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1. 发明申请

US20080266628A1 MEMS device having a drive coil with curved segments 有权
标题翻译：具有具有弯曲段的驱动线圈的MEMS装置
公开(公告)号：US20080266628A1
公开(公告)日：2008-10-30
申请号：US11796277
申请日：2007-04-26
申请人： Dean R. Brown , Wyatt O. Davis , Jason B. Tauscher
发明人： Dean R. Brown , Wyatt O. Davis , Jason B. Tauscher
IPC分类号： G02B26/08
CPC分类号： G02B7/1821 , G02B26/085
摘要： Briefly, in accordance with one or more embodiments, a coil for a MEMS device, and/or a structure on which the coil is disposed, may have one or more linear segments and one or more non-linear segments. One or more of the non-linear segments may be curved to increase a responsiveness of the coil to the magnetic field in which the coil is operating to provide an increased torque on the rotation of the mirror of the MEMS device in response to a drive signal applied to the coil in the presence of the magnetic field. The non-linear coil may have other shapes and may be any arbitrary shape.
摘要翻译：简而言之，根据一个或多个实施例，用于MEMS器件的线圈和/或其上设置有线圈的结构可以具有一个或多个线性段和一个或多个非线性段。非线性段中的一个或多个可以是弯曲的，以增加线圈对磁场的响应性，其中线圈正在运行，以响应于驱动信号在MEMS装置的反射镜的旋转上提供增加的转矩在存在磁场的情况下施加到线圈。非线性线圈可以具有其他形状并且可以是任何任意形状。

2. 发明授权

US08559086B2 Piezoresistive sensors for MEMS device having rejection of undesired motion 有权
标题翻译：用于具有拒绝不希望的运动的MEMS器件的压阻式传感器
公开(公告)号：US08559086B2
公开(公告)日：2013-10-15
申请号：US12706980
申请日：2010-02-17
申请人： Wyatt O. Davis , Yunfei Ma , Dean R. Brown , Jason B. Tauscher
发明人： Wyatt O. Davis , Yunfei Ma , Dean R. Brown , Jason B. Tauscher
IPC分类号： G02B26/08
CPC分类号： G01L5/0042 , G02B26/0833 , G02B26/105 , G09G3/3466
摘要： Briefly, in accordance with one or more embodiments, a piezoresistive stress sensor comprises a plurality of piezoresistive elements coupled in a bridge circuit disposed on, near, or contiguous to a flexure to detect torsional flexing about an axis of the flexure. The bridge circuit has at least two nodes disposed along the axis of the flexure and at least two nodes disposed off the axis of the flexure to maximize, or nearly maximize, an output of the bridge circuit in response to the torsional flexing of the flexure. A torsional flexing component of the output signal of the bridge circuit is relatively increased with respect to a component of the output signal generated by non-torsional stress of the flexure, or a component of the output signal generated by non-torsional stress of the flexure is reduced with respect to the torsional flexing component of the output signal, or combinations thereof.
摘要翻译：简而言之，根据一个或多个实施例，压阻应力传感器包括多个压阻元件，该多个压阻元件耦合在桥接电路中，桥接电路设置在挠曲件上，附近或邻近挠曲件以检测围绕挠曲件的轴的扭转弯曲。桥接电路具有至少两个沿着挠曲轴设置的节点，以及至少两个节点，其布置在挠曲件的轴线之外，以响应于挠曲件的扭曲弯曲使桥接电路的输出最大化或接近最大化。桥接电路的输出信号的扭曲分量相对于由挠曲的非扭转应力产生的输出信号的分量相对增加，或由挠曲的非扭转应力产生的输出信号的分量相对于输出信号的扭转弯曲分量或其组合而减小。

