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1. 发明申请

US20130033732A1 Rotating MEMS Scanner 审中-公开
标题翻译：旋转MEMS扫描仪
公开(公告)号：US20130033732A1
公开(公告)日：2013-02-07
申请号：US13198585
申请日：2011-08-04
申请人： Wyatt O. Davis , Hakan Urey , Dean R. Brown , Utku Baran , Jason B. Tauscher , Sven Thage Sigvard Holmstrom
发明人： Wyatt O. Davis , Hakan Urey , Dean R. Brown , Utku Baran , Jason B. Tauscher , Sven Thage Sigvard Holmstrom
IPC分类号： G02B26/10
CPC分类号： G02B26/085 , G02B26/101 , H04M1/21 , H04M2250/54 , H04N9/3129 , H04N9/3173
摘要： Briefly, in accordance with one or more embodiments, a rotating scanning platform comprises a rotating body and two or more suspension flexures to support the rotating body at a first end of respective suspension flexures, wherein the suspension flexures have a length that is greater than a radius of the rotating body, and the suspension flexures are disposed at an offset from a center of rotation of the rotating body. The suspension flexures are fixed, respectively, to a substrate at a second end at a location that is closer to the center of rotation than to the first end of a respective suspension flexure to allow the rotating body to rotate about the center of rotation with generally linear rotation in response to a drive signal.
摘要翻译：简而言之，根据一个或多个实施例，旋转扫描平台包括旋转体和两个或更多个悬架挠曲件，以在相应悬架挠曲件的第一端处支撑旋转体，其中悬架弯曲部的长度大于旋转体的半径和悬架弯曲部设置在与旋转体的旋转中心偏移的位置。悬架弯曲部分别在第二端处固定到位于相对于相应悬架挠曲件的第一端更靠近旋转中心的位置处的基板，以允许旋转体围绕旋转中心旋转，大体上响应于驱动信号的线性旋转。

2. 发明申请

US20130194555A1 Piezoelectric Actuated Device, Method and System 有权
标题翻译：压电驱动装置，方法和系统
公开(公告)号：US20130194555A1
公开(公告)日：2013-08-01
申请号：US13360243
申请日：2012-01-27
申请人： Wyatt O. Davis , Utku Baran , Dean R. Brown , Hakan Urey
发明人： Wyatt O. Davis , Utku Baran , Dean R. Brown , Hakan Urey
IPC分类号： G03B21/28 , H01L41/22 , H01L41/04
CPC分类号： H01L41/047 , G02B26/0858 , G02B26/105 , H01L41/08 , H01L41/33
摘要： A piezoelectric actuated device includes one or more areas of piezoelectric material coupled to a substrate. The piezoelectric material may be placed on regions of the substrate that exhibit the greatest curvature and stress when the device is vibrating according to a desired structural Eigenmode of vibration. The piezoelectric material may have a non-uniform density.
摘要翻译：压电致动器件包括耦合到衬底的压电材料的一个或多个区域。当器件根据期望的结构振动特征模式振动时，压电材料可以放置在基板的表现出最大曲率和应力的区域上。压电材料可能具有不均匀的密度。

3. 发明授权

US09105834B2 Piezoelectric actuated device, method and system 有权
标题翻译：压电致动装置，方法和系统
公开(公告)号：US09105834B2
公开(公告)日：2015-08-11
申请号：US13360243
申请日：2012-01-27
申请人： Wyatt O. Davis , Utku Baran , Dean R. Brown , Hakan Urey
发明人： Wyatt O. Davis , Utku Baran , Dean R. Brown , Hakan Urey
IPC分类号： G02B26/08 , G02B26/10 , G02B26/12 , H01L41/00 , H02N2/00 , H01L41/047 , H01L41/08 , H01L41/33
CPC分类号： H01L41/047 , G02B26/0858 , G02B26/105 , H01L41/08 , H01L41/33
摘要： A piezoelectric actuated device includes one or more areas of piezoelectric material coupled to a substrate. The piezoelectric material may be placed on regions of the substrate that exhibit the greatest curvature and stress when the device is vibrating according to a desired structural Eigenmode of vibration. The piezoelectric material may have a non-uniform density.
摘要翻译：压电致动器件包括耦合到衬底的压电材料的一个或多个区域。当器件根据期望的结构振动特征模式振动时，压电材料可以放置在基板的表现出最大曲率和应力的区域上。压电材料可能具有不均匀的密度。

