing a flow of gas onto the exposed surface of the workpiece substantially concurrent with the step of projecting a laser beam, such that the flow of gas substantially impinges on an area of the exposed surface that extends across the recess formed in the workpiece holder, thereby maintaining the exposed surface of the workpiece in the focal plane of the laser drilling system during the laser drilling operation.
    • 提供了一种用于将工件保持在激光钻孔系统的焦平面中的方法。 该方法包括:提供适于将工件可释放地保持在其平坦表面上的工件保持器,该平坦表面具有在其中延伸的凹部; 将工件定位在工件保持器的平坦表面上,使得工件延伸穿过形成在工件保持器中的凹部,并且工件的暴露表面与激光钻孔系统的焦平面对齐; 将来自激光钻孔系统的激光束投射到工件的暴露表面上,从而在工件的暴露表面上形成消融; 并且在投射激光束的步骤的基础上同时将气体流引导到工件的暴露表面上,使得气体流基本上撞击暴露表面的延伸穿过形成在工件保持器中的凹部的区域, 从而在激光钻孔操作期间将工件的暴露表面保持在激光钻孔系统的焦平面内。