3. 发明申请

US20130033732A1 Rotating MEMS Scanner 审中-公开
标题翻译：旋转MEMS扫描仪
公开(公告)号：US20130033732A1
公开(公告)日：2013-02-07
申请号：US13198585
申请日：2011-08-04
申请人： Wyatt O. Davis , Hakan Urey , Dean R. Brown , Utku Baran , Jason B. Tauscher , Sven Thage Sigvard Holmstrom
发明人： Wyatt O. Davis , Hakan Urey , Dean R. Brown , Utku Baran , Jason B. Tauscher , Sven Thage Sigvard Holmstrom
IPC分类号： G02B26/10
CPC分类号： G02B26/085 , G02B26/101 , H04M1/21 , H04M2250/54 , H04N9/3129 , H04N9/3173
摘要： Briefly, in accordance with one or more embodiments, a rotating scanning platform comprises a rotating body and two or more suspension flexures to support the rotating body at a first end of respective suspension flexures, wherein the suspension flexures have a length that is greater than a radius of the rotating body, and the suspension flexures are disposed at an offset from a center of rotation of the rotating body. The suspension flexures are fixed, respectively, to a substrate at a second end at a location that is closer to the center of rotation than to the first end of a respective suspension flexure to allow the rotating body to rotate about the center of rotation with generally linear rotation in response to a drive signal.
摘要翻译：简而言之，根据一个或多个实施例，旋转扫描平台包括旋转体和两个或更多个悬架挠曲件，以在相应悬架挠曲件的第一端处支撑旋转体，其中悬架弯曲部的长度大于旋转体的半径和悬架弯曲部设置在与旋转体的旋转中心偏移的位置。悬架弯曲部分别在第二端处固定到位于相对于相应悬架挠曲件的第一端更靠近旋转中心的位置处的基板，以允许旋转体围绕旋转中心旋转，大体上响应于驱动信号的线性旋转。

4. 发明申请

US20110199284A1 Piezoresistive Sensors for MEMS Device Having Rejection of Undesired Motion 有权
标题翻译：具有不希望的运动的MEMS器件的压阻式传感器
公开(公告)号：US20110199284A1
公开(公告)日：2011-08-18
申请号：US12706980
申请日：2010-02-17
申请人： Wyatt O. Davis , Yunfei Ma , Dean R. Brown , Jason B. Tauscher
发明人： Wyatt O. Davis , Yunfei Ma , Dean R. Brown , Jason B. Tauscher
IPC分类号： G09G3/00 , G01L1/18
CPC分类号： G01L5/0042 , G02B26/0833 , G02B26/105 , G09G3/3466
摘要： Briefly, in accordance with one or more embodiments, a piezoresistive stress sensor comprises a plurality of piezoresistive elements coupled in a bridge circuit disposed on, near, or contiguous to a flexure to detect torsional flexing about an axis of the flexure. The bridge circuit has at least two nodes disposed along the axis of the flexure and at least two nodes disposed off the axis of the flexure to maximize, or nearly maximize, an output of the bridge circuit in response to the torsional flexing of the flexure. A torsional flexing component of the output signal of the bridge circuit is relatively increased with respect to a component of the output signal generated by non-torsional stress of the flexure, or a component of the output signal generated by non-torsional stress of the flexure is reduced with respect to the torsional flexing component of the output signal, or combinations thereof.
摘要翻译：简而言之，根据一个或多个实施例，压阻应力传感器包括多个压阻元件，该多个压阻元件耦合在桥接电路中，桥接电路设置在挠曲件上，附近或邻近挠曲件以检测围绕挠曲件的轴的扭转弯曲。桥接电路具有至少两个沿着挠曲轴设置的节点，以及至少两个节点，其布置在挠曲件的轴线之外，以响应于挠曲件的扭曲弯曲使桥接电路的输出最大化或接近最大化。桥接电路的输出信号的扭曲分量相对于由挠曲的非扭转应力产生的输出信号的分量相对增加，或由挠曲的非扭转应力产生的输出信号的分量相对于输出信号的扭转弯曲分量或其组合而减小。

