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    • 6. 发明授权
    • Programmable connector/isolator and double polysilicon layer CMOS process with buried contact using the same
    • 可编程连接器/隔离器和双层多晶硅层CMOS工艺与埋地接触使用相同
    • US06893916B2
    • 2005-05-17
    • US10619981
    • 2003-07-14
    • James P. BaukusLap-Wai ChowWilliam M. Clark, Jr.
    • James P. BaukusLap-Wai ChowWilliam M. Clark, Jr.
    • H01L21/768H01L27/02H01L21/8242H01L21/336H01L21/00
    • H01L27/02H01L21/76895H01L23/573H01L27/0203
    • An integrated circuit structure for MOS-type devices including a silicon substrate of a first conductivity type; a first gate insulating regions selectively placed over the silicon substrate of the first conductivity tape; a first polycrystalline silicon layer selectively placed over the silicon substrate of the first conductivity type; a second gate insulating regions selectively placed over the first gate insulating regions and the first polycrystalline silicon layer; a second polycrystalline silicon layer selectively placed over the second gate insulating regions; first buried silicon regions of a second conductivity type, buried within the silicon substrate of the first conductivity type, placed under the first polycrystalline silicon layer and in contact therewith; and second buried silicon regions of the second conductivity type, buried within the silicon substrate of the first conductivity type, placed under the second gate insulating regions, under the second polycrystalline silicon layer and insulated therefrom.
    • 一种用于包括第一导电类型的硅衬底的MOS器件的集成电路结构; 选择性地放置在第一导电带的硅衬底上的第一栅绝缘区; 选择性地放置在第一导电类型的硅衬底上的第一多晶硅层; 选择性地放置在所述第一栅极绝缘区域和所述第一多晶硅层上的第二栅极绝缘区域; 选择性地放置在所述第二栅极绝缘区域上的第二多晶硅层; 埋在第一导电类型的硅衬底内的第二导电类型的第一掩埋硅区域放置在第一多晶硅层下方并与其接触; 以及第二导电类型的第二掩埋硅区域,埋在第一导电类型的硅衬底内,放置在第二栅极绝缘区域的下面,在第二多晶硅层下方并与其绝缘。