4. 发明申请

US20080266628A1 MEMS device having a drive coil with curved segments 有权
标题翻译：具有具有弯曲段的驱动线圈的MEMS装置
公开(公告)号：US20080266628A1
公开(公告)日：2008-10-30
申请号：US11796277
申请日：2007-04-26
申请人： Dean R. Brown , Wyatt O. Davis , Jason B. Tauscher
发明人： Dean R. Brown , Wyatt O. Davis , Jason B. Tauscher
IPC分类号： G02B26/08
CPC分类号： G02B7/1821 , G02B26/085
摘要： Briefly, in accordance with one or more embodiments, a coil for a MEMS device, and/or a structure on which the coil is disposed, may have one or more linear segments and one or more non-linear segments. One or more of the non-linear segments may be curved to increase a responsiveness of the coil to the magnetic field in which the coil is operating to provide an increased torque on the rotation of the mirror of the MEMS device in response to a drive signal applied to the coil in the presence of the magnetic field. The non-linear coil may have other shapes and may be any arbitrary shape.
摘要翻译：简而言之，根据一个或多个实施例，用于MEMS器件的线圈和/或其上设置有线圈的结构可以具有一个或多个线性段和一个或多个非线性段。非线性段中的一个或多个可以是弯曲的，以增加线圈对磁场的响应性，其中线圈正在运行，以响应于驱动信号在MEMS装置的反射镜的旋转上提供增加的转矩在存在磁场的情况下施加到线圈。非线性线圈可以具有其他形状并且可以是任何任意形状。

5. 发明申请

US20140313558A1 MEMS Device with Asymmetric Flexures 审中-公开
标题翻译：具有不对称挠度的MEMS器件
公开(公告)号：US20140313558A1
公开(公告)日：2014-10-23
申请号：US13866343
申请日：2013-04-19
申请人： Wyatt O. Davis , Jason B. Tauscher , Dean R. Brown
发明人： Wyatt O. Davis , Jason B. Tauscher , Dean R. Brown
IPC分类号： G02B26/10
CPC分类号： G02B26/0833 , B81B3/0078 , B81B2201/042 , G02B27/0101 , G02B27/0172
摘要： A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.
摘要翻译：微机电系统（MEMS）装置包括通过形成枢转轴线的两个挠曲件从固定平台悬挂的扫描平台。两个弯曲部可以围绕扫描平台的中心线对称或不对称。至少一个弯曲部包括彼此不平行的两个部分。第二挠曲可以包括具有一个部分比另一个部分宽的两个部分。当MEMS装置作为组件的一部分安装时，挠曲设计减少了安装和热应力的影响。

6. 发明授权

US08218218B2 Fatigue resistant MEMS apparatus and system 有权
标题翻译：耐疲劳MEMS仪器和系统
公开(公告)号：US08218218B2
公开(公告)日：2012-07-10
申请号：US12420426
申请日：2009-04-08
申请人： Jason B. Tauscher , Matthew Ellis , Dean R. Brown , Mark P. Helsel , Wyatt O. Davis , Yunfei Ma , Michael E. Sherwood , John Wyatt Coy , David Malametz
发明人： Jason B. Tauscher , Matthew Ellis , Dean R. Brown , Mark P. Helsel , Wyatt O. Davis , Yunfei Ma , Michael E. Sherwood , John Wyatt Coy , David Malametz
IPC分类号： G02B26/08
CPC分类号： G02B26/101 , G02B26/085 , H04M1/0272 , H04M1/7253
摘要： A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.
摘要翻译：微机电系统（MEMS）包括具有改进的可靠性的导体。导体在MEMS装置中与移动构件弯曲，并且通过提供增加的抗疲劳性，减小的裂纹扩展的材料选择和/或在给定应变水平下改善活体的机制来实现改进的可靠性。导体可以包括单一材料，或者可以包括不同材料的层。

7. 发明申请

US20110026549A1 Electromagnetic Scanner Having Variable Coil Width 有权
标题翻译：具有可变线圈宽度的电磁扫描仪
公开(公告)号：US20110026549A1
公开(公告)日：2011-02-03
申请号：US12512261
申请日：2009-07-30
申请人： Jason B. Tauscher , Dean R. Brown , Matthew Ellis , Wyatt O. Davis , Mark P. Helsel
发明人： Jason B. Tauscher , Dean R. Brown , Matthew Ellis , Wyatt O. Davis , Mark P. Helsel
IPC分类号： H01S3/10
CPC分类号： G06K7/10633 , G06K7/10653
摘要： Briefly, in accordance with one or more embodiments, a scanner for a scanned beam display may comprise a scanning platform having a mirror disposed thereon to reflect a beam of light impinging on the mirror, a drive coil disposed on the scanning platform to scan the reflected beam of light in response to a drive current applied to the drive coil. The drive coil has coil winding segments having a narrower width in one or more regions of the drive coil, and has coil winding segments having a greater width in one or more other regions of the drive coil to provide a the drive coil with a reduced electrical resistance.
摘要翻译：简而言之，根据一个或多个实施例，用于扫描光束显示器的扫描器可以包括扫描平台，其具有设置在其上的反射镜以反射入射在反射镜上的光束，设置在扫描平台上的驱动线圈以扫描反射的光束响应于施加到驱动线圈的驱动电流。驱动线圈具有在驱动线圈的一个或多个区域中具有较窄宽度的线圈绕组段，并且具有在驱动线圈的一个或多个其它区域中具有较大宽度的线圈绕组段，从而为驱动线圈提供减小的电抵抗性。