5. 发明申请

US20090134319A1 Scanned Beam Display and Method of Operating 审中-公开
标题翻译：扫描光束显示和操作方法
公开(公告)号：US20090134319A1
公开(公告)日：2009-05-28
申请号：US12356307
申请日：2009-01-20
申请人： Randall B. Sprague , Jun Yan , Jason B. Tauscher , Wyatt O. Davis , John R. Lewis , Dean R. Brown , Thomas W. Montague , Chancellor W. Brown
发明人： Randall B. Sprague , Jun Yan , Jason B. Tauscher , Wyatt O. Davis , John R. Lewis , Dean R. Brown , Thomas W. Montague , Chancellor W. Brown
IPC分类号： H01J3/14
CPC分类号： G02B26/0858 , G02B26/085 , G02B26/101
摘要： A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.
摘要翻译：诸如MEMS扫描仪的MEMS振荡器具有改进和简化的驱动方案和结构。驱动脉冲可以通过支撑臂通过扭矩传递到振动体。对于多轴振荡器，两个或多个轴的驱动信号可能由驱动电路叠加并传输到MEMS振荡器。振荡器根据其在该轴上的共振频率在每个轴上进行响应。振荡器可以在一些或所有轴上共振地驱动。改进的载荷分布导致变形减少。简化的结构使用单个移动体提供多轴振动。另一结构直接驱动多个移动体。另一种结构消除了来自一个或多个移动体的致动器，这些主体由其支撑臂驱动。

6. 发明申请

US20090027748A1 MEMS Oscillator Having A Combined Drive Coil 审中-公开
标题翻译：具有组合驱动线圈的MEMS振荡器
公开(公告)号：US20090027748A1
公开(公告)日：2009-01-29
申请号：US12234464
申请日：2008-09-19
申请人： Randall B. Sprague , Jun Yan , Jason B. Tauscher , Wyatt O. Davis , John R. Lewis , Dean R. Brown , Thomas W. Montague , Chancellor W. Brown
发明人： Randall B. Sprague , Jun Yan , Jason B. Tauscher , Wyatt O. Davis , John R. Lewis , Dean R. Brown , Thomas W. Montague , Chancellor W. Brown
IPC分类号： G02B26/10
CPC分类号： G02B26/0858 , G02B26/085 , G02B26/101
摘要： A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.
摘要翻译：诸如MEMS扫描仪的MEMS振荡器具有改进和简化的驱动方案和结构。驱动脉冲可以通过支撑臂通过扭矩传递到振动体。对于多轴振荡器，两个或多个轴的驱动信号可能由驱动电路叠加并传输到MEMS振荡器。振荡器根据其在该轴上的共振频率在每个轴上进行响应。振荡器可以在一些或所有轴上共振地驱动。改进的载荷分布导致变形减少。简化的结构使用单个移动体提供多轴振动。另一结构直接驱动多个移动体。另一种结构消除了来自一个或多个移动体的致动器，这些主体由其支撑臂驱动。

7. 发明申请

US20080143451A1 Driving a MEMS oscillator through a secondary set of support arms 审中-公开
标题翻译：通过辅助的一组支撑臂驱动MEMS振荡器
公开(公告)号：US20080143451A1
公开(公告)日：2008-06-19
申请号：US12029585
申请日：2008-02-12
申请人： Randall B. Sprague , Jun Yan , Jason B. Tauscher , Wyatt O. Davis , John R. Lewis , Dean R. Brown , Thomas W. Montague , Chancellor W. Brown
发明人： Randall B. Sprague , Jun Yan , Jason B. Tauscher , Wyatt O. Davis , John R. Lewis , Dean R. Brown , Thomas W. Montague , Chancellor W. Brown
IPC分类号： G02B26/08 , H03B5/40 , H03B5/30
CPC分类号： G02B26/0858 , G02B26/085 , G02B26/101
摘要： A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.
摘要翻译：诸如MEMS扫描仪的MEMS振荡器具有改进和简化的驱动方案和结构。驱动脉冲可以通过支撑臂通过扭矩传递到振动体。对于多轴振荡器，两个或多个轴的驱动信号可能由驱动电路叠加并传输到MEMS振荡器。振荡器根据其在该轴上的共振频率在每个轴上进行响应。振荡器可以在一些或所有轴上共振地驱动。改进的载荷分布导致变形减少。简化的结构使用单个移动体提供多轴振动。另一结构直接驱动多个移动体。另一种结构消除了来自一个或多个移动体的致动器，这些主体由其支撑臂驱动。

