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    • 2. 发明申请
    • Optical pick-up aberration correcting mirror, aberration correcting method and optical pick-up
    • 光学拾取像差校正镜,像差校正方法和光学拾取器
    • US20050057826A1
    • 2005-03-17
    • US10933501
    • 2004-09-03
    • Yosuke MizuyamaShogo Matsubara
    • Yosuke MizuyamaShogo Matsubara
    • G02B26/06G02B26/08G02B27/00G11B7/135G02F1/29G02B5/08G02B7/182
    • G11B7/13927G02B26/0858G02B27/0025G11B7/1362
    • It is an object of the invention to provide an aberration correcting mirror which has a small size, power saving, a low voltage, a low price and high precision. In particular, it is an object to provide a practical mirror for correcting a spherical aberration. The invention provides an aberration correcting mirror constituted by a substrate, a piezoelectric unit, a pair of electrode films interposing the piezoelectric unit therebetween, an elastic unit and an optical reflective film, wherein the substrate has a cavity portion which is schematically symmetrical about an optical axis, each of the pair of electrode films is divided into at least two parts including a first electrode and a second electrode, the first electrode being schematically symmetrical about the optical axis and the second electrode being provided to surround the first electrode, and such an electric potential as to set the directions of electric fields in the piezoelectric unit to be reverse to each other is applied to the first electrode and the second electrode.
    • 本发明的目的是提供一种具有小尺寸,省电,低电压,低价格和高精度的像差校正镜。 特别地,本发明的目的是提供一种用于校正球面像差的实用镜。 本发明提供了一种由基板,压电单元,介于其间的压电单元的一对电极膜,弹性单元和光学反射膜构成的像差校正反射镜,其中基板具有空腔部分,该空腔部分示意地对称关于光学 所述一对电极膜中的每一个被分成包括第一电极和第二电极的至少两个部分,所述第一电极围绕所述光轴示意对称,并且所述第二电极被设置为包围所述第一电极, 将压电单元中的电场方向设定为相反的电位施加到第一电极和第二电极。
    • 5. 发明授权
    • Apparatus and method of making a grayscale photo mask and an optical grayscale element
    • 制造灰度光掩模和光学灰度元件的装置和方法
    • US07436423B2
    • 2008-10-14
    • US11134310
    • 2005-05-23
    • Yosuke MizuyamaXinbing Liu
    • Yosuke MizuyamaXinbing Liu
    • G02B6/00G03F1/00
    • G03F7/70383G03F1/50G03F7/0015
    • An apparatus and method for making a grayscale photo mask and a three-dimensional grayscale diffractive optical element operate as follows. A grayscale photo mask is obtained by exposing a laser direct write (LDW) glass material to laser beam radiation from a first laser beam of modulated power moved over a grid of discrete locations on the LDW material, the modulated power being in accordance with grayscale pattern data, and, while the first laser beam is moved over the discrete locations of the grid, exposing the grid to a second laser beam, the power of the second laser beam being less than the bleach threshold of the glass material, to provide each of the discrete locations with a gray scale level to provide a predetermined gray scale pattern of varying optical transmissivity on the LDW material to produce a grayscale mask. An optical element is obtained by exposing a photoresist layer on a wafer to radiation transmitted through the grayscale mask; and removing material from the photoresist layer to provide a predetermined varying thickness of the photoresist layer as determined by the gray scale patterns on the grayscale mask to produce the three-dimensional grayscale diffractive optical element. The optical element may be a diffraction grating. The power of the second laser exposed on said discrete locations may be between about 50 mW and about 5 W, and the power of the first laser exposed on the discrete locations may be between about 20 mW and about 500 mW.
    • 用于制造灰度光掩模和三维灰度级衍射光学元件的装置和方法如下操作。 通过将激光直接写入(LDW)玻璃材料暴露于来自在LDW材料上离散位置网格上移动的调制电力的第一激光束的激光束辐射,获得灰度光掩模,调制后的功率与灰度图 数据,并且当第一激光束在网格的离散位置移动时,将栅格暴露于第二激光束,第二激光束的功率小于玻璃材料的漂白阈值,以提供每个 具有灰度级的离散位置,以在LDW材料上提供改变光学透射​​率的预定灰度图案,以产生灰度掩模。 通过将晶片上的光致抗蚀剂层暴露于通过灰度掩模的辐射而获得光学元件; 以及从光致抗蚀剂层去除材料以提供通过灰度掩模上的灰度图案确定的光致抗蚀剂层的预定变化厚度,以产生三维灰度级衍射光学元件。 光学元件可以是衍射光栅。 暴露在所述分立位置上的第二激光器的功率可以在约50mW至约5W之间,并且在离散位置上暴露的第一激光器的功率可以在约20mW至约500mW之间。
    • 8. 发明授权
    • Laser speckle reduction element
    • 激光散斑元件
    • US08902506B2
    • 2014-12-02
    • US13052591
    • 2011-03-21
    • Yosuke MizuyamaRiccardo Leto
    • Yosuke MizuyamaRiccardo Leto
    • G02B27/10G02B27/48G02B27/28
    • G02B27/48G02B27/286
    • Despeckle elements, laser beam homogenizers and methods for despeckling are provided. The despeckle element includes a transparent material having a first surface including a plural number of optical steps and a second surface having a plural number of microlenses. Each of the number of optical steps is in a one-to-one correspondence with at least one of the microlenses. One of the first surface and the second surface is configured to receive collimated light having a coherence length and a remaining one of the first surface and the second surface is configured to pass the collimated light separated into a plurality of beamlets corresponding to the number of microlenses. A height of each step of at least two of the optical steps is configured to produce an optical path difference of the collimated light longer than the coherence length.
    • 提供了散斑元件,激光束均质器和去斑的方法。 去斑元件包括具有包括多个光学步骤的第一表面的透明材料和具有多个微透镜的第二表面。 多个光学步骤中的每一个与至少一个微透镜一一对应。 第一表面和第二表面中的一个被配置为接收具有相干长度的准直光,并且第一表面和第二表面中的剩余的一个被配置为使被分离成对应于微透镜数量的多个子束的准直光 。 至少两个光学步骤的每个步骤的高度被配置为产生比相干长度更长的准直光的光程差。