会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明授权
    • Polyamide containing the hexafluoroisopropylidene group
    • 含有六氟异亚丙基的聚酰胺
    • US5077378A
    • 1991-12-31
    • US526583
    • 1990-05-21
    • Werner H. MuellerDinesh N. KhannaBernd Hupfer
    • Werner H. MuellerDinesh N. KhannaBernd Hupfer
    • C08G69/26C08G69/32G03F7/023
    • G03F7/0233C08G69/26C08G69/32
    • This invention is that of high temperature polyamides containing the hexafluoroisopropylidene group. The high temperature polyamides of the invention and photo or radiation sensitizers provide improved high temperature positive resists which can be developed in aqueous alkaline developer and thermally anneal to form heat resistant, polyoxazole relief structures suitable for use in microelectronic and printing applications. The positive photoresists of the invention have improved solubility in coating solvents and improved photospeed. The polyamides of the invention can be prepared by conventional condensation reactions; e.g. the condensation of a diamine and diacid chloride. In addition the polyamides of this invention provide high temperature protective coatings with superior adhesion properties in applications other than the photoresist area.
    • 本发明是含有六氟异亚丙基的高温聚酰胺。 本发明的高温聚酰胺和光或辐射敏化剂提供改进的高温正性抗蚀剂,其可以在含水碱性显影剂中显影并热退火以形成适用于微电子和印刷应用的耐热的聚恶唑消除结构。 本发明的正性光致抗蚀剂具有改进的涂料溶剂溶度和改进的感光速度。 本发明的聚酰胺可以通过常规的缩合反应制备; 例如 二胺和二酰氯的缩合。 此外,本发明的聚酰胺提供了除光刻胶区域之外的应用中具有优异粘合性能的高温保护涂层。
    • 4. 发明授权
    • Heat resistant polybenzoxazole from
bis-((aminohydroxyphenyl)hexafluoroisopropyl)diphenyl ether
    • 来自双 - ((氨基羟基苯基)六氟异丙基)二苯基醚的耐热聚苯并恶唑
    • US4939215A
    • 1990-07-03
    • US327761
    • 1989-03-23
    • Werner H. MuellerDinesh N. Khanna
    • Werner H. MuellerDinesh N. Khanna
    • C08G69/26C08G69/32C08G73/22G02F1/1337G03F7/023G03F7/037H01B3/30
    • G02F1/133723C08G69/26C08G69/32C08G73/22G03F7/0233G03F7/037H01B3/303Y10T428/10
    • Heat resistant, shapable, hydroxy and/or alkoxy-substituted polyamides derived from at least one diamine selected from unsubstituted and substituted 4,4'-bis[2-(4-amino-3-hydroxyphenyl)hexafluoroisopropyl)]diphenyl ether 4,4'-bis-[2-(3-amino-4-hydroxyphenyl)hexafluoroisopropyl]diphenyl ether and a dicarboxylic acid or a derivative thereof e.g. its acid halo or ester. The polyamides of the invention may be thermally cured to form polybenzoxazoles of higher heat resistance which are stable to hydrolytic, chemical and radiation attack.The polyamides of the invention may be formed into shaped articles by molding, extrusion and solvent casting processes preferably in the presence of a solvent or diluent and then optionally converted into heat resistant, insoluble polybenzoxazoles. These shaped articles are useful in aircraft, electronic and other commercial applications where heat, chemical and radiation resistance are desired in conjunction with good mechanical and electrical properties.
    • 衍生自至少一种选自未取代的和取代的4,4'-双[2-(4-氨基-3-羟基苯基)六氟异丙基)]二苯基醚4,4'-二胺的二胺的耐热,可成形的羟基和/或烷氧基取代的聚酰胺 ' - 双 - [2-(3-氨基-4-羟基苯基)六氟异丙基]二苯醚和二羧酸或其衍生物例如 其酸卤素或酯。 本发明的聚酰胺可以被热固化以形成对于水解,化学和辐射攻击是稳定的较高耐热性的聚苯并恶唑。 本发明的聚酰胺可以通过模制,挤出和溶剂浇铸方法形成成型制品,优选在溶剂或稀释剂的存在下,然后任选地转化成耐热不溶性聚苯并恶唑。 这些成型制品在飞机,电子和其他商业应用中是有用的,其中需要耐热,耐化学性和耐辐射性以及良好的机械和电学性能。
    • 7. 发明授权
    • Hydroxy polyimides and high temperature positive photoresists therefrom
    • 羟基聚酰亚胺和高温阳性光致抗蚀剂
    • US4927736A
    • 1990-05-22
    • US76098
    • 1987-07-21
    • Werner H. MuellerDinesh N. Khanna
    • Werner H. MuellerDinesh N. Khanna
    • G03C1/72C08G73/10C08L79/08C09D179/08G03F7/023G03F7/038
    • C08G73/1064C08G73/10C08G73/1039C08G73/1067C08G73/1071C08G73/1078G03F7/0233G03F7/0387
    • This invention relates to novel hydroxy polyimides and radiation sensitive compositions prepared therefrom. More particularly the invention relates to positive photoresists useful in the preparation of a thermally stable relief pattern on a substrate e.g. a silicon wafer or aluminum plate. The novel hydroxy polyimides of the invention may also be used to provide thermally stable organic protective films and layers e.g. an insulating and/or a passivating layer in a semi-conductor component.The novel hydroxy polyimides of in this invention can be synthesized by the condensation of a hydroxy-substituted aminophenol and a dianhydride. Radiation sensitive compositions prepared from the novel hydroxy polyimides of the invention can be developed in aqueous base developer or organic solvent developer; preferably aqueous base developer. Also, the base developer dissolution properties of the polyimides can be controlled by incorporating a non-hydroxyl diamine into the polyimide.The polyimides utilized in this invention have good solubility properties in various organic solvents and also have good mechanical, electrical, adhesion and thermal properties. Radiation sensitive compositions made from hydroxy polyimides of this invention provide high-resolution relief images which are thermally stable up to a temperature of approximately 300.degree. C.
