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1. 发明授权

US09041103B2 RESURF semiconductor device charge balancing 有权
标题翻译： RESURF半导体器件电荷平衡
公开(公告)号：US09041103B2
公开(公告)日：2015-05-26
申请号：US13781722
申请日：2013-02-28
申请人： Won Gi Min , Zhihong Zhang , Hongzhong Xu , Jiang-Kai Zuo
发明人： Won Gi Min , Zhihong Zhang , Hongzhong Xu , Jiang-Kai Zuo
IPC分类号： H01L29/772 , H01L29/78 , H01L29/06 , H01L29/08 , H01L29/10
CPC分类号： H01L29/7823 , H01L29/063 , H01L29/0634 , H01L29/0653 , H01L29/0692 , H01L29/0847 , H01L29/0882 , H01L29/1083 , H01L29/1087 , H01L29/1095 , H01L29/7816 , H01L29/7835 , H01L2924/0002 , H01L2924/00
摘要： Breakdown voltage BVdss is enhanced and ON-resistance reduced in RESURF devices, e.g., LDMOS transistors, by careful charge balancing, even when body and drift region charge balance is not ideal, by: (i) providing a plug or sinker near the drain and of the same conductivity type extending through the drift region at least into the underlying body region, and/or (ii) applying bias Viso to a surrounding lateral doped isolation wall coupled to the device buried layer, and/or (iii) providing a variable resistance bridge between the isolation wall and the drift region. The bridge may be a FET whose source-drain couple the isolation wall and drift region and whose gate receives control voltage Vc, or a resistor whose cross-section (X, Y, Z) affects its resistance and pinch-off, to set the percentage of drain voltage coupled to the buried layer via the isolation wall.
摘要翻译：即使在身体和漂移区域电荷平衡不理想的情况下，即使在（i）在漏极附近提供插头或沉降片，即使通过仔细的电荷平衡，RESURF器件（例如LDMOS晶体管）中的击穿电压BVdss也能够降低导通电阻，和/或（ii）将偏置Viso施加到耦合到器件掩埋层的周围横向掺杂隔离壁，和/或（iii）提供可变的隔离墙和漂移区之间的电阻桥。该桥可以是FET，其漏极耦合隔离壁和漂移区，并且其栅极接收控制电压Vc，或者其截面（X，Y，Z）影响其电阻和夹断的电阻器，以设置通过隔离壁耦合到掩埋层的漏极电压的百分比。

2. 发明授权

US08389366B2 Resurf semiconductor device charge balancing 有权
标题翻译： Resurf半导体器件电荷平衡
公开(公告)号：US08389366B2
公开(公告)日：2013-03-05
申请号：US12129840
申请日：2008-05-30
申请人： Won Gi Min , Hongzhong Xu , Zhihong Zhang , Jiang-Kai Zuo
发明人： Won Gi Min , Hongzhong Xu , Zhihong Zhang , Jiang-Kai Zuo
IPC分类号： H01L29/772
CPC分类号： H01L29/7823 , H01L29/063 , H01L29/0634 , H01L29/0653 , H01L29/0692 , H01L29/0847 , H01L29/0882 , H01L29/1083 , H01L29/1087 , H01L29/1095 , H01L29/7816 , H01L29/7835 , H01L2924/0002 , H01L2924/00
摘要： Breakdown voltage BVdss is enhanced and ON-resistance reduced in RESURF devices (40, 60, 80, 80′, 80″), e.g., LDMOS transistors, by careful charge balancing, even when body (44, 44′, 84, 84′) and drift (50, 50′, 90, 90′) region charge balance is not ideal, by: (i) providing a plug or sinker (57) near the drain (52, 92) and of the same conductivity type extending through the drift region (50, 50′, 90, 90′) at least into the underlying body region (44, 44′ 84, 84′), and/or (ii) applying bias Viso to a surrounding lateral doped isolation wall (102) coupled to the device buried layer (42, 82), and/or (iii) providing a variable resistance bridge (104) between the isolation wall (102) and the drift region (50, 50′, 90, 90′). The bridge (104) may be a FET (110) whose source-drain (113, 114) couple the isolation wall (102) and drift region (50, 50′, 90, 90′) and whose gate (116) receives control voltage Vc, or a resistor (120) whose cross-section (X, Y, Z) affects its resistance and pinch-off, to set the percentage of drain voltage coupled to the buried layer (42, 82) via the isolation wall (102).
摘要翻译：即使当主体（44,44'，84,84“），RESURF装置（40,60,80,80'，80”），例如LDMOS晶体管也通过小心的电荷平衡来增强击穿电压BVdss并导通电阻，）和漂移（50,50'，90,90'）区域电荷平衡不是理想的，通过：（i）在漏极（52,92）附近提供插塞或沉降片（57），并且延伸通过相同的导电类型至少进入下面的主体区域（44,44'，84,84'）中的漂移区域（50,50'，90,90'），和/或（ii）将偏置Viso施加到周围的侧向掺杂隔离壁（102 ）和/或（iii）在所述隔离壁（102）和所述漂移区域（50,50'，90,90'）之间提供可变电阻桥（104）。桥（104）可以是源极漏极（113,114）耦合隔离壁（102）和漂移区（50,50'，90,90'）并且其栅极（116）接收控制电压Vc或其横截面（X，Y，Z）影响其电阻和夹断的电阻器（120），以经由隔离壁（42,82）设置耦合到埋层（42,82）的漏极电压的百分比 102）。

3. 发明申请

US20090294849A1 RESURF SEMICONDUCTOR DEVICE CHARGE BALANCING 有权
标题翻译： RESURF半导体器件充电平衡
公开(公告)号：US20090294849A1
公开(公告)日：2009-12-03
申请号：US12129840
申请日：2008-05-30
申请人： Won Gi Min , Zhihong Zhang , Hongzhong Xu , Jiang-Kai Zuo
发明人： Won Gi Min , Zhihong Zhang , Hongzhong Xu , Jiang-Kai Zuo
IPC分类号： H01L29/78 , H01L23/58
CPC分类号： H01L29/7823 , H01L29/063 , H01L29/0634 , H01L29/0653 , H01L29/0692 , H01L29/0847 , H01L29/0882 , H01L29/1083 , H01L29/1087 , H01L29/1095 , H01L29/7816 , H01L29/7835 , H01L2924/0002 , H01L2924/00
摘要： Breakdown voltage BVdss is enhanced and ON-resistance reduced in RESURF devices (40, 60, 80, 80′, 80″), e.g., LDMOS transistors, by careful charge balancing, even when body (44, 44′, 84, 84′) and drift (50, 50′, 90, 90′) region charge balance is not ideal, by: (i) providing a plug or sinker (57) near the drain (52, 92) and of the same conductivity type extending through the drift region (50, 50′, 90, 90′) at least into the underlying body region (44, 44′ 84, 84′), and/or (ii) applying bias Viso to a surrounding lateral doped isolation wall (102) coupled to the device buried layer (42, 82), and/or (iii) providing a variable resistance bridge (104) between the isolation wall (102) and the drift region (50, 50′, 90, 90′). The bridge (104) may be a FET (110) whose source-drain (113, 114) couple the isolation wall (102) and drift region (50, 50′, 90, 90′) and whose gate (116) receives control voltage Vc, or a resistor (120) whose cross-section (X, Y, Z) affects its resistance and pinch-off, to set the percentage of drain voltage coupled to the buried layer (42, 82) via the isolation wall (102).
摘要翻译：即使在主体（44,44'，84,84）中，分解电压BVdss被增强，并且RESURF器件（40,60,80,80'，80“）中的导通电阻降低，例如LDMOS晶体管 '）和漂移（50,50'，90,90'）区域电荷平衡不是理想的，通过：（i）在漏极（52,92）附近提供插塞或沉降片（57），并且具有相同的导电类型延伸至少穿过所述漂移区域（50,50'，90,90'）到所述下部体区域（44,44'，84,84'）中，和/或（ii）将偏压Viso施加到周围的侧向掺杂隔离壁 102）和/或（iii）在隔离壁（102）和漂移区域（50,50'，90,90'）之间提供可变电阻桥（104）。桥（104）可以是源极漏极（113,114）耦合隔离壁（102）和漂移区（50,50'，90,90'）并且其栅极（116）接收控制电压Vc或其横截面（X，Y，Z）影响其电阻和夹断的电阻器（120），以经由隔离壁（42,82）设置耦合到埋层（42,82）的漏极电压的百分比 102）。

4. 发明授权

US09136323B2 Drain-end drift diminution in semiconductor devices 有权
标题翻译：半导体器件的漏极漂移减少
公开(公告)号：US09136323B2
公开(公告)日：2015-09-15
申请号：US14486104
申请日：2014-09-15
申请人： Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
发明人： Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
IPC分类号： H01L29/06 , H01L29/66 , H01L29/78 , H01L29/08 , H01L29/10
CPC分类号： H01L29/063 , H01L29/0653 , H01L29/0847 , H01L29/1045 , H01L29/66659 , H01L29/66681 , H01L29/7835
摘要： A method of fabricating a transistor includes forming a field isolation region in a substrate. After forming the field isolation region, dopant is implanted in a first region of a substrate for formation of a drift region. A drain region is formed in a second region of the substrate. The first and second regions laterally overlap to define a conduction path for the transistor. The first region does not extend laterally across the second region.
摘要翻译：制造晶体管的方法包括在衬底中形成场隔离区域。在形成场隔离区之后，将掺杂剂注入到用于形成漂移区的衬底的第一区域中。漏极区形成在衬底的第二区域中。第一和第二区域横向重叠以限定晶体管的导电路径。第一区域不横向跨越第二区域延伸。

5. 发明申请

US20150004768A1 DRAIN-END DRIFT DIMINUTION IN SEMICONDUCTOR DEVICES 有权
标题翻译：半导体器件中的引出端DRIFT分解
公开(公告)号：US20150004768A1
公开(公告)日：2015-01-01
申请号：US14486104
申请日：2014-09-15
申请人： Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
发明人： Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
IPC分类号： H01L29/06 , H01L29/66 , H01L29/10
CPC分类号： H01L29/063 , H01L29/0653 , H01L29/0847 , H01L29/1045 , H01L29/66659 , H01L29/66681 , H01L29/7835
摘要： A method of fabricating a transistor includes forming a field isolation region in a substrate. After forming the field isolation region, dopant is implanted in a first region of a substrate for formation of a drift region. A drain region is formed in a second region of the substrate. The first and second regions laterally overlap to define a conduction path for the transistor. The first region does not extend laterally across the second region.
摘要翻译：制造晶体管的方法包括在衬底中形成场隔离区域。在形成场隔离区之后，将掺杂剂注入到用于形成漂移区的衬底的第一区域中。漏极区形成在衬底的第二区域中。第一和第二区域横向重叠以限定晶体管的导电路径。第一区域不横向跨越第二区域延伸。

6. 发明申请

US20130292764A1 Semiconductor Device with Drain-End Drift Diminution 有权
标题翻译：具有排水端漂移的半导体器件
公开(公告)号：US20130292764A1
公开(公告)日：2013-11-07
申请号：US13465761
申请日：2012-05-07
申请人： Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
发明人： Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
IPC分类号： H01L29/78 , H01L21/336
CPC分类号： H01L29/063 , H01L29/0653 , H01L29/0847 , H01L29/1045 , H01L29/66659 , H01L29/66681 , H01L29/7835
摘要： A device includes a semiconductor substrate, source and drain regions in the semiconductor substrate, a channel region in the semiconductor substrate between the source and drain regions through which charge carriers flow during operation from the source region to the drain region, and a drift region in the semiconductor substrate, on which the drain region is disposed, and through which the charge carriers drift under an electric field arising from application of a bias voltage between the source and drain regions. A PN junction along the drift region includes a first section at the drain region and a second section not at the drain region. The drift region has a lateral profile that varies such that the first section of the PN junction is shallower than the second section of the PN junction.
摘要翻译：一种器件包括半导体衬底，半导体衬底中的源极和漏极区域，在源极和漏极区域之间的半导体衬底中的沟道区域，电荷载体在从源极区域到漏极区域的工作期间流过该沟道区域，以及漂移区域其上设置有漏极区的半导体衬底，并且电荷载流子在源极和漏极区域之间施加偏压产生的电场下漂移。沿着漂移区域的PN结包括在漏极区域处的第一部分和不在漏极区域的第二部分。漂移区域具有变化的横向轮廓，使得PN结的第一部分比PN结的第二部分浅。

7. 发明授权

US08853780B2 Semiconductor device with drain-end drift diminution 有权
标题翻译：漏极端漂移的半导体器件减少
公开(公告)号：US08853780B2
公开(公告)日：2014-10-07
申请号：US13465761
申请日：2012-05-07
申请人： Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
发明人： Hongning Yang , Daniel J. Blomberg , Xu Cheng , Xin Lin , Won Gi Min , Zhihong Zhang , Jiang-Kai Zuo
IPC分类号： H01L29/66
CPC分类号： H01L29/063 , H01L29/0653 , H01L29/0847 , H01L29/1045 , H01L29/66659 , H01L29/66681 , H01L29/7835
摘要： A device includes a semiconductor substrate, source and drain regions in the semiconductor substrate, a channel region in the semiconductor substrate between the source and drain regions through which charge carriers flow during operation from the source region to the drain region, and a drift region in the semiconductor substrate, on which the drain region is disposed, and through which the charge carriers drift under an electric field arising from application of a bias voltage between the source and drain regions. A PN junction along the drift region includes a first section at the drain region and a second section not at the drain region. The drift region has a lateral profile that varies such that the first section of the PN junction is shallower than the second section of the PN junction.
摘要翻译：一种器件包括半导体衬底，半导体衬底中的源极和漏极区域，在源极和漏极区域之间的半导体衬底中的沟道区域，电荷载体在从源极区域到漏极区域的工作期间流过该沟道区域，以及漂移区域其上设置有漏极区的半导体衬底，并且电荷载流子在源极和漏极区域之间施加偏压产生的电场下漂移。沿着漂移区域的PN结包括在漏极区域处的第一部分和不在漏极区域的第二部分。漂移区域具有变化的横向轮廓，使得PN结的第一部分比PN结的第二部分浅。

8. 发明授权

US08487398B2 Capacitor device using an isolated well and method therefor 有权
标题翻译：使用隔离井的电容器件及其方法
公开(公告)号：US08487398B2
公开(公告)日：2013-07-16
申请号：US12835900
申请日：2010-07-14
申请人： Hongzhong Xu , Zhihong Zhang , Jiang-Kai Zuo
发明人： Hongzhong Xu , Zhihong Zhang , Jiang-Kai Zuo
IPC分类号： H01L21/70
CPC分类号： H01L29/94 , H01L29/66181
摘要： A semiconductor device includes an isolated p-type well, wherein the isolated p-type well is a first electrode of a capacitor device; a capacitor dielectric on the isolated p-type well; a p-type polysilicon electrode over the capacitor dielectric, wherein the p-type polysilicon electrode is a second electrode of the capacitor device; a first p-type contact region in the isolated p-type well, laterally extending from a first sidewall of the p-type polysilicon electrode; a second p-type contact region in the isolated p-type well, laterally extending from a second sidewall of the p-type polysilicon electrode, opposite the first sidewall of the p-type polysilicon electrode, wherein a portion of the isolated p-type well between the first and second p-type contact regions is under the p-type polysilicon electrode and the capacitor dielectric; and an n-type isolation region surrounding the isolated p-type well. This device may be conveniently coupled to a fringe capacitor.
摘要翻译：半导体器件包括隔离的p型阱，其中隔离的p型阱是电容器器件的第一电极; 隔离p型阱上的电容器电介质; 电容器电介质上的p型多晶硅电极，其中p型多晶硅电极是电容器器件的第二电极; 分离的p型阱中的第一p型接触区，从p型多晶硅电极的第一侧壁横向延伸; 在隔离的p型阱中的第二p型接触区域，从p型多晶硅电极的第二侧壁横向延伸，与p型多晶硅电极的第一侧壁相对，其中一部分隔离的p型第一和第二p型接触区之间的阱在p型多晶硅电极和电容器电介质之下; 以及围绕隔离p型阱的n型隔离区。该装置可以方便地连接到边缘电容器。

9. 发明授权

US09306060B1 Semiconductor devices and related fabrication methods 有权
标题翻译：半导体器件及相关制造方法
公开(公告)号：US09306060B1
公开(公告)日：2016-04-05
申请号：US14548616
申请日：2014-11-20
申请人： Hongning Yang , Daniel J. Blomberg , Xin Lin , Zhihong Zhang , Jiang-Kai Zuo
发明人： Hongning Yang , Daniel J. Blomberg , Xin Lin , Zhihong Zhang , Jiang-Kai Zuo
IPC分类号： H01L29/78 , H01L29/66 , H01L29/06 , H01L29/10 , H01L29/08
CPC分类号： H01L29/7823 , H01L21/26513 , H01L29/0623 , H01L29/0634 , H01L29/0646 , H01L29/0649 , H01L29/0653 , H01L29/0865 , H01L29/0878 , H01L29/0882 , H01L29/0886 , H01L29/1095 , H01L29/402 , H01L29/66689 , H01L29/7835 , H01L29/78624
摘要： Semiconductor device structures and related fabrication methods are provided. An exemplary semiconductor device structure includes a body region of semiconductor material having a first conductivity type, a source region of semiconductor material having a second conductivity type within the body region, a junction isolation region of semiconductor material having the second conductivity type, a drain region of semiconductor material having the second conductivity type, and first and second drift regions of semiconductor material having the second conductivity type. The first drift region resides laterally between the drain region and the junction isolation region, the junction isolation region resides laterally between the first drift region and the second drift region, and the second drift region resides laterally between the body region and the junction isolation region.
摘要翻译：提供半导体器件结构和相关的制造方法。示例性的半导体器件结构包括具有第一导电类型的半导体材料的主体区域，在体区内具有第二导电类型的半导体材料的源极区域，具有第二导电类型的半导体材料的结隔离区域，漏极区域具有第二导电类型的半导体材料以及具有第二导电类型的半导体材料的第一和第二漂移区。第一漂移区域横向地位于漏极区域和结隔离区域之间，结隔离区域横向位于第一漂移区域和第二漂移区域之间，并且第二漂移区域横向居住在体区域和结隔离区域之间。

10. 发明授权

US09070576B2 Semiconductor device and related fabrication methods 有权
标题翻译：半导体器件及相关制造方法
公开(公告)号：US09070576B2
公开(公告)日：2015-06-30
申请号：US13606797
申请日：2012-09-07
申请人： Hongning Yang , Zhihong Zhang , Jiang-Kai Zuo
发明人： Hongning Yang , Zhihong Zhang , Jiang-Kai Zuo
IPC分类号： H01L29/66 , H01L29/08 , H01L29/78 , H01L29/45 , H01L29/49 , H01L29/06 , H01L29/10
CPC分类号： H01L29/0878 , H01L29/0653 , H01L29/1087 , H01L29/1095 , H01L29/456 , H01L29/4933 , H01L29/665 , H01L29/66689 , H01L29/7824
摘要： Semiconductor device structures and related fabrication methods are provided. An exemplary method of fabricating a semiconductor device on a doped region of semiconductor material having a first conductivity type involves forming a first region having a second conductivity type within the doped region, forming a body region having the first conductivity type overlying the first region, and forming a drift region having the second conductivity type within the doped region, wherein at least a portion of the drift region abuts at least a portion of the first region. In one embodiment, the dopant concentration of the first region is less than the dopant concentration of the body region and different from the dopant concentration of the drift region.
摘要翻译：提供半导体器件结构和相关的制造方法。在具有第一导电类型的半导体材料的掺杂区域上制造半导体器件的示例性方法包括在掺杂区域内形成具有第二导电类型的第一区域，形成覆盖第一区域的具有第一导电类型的体区，以及在所述掺杂区域内形成具有所述第二导电类型的漂移区，其中所述漂移区的至少一部分邻接所述第一区的至少一部分。在一个实施例中，第一区域的掺杂剂浓度小于体区的掺杂剂浓度，并且不同于漂移区的掺杂剂浓度。

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