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    • 7. 发明申请
    • System and method for passing high energy particles through a mask
    • 将高能粒子通过掩模的系统和方法
    • US20050077485A1
    • 2005-04-14
    • US10681541
    • 2003-10-08
    • Chao-Hsiