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    • 1. 发明授权
    • Breakdown layer via lateral diffusion
    • 击穿层通过横向扩散
    • US08350661B2
    • 2013-01-08
    • US12471937
    • 2009-05-26
    • Wolodymyr CzubatyjTyler LowreyEdward J. Spall
    • Wolodymyr CzubatyjTyler LowreyEdward J. Spall
    • H01C7/13
    • H01C7/006G11C13/0004H01C17/08H01L45/06H01L45/12H01L45/1246H01L45/143H01L45/144H01L45/148H01L45/1658H01L45/1683Y10T29/49082
    • An electronic device including a breakdown layer having variable thickness. The device includes a variable resistance material positioned between two electrodes. A breakdown layer is interposed between the variable resistance material and one of the electrodes. The breakdown layer has a non-uniform thickness, which serves to bias the breakdown event toward the thinner portions of the breakdown layer. As a result, the placement, size, and number of ruptures in the breakdown layer are more consistent over a series or array of devices. The variable resistance material may be a phase-change material. The variable-thickness breakdown layer may be formed through a diffusion process by introducing a gas containing a resistivity-enhancing species to the environment of segmented variable resistance devices during fabrication. The resistivity-enhancing element penetrates the outer perimeter of the variable resistance material and diffuses toward the interior of the device. The resistivity-enhancing species increases the resistance of the interface between the variable resistance material and the electrode by interacting with the variable resistance material and/or electrode to form a resistive interfacial material. Based on the diffusional nature of the process, the concentration of the resistivity-enhancing species decreases toward the center of the device and as a result, the breakdown layer is thinner toward the center of the device.
    • 一种包括具有可变厚度的击穿层的电子装置。 该装置包括位于两个电极之间的可变电阻材料。 在可变电阻材料和其中一个电极之间夹有击穿层。 击穿层具有不均匀的厚度,其用于将击穿事件偏向击穿层的较薄部分。 因此,击穿层中的断裂位置,尺寸和数量在一系列或多个器件中更为一致。 可变电阻材料可以是相变材料。 可变厚度击穿层可以通过扩散工艺形成,通过在制造过程中将含有电阻率增强物质的气体引入分段可变电阻器件的环境中。 电阻率增强元件穿透可变电阻材料的外周,并向器件的内部扩散。 电阻率增强物质通过与可变电阻材料和/或电极相互作用来增加可变电阻材料和电极之间的界面的电阻,以形成电阻界面材料。 基于该工艺的扩散性质,电阻率增强物质的浓度朝向器件的中心减小,结果,击穿层朝向器件的中心较薄。
    • 2. 发明申请
    • Breakdown Layer via Lateral Diffusion
    • 通过侧向扩散分解层
    • US20100301988A1
    • 2010-12-02
    • US12471937
    • 2009-05-26
    • Wolodymyr CzubatyjTyler LowreyEdward J. Spall
    • Wolodymyr CzubatyjTyler LowreyEdward J. Spall
    • H01C7/00H01C17/00
    • H01C7/006G11C13/0004H01C17/08H01L45/06H01L45/12H01L45/1246H01L45/143H01L45/144H01L45/148H01L45/1658H01L45/1683Y10T29/49082
    • An electronic device including a breakdown layer having variable thickness. The device includes a variable resistance material positioned between two electrodes. A breakdown layer is interposed between the variable resistance material and one of the electrodes. The breakdown layer has a non-uniform thickness, which serves to bias the breakdown event toward the thinner portions of the breakdown layer. As a result, the placement, size, and number of ruptures in the breakdown layer are more consistent over a series or array of devices. The variable resistance material may be a phase-change material. The variable-thickness breakdown layer may be formed through a diffusion process by introducing a gas containing a resistivity-enhancing species to the environment of segmented variable resistance devices during fabrication. The resistivity-enhancing element penetrates the outer perimeter of the variable resistance material and diffuses toward the interior of the device. The resistivity-enhancing species increases the resistance of the interface between the variable resistance material and the electrode by interacting with the variable resistance material and/or electrode to form a resistive interfacial material. Based on the diffusional nature of the process, the concentration of the resistivity-enhancing species decreases toward the center of the device and as a result, the breakdown layer is thinner toward the center of the device.
    • 一种包括具有可变厚度的击穿层的电子装置。 该装置包括位于两个电极之间的可变电阻材料。 在可变电阻材料和其中一个电极之间夹有击穿层。 击穿层具有不均匀的厚度,其用于将击穿事件偏向击穿层的较薄部分。 因此,击穿层中的断裂位置,尺寸和数量在一系列或多个器件中更为一致。 可变电阻材料可以是相变材料。 可变厚度击穿层可以通过扩散工艺形成,通过在制造过程中将含有电阻率增强物质的气体引入分段可变电阻器件的环境中。 电阻率增强元件穿透可变电阻材料的外周,并向器件的内部扩散。 电阻率增强物质通过与可变电阻材料和/或电极相互作用来增加可变电阻材料和电极之间的界面的电阻,以形成电阻界面材料。 基于该工艺的扩散性质,电阻率增强物质的浓度朝向器件的中心减小,结果,击穿层朝向器件的中心较薄。