    • 本发明涉及由其制备的新的羟基聚酰亚胺和辐射敏感组合物。 更具体地说,本发明涉及可用于在基材上制备热稳定浮雕图案的正性光致抗蚀剂,例如 硅晶片或铝板。 本发明的新型羟基聚酰亚胺也可用于提供热稳定的有机保护膜和层。 半导体部件中的绝缘和/或钝化层。 本发明的新型羟基聚酰亚胺可以通过羟基取代的氨基苯酚和二酐的缩合来合成。 由本发明的新型羟基聚酰亚胺制备的辐射敏感性组合物可以在碱性显影剂或有机溶剂显影剂中显影; 优选碱性显影液。 此外,聚酰亚胺的碱显影剂溶解性能可以通过将非羟基二胺掺入到聚酰亚胺中来控制。 本发明中使用的聚酰亚胺在各种有机溶剂中具有良好的溶解性,并具有良好的机械,电气,粘合性和热性能。 由本发明的羟基聚酰亚胺制成的辐射敏感组合物提供在约300℃的温度下是热稳定的高分辨率浮雕图像。
    • 9. 发明授权
    • Photoresist compositions containing polyamides polybenzoxa from
bis((aminohydroxyphenyl)hexafluoroisopropyl)diphenyl ethers
    • 含有二((氨基羟基苯基)六氟异丙基)二苯基醚的聚酰胺聚苯并恶唑的光致抗蚀剂组合物
    • US5011753A
    • 1991-04-30
    • US476332
    • 1990-02-07
    • Werner H. MuellerDinesh N. Khanna
    • Werner H. MuellerDinesh N. Khanna
    • C08G69/26C08G69/32C08G73/22G02F1/1337G03F7/023G03F7/037H01B3/30
    • H01B3/303C08G69/26C08G69/32C08G73/22G02F1/133723G03F7/0233G03F7/037
    • Heat resistant, shapable, hydroxy and/or alkoxy-substituted polyamides derived from at least one diamine selected from unsubstituted and substituted 4,4'-bis[2-(4-amino-3-hydroxyphenyl)hexafluoroisopropyl)]diphenyl ether 4,4'-bis-[2-(3-amino-4-hydroxyphenyl)hexafluoroisopropyl]diphenyl ether and a dicarboxylic acid or a derivative thereof e.g. its acid halo or ester. The polyamides of the invention may be thermally cured to form polybenzoxazoles of higher heat resistance which are stable to hydrolytic, chemical and radiation attack.The polyamides of the invention may be formed into shaped articles by molding, extrusion and solvent casting processes preferably in the presence of a solvent or diluent and then optionally converted into heat resistant, insoluble polybenzoxazoles. These shaped articles are useful in aircraft, electronic and other commercial applications where heat, chemical and radiation resistance are desired in conjunction with good mechanical and electrical properties.
    • 衍生自至少一种选自未取代的和取代的4,4'-双[2-(4-氨基-3-羟基苯基)六氟异丙基)]二苯基醚4,4'-二胺的二胺的耐热,可成形的羟基和/或烷氧基取代的聚酰胺 ' - 双 - [2-(3-氨基-4-羟基苯基)六氟异丙基]二苯醚和二羧酸或其衍生物例如 其酸卤素或酯。 本发明的聚酰胺可以被热固化以形成对于水解,化学和辐射攻击是稳定的较高耐热性的聚苯并恶唑。 本发明的聚酰胺可以通过模制,挤出和溶剂浇铸方法形成成型制品,优选在溶剂或稀释剂的存在下,然后任选地转化成耐热不溶性聚苯并恶唑。 这些成型制品在飞机,电子和其他商业应用中是有用的,其中需要耐热,耐化学性和耐辐射性以及良好的机械和电学性能。