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    • 2. 发明授权
    • Optical switch having an analog beam for steering light
    • 具有用于转向灯的模拟光束的光开关
    • US5661591A
    • 1997-08-26
    • US537179
    • 1995-09-29
    • Tsen-Hwang LinPhilip A. CongdonGregory A. MagelJames M. FlorenceRobert Mark Boysel
    • Tsen-Hwang LinPhilip A. CongdonGregory A. MagelJames M. FlorenceRobert Mark Boysel
    • B81B3/00G02B7/18G02B7/198G02B26/08G02B26/00
    • G02B26/0841B81B3/0062
    • A spatial light modulator (40,70,80,90,130) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) and which may be hexagonal (92, 132) is supported by a torsion hinge (44,86,94) ends along a torsion axis. A plurality of flexure hinges (48,82,106) are provided to support the ends of the mirror (42,72,92,132) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60,96,98). The hexagonal mirrors (92,132) allow a tightly packed mirror array, and have a closely circular surface area so as to efficiently reflect a light beam of circular cross section, such as a light beam from fiber optics.
    • 空间光调制器(40,70,80,90,130),可在模拟模式下操作,用于光束转向或扫描应用。 可挠曲镜(42,72)可由六角形(92,132)由扭转铰链(44,86,94)支撑,沿着扭转轴端部。 提供多个弯曲铰链(48,82,106)以支撑反射镜(42,42,92,132)的端部并提供恢复力。 扭转铰链和弯曲铰链的组合实现了可在大范围的地址电压下在线性范围内操作的可偏转像素。 当没有施加地址电压时,挠曲铰链也保持平坦的未偏转状态,并且防止像素塌陷。 像素可以被加强,例如围绕其周边(74),以确保镜子的平整度,并防止翘曲,即使在镜子的极度偏转期间。 通过向下面的寻址电极施加寻址电压,静电偏转像素(60,96,98)。 六边形反射镜(92,132)允许紧密堆积的反射镜阵列,并且具有紧密圆形的表面积,以便有效地反射圆形横截面的光束,例如来自光纤的光束。
    • 5. 发明授权
    • Field emission array (FEA) addressed deformable light valve modulator
    • 场发射阵列(FEA)寻址可变形光阀调制器
    • US06346776B1
    • 2002-02-12
    • US09612909
    • 2000-07-10
    • William P. RobinsonRobert Mark Boysel
    • William P. RobinsonRobert Mark Boysel
    • G09G310
    • G09G3/22G02B26/0825G09G3/3433
    • A compact, high resolution, bright and long life modulator for projection displays, mates a field emission array (FEA) with a deformable light valve modulator (DLVM) of reflective operation in a thin vacuum package. The DLVM includes a continuous film mirror layer formed on or between one or more deformable layers on a transparent substrate. The field emitters (at least one per pixel) are driven to deliver primary electrons that strike and deposit a charge that produces electrostatic forces that locally deform the continuous film mirror layer. Because the mirror layer is a continuous film, i.e. not pixelated, the modulator resolution is limited only by the addressing resolution of the FEA. Mating the FEA and DLVM technologies also reduces the drive voltage requirements associated with typical FEA driven phosphor displays and scanned beam DLVMs thus improving their performance and extending the lifetime of each.
    • 用于投影显示器的紧凑,高分辨率,明亮和长寿命的调制器与具有在薄真空封装中反射操作的可变形光阀调制器(DLVM)配合的场发射阵列(FEA)。 DLVM包括在透明衬底上形成在一个或多个可变形层之间或之上的连续膜镜层。 驱动场发射器(每像素至少一个),以传送一次电子,该电子撞击并沉积产生使连续膜镜层局部变形的静电力的电荷。 由于镜层是连续的膜,即不是像素化的,所以调制器分辨率仅受FEA的寻址分辨率的限制。 配合FEA和DLVM技术还可降低与典型的FEA驱动的荧光体显示器和扫描束DLVM相关的驱​​动电压要求,从而提高其性能并延长其寿命。