8. 发明申请

US20140313558A1 MEMS Device with Asymmetric Flexures 审中-公开
标题翻译：具有不对称挠度的MEMS器件
公开(公告)号：US20140313558A1
公开(公告)日：2014-10-23
申请号：US13866343
申请日：2013-04-19
申请人： Wyatt O. Davis , Jason B. Tauscher , Dean R. Brown
发明人： Wyatt O. Davis , Jason B. Tauscher , Dean R. Brown
IPC分类号： G02B26/10
CPC分类号： G02B26/0833 , B81B3/0078 , B81B2201/042 , G02B27/0101 , G02B27/0172
摘要： A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.
摘要翻译：微机电系统（MEMS）装置包括通过形成枢转轴线的两个挠曲件从固定平台悬挂的扫描平台。两个弯曲部可以围绕扫描平台的中心线对称或不对称。至少一个弯曲部包括彼此不平行的两个部分。第二挠曲可以包括具有一个部分比另一个部分宽的两个部分。当MEMS装置作为组件的一部分安装时，挠曲设计减少了安装和热应力的影响。

9. 发明授权

US08218218B2 Fatigue resistant MEMS apparatus and system 有权
标题翻译：耐疲劳MEMS仪器和系统
公开(公告)号：US08218218B2
公开(公告)日：2012-07-10
申请号：US12420426
申请日：2009-04-08
申请人： Jason B. Tauscher , Matthew Ellis , Dean R. Brown , Mark P. Helsel , Wyatt O. Davis , Yunfei Ma , Michael E. Sherwood , John Wyatt Coy , David Malametz
发明人： Jason B. Tauscher , Matthew Ellis , Dean R. Brown , Mark P. Helsel , Wyatt O. Davis , Yunfei Ma , Michael E. Sherwood , John Wyatt Coy , David Malametz
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , G02B26/085 , H04M1/0272 , H04M1/7253
摘要： A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.
摘要翻译：微机电系统（MEMS）包括具有改进的可靠性的导体。导体在MEMS装置中与移动构件弯曲，并且通过提供增加的抗疲劳性，减小的裂纹扩展的材料选择和/或在给定应变水平下改善活体的机制来实现改进的可靠性。导体可以包括单一材料，或者可以包括不同材料的层。

10. 发明申请

US20110026549A1 Electromagnetic Scanner Having Variable Coil Width 有权
标题翻译：具有可变线圈宽度的电磁扫描仪
公开(公告)号：US20110026549A1
公开(公告)日：2011-02-03
申请号：US12512261
申请日：2009-07-30
申请人： Jason B. Tauscher , Dean R. Brown , Matthew Ellis , Wyatt O. Davis , Mark P. Helsel
发明人： Jason B. Tauscher , Dean R. Brown , Matthew Ellis , Wyatt O. Davis , Mark P. Helsel
IPC分类号： H01S3/10
CPC分类号： G06K7/10633 , G06K7/10653
摘要： Briefly, in accordance with one or more embodiments, a scanner for a scanned beam display may comprise a scanning platform having a mirror disposed thereon to reflect a beam of light impinging on the mirror, a drive coil disposed on the scanning platform to scan the reflected beam of light in response to a drive current applied to the drive coil. The drive coil has coil winding segments having a narrower width in one or more regions of the drive coil, and has coil winding segments having a greater width in one or more other regions of the drive coil to provide a the drive coil with a reduced electrical resistance.
摘要翻译：简而言之，根据一个或多个实施例，用于扫描光束显示器的扫描器可以包括扫描平台，其具有设置在其上的反射镜以反射入射在反射镜上的光束，设置在扫描平台上的驱动线圈以扫描反射的光束响应于施加到驱动线圈的驱动电流。驱动线圈具有在驱动线圈的一个或多个区域中具有较窄宽度的线圈绕组段，并且具有在驱动线圈的一个或多个其它区域中具有较大宽度的线圈绕组段，从而为驱动线圈提供减小的电抵抗性。

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