8. 发明授权

US07515329B2 Driving a MEMS scanner with a combined actuator drive signal 有权
标题翻译：驱动具有组合执行器驱动信号的MEMS扫描仪
公开(公告)号：US07515329B2
公开(公告)日：2009-04-07
申请号：US11975543
申请日：2007-10-19
申请人： Randall B. Sprague , Jun Yan , Jason B. Tauscher , Wyatt O. Davis , John R. Lewis , Dean R. Brown , Thomas W. Montague , Chancellor W. Brown
发明人： Randall B. Sprague , Jun Yan , Jason B. Tauscher , Wyatt O. Davis , John R. Lewis , Dean R. Brown , Thomas W. Montague , Chancellor W. Brown
IPC分类号： G02B26/00
CPC分类号： G02B26/0858 , G02B26/085 , G02B26/101
摘要： A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.
摘要翻译：诸如MEMS扫描仪的MEMS振荡器具有改进和简化的驱动方案和结构。驱动脉冲可以通过支撑臂通过扭矩传递到振动体。对于多轴振荡器，两个或多个轴的驱动信号可能由驱动电路叠加并传输到MEMS振荡器。振荡器根据其在该轴上的共振频率在每个轴上进行响应。振荡器可以在一些或所有轴上共振地驱动。改进的载荷分布导致变形减少。简化的结构使用单个移动体提供多轴振动。另一结构直接驱动多个移动体。另一种结构消除了来自一个或多个移动体的致动器，这些主体由其支撑臂驱动。

9. 发明申请

US20080266630A1 Suspension for maintaining mirror flatness of a MEMS device in a scanner systenm or the like 有权
标题翻译：用于维持扫描器系统等中的MEMS器件的镜面平坦度的悬架
公开(公告)号：US20080266630A1
公开(公告)日：2008-10-30
申请号：US11796533
申请日：2007-04-26
申请人： Dean R. Brown , Wyatt O. Davis , Jason B. Tauscher , David R. Bowman
发明人： Dean R. Brown , Wyatt O. Davis , Jason B. Tauscher , David R. Bowman
IPC分类号： G02B7/192 , G02B26/10
CPC分类号： G02B26/085
摘要： Briefly, in accordance with one or more embodiments, a MEMS device may comprise a coil frame having a drive coil disposed thereon and being supported by one or more suspension arms disposed along an axis of the coil frame, and a mirror platform having a mirror disposed thereon. The mirror platform may be coupled to the coil frame at connection points generally disposed along the axis in order to reduce deflection of the mirror platform to reduce stress on the mirror in order to maintain the relative flatness of the mirror surface. Furthermore, the mirror platform may include flexible members disposed near an edge of the mirror platform generally along the axis to isolate the mirror platform and the mirror from warping of the coil frame and twist of the suspension arms to further maintain the relative flatness of the mirror.
摘要翻译：简而言之，根据一个或多个实施例，MEMS装置可以包括线圈框架，其具有设置在其上的驱动线圈并且由沿着线圈框架的轴线设置的一个或多个悬架臂支撑，以及具有布置的反射镜平台上。镜平台可以在通常沿着轴线设置的连接点处耦合到线圈框架，以便减少镜台的偏转，以减小反射镜上的应力，以便保持镜面的相对平坦度。此外，反射镜平台可以包括大致沿着轴线设置在反射镜平台的边缘附近的柔性部件，以隔离反射镜平台和反射镜以避免线圈框架翘曲和悬挂臂的扭转，以进一步保持镜子的相对平坦度。

10. 发明授权

US07442918B2 MEMS device having simplified drive 有权
标题翻译：具有简化驱动的MEMS器件
公开(公告)号：US07442918B2
公开(公告)日：2008-10-28
申请号：US10984327
申请日：2004-11-09
申请人： Randall B. Sprague , Jun Yan , Jason B. Tauscher , Wyatt O. Davis , John R. Lewis , Dean R. Brown , Thomas W. Montague , Chancellor W. Brown
发明人： Randall B. Sprague , Jun Yan , Jason B. Tauscher , Wyatt O. Davis , John R. Lewis , Dean R. Brown , Thomas W. Montague , Chancellor W. Brown
IPC分类号： H01J3/14 , G02B26/08 , G02B7/182
CPC分类号： G02B26/0858 , G02B26/085 , G02B26/101
摘要： A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.
摘要翻译：诸如MEMS扫描仪的MEMS振荡器具有改进和简化的驱动方案和结构。驱动脉冲可以通过支撑臂通过扭矩传递到振动体。对于多轴振荡器，两个或多个轴的驱动信号可能由驱动电路叠加并传输到MEMS振荡器。振荡器根据其在该轴上的共振频率在每个轴上进行响应。振荡器可以在一些或所有轴上共振地驱动。改进的载荷分布导致变形减少。简化的结构使用单个移动体提供多轴振动。另一结构直接驱动多个移动体。另一种结构消除了来自一个或多个移动体的致动器，这些主体由其支撑臂驱动。

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