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    • 2. 发明申请
    • Microelectromechanical system actuator
    • 微机电系统执行器
    • US20060131997A1
    • 2006-06-22
    • US11157745
    • 2005-06-21
    • Ki KimSang KimHye KimDoo Cho
    • Ki KimSang KimHye KimDoo Cho
    • H01L41/08
    • H01H1/0036H01H57/00H01H59/0009H01H2057/006
    • Provided is a microelectromechanical system (MEMS) actuator in which a cantilever piezoelectric actuator and a comb actuator are combined to perform dual shaft drive. The MEMS includes: a stationary comb fixed on a substrate; a movable comb disposed separately from the substrate; and a spring connected to the movable comb and the substrate to resiliently support the movable comb, wherein the movable comb includes a piezoelectric material layer in a laminated manner to be perpendicularly moved by a piezoelectric phenomenon and laterally moved by an electrostatic force to the stationary comb, whereby the MEMS actuator can be used in a driving apparatus of an ultra-slim optical disk drive since the movable comb is made of a piezoelectric material to simultaneously perform focusing actuation to a Z-axis as well as planar actuation.
    • 提供了一种微机电系统(MEMS)致动器,其中组合悬臂式压电致动器和梳状致动器以执行双轴驱动。 MEMS包括:固定在基板上的固定梳; 与所述基板分开设置的可动梳子; 以及连接到可动梳子和基板以弹性地支撑可动梳子的弹簧,其中可动梳子包括层压的压电材料层,以通过压电现象垂直移动并且通过静电力横向移动到固定梳子 ,由此可以将MEMS致动器用于超薄光盘驱动器的驱动装置中,因为可移动梳由压电材料制成以同时对Z轴进行聚焦致动以及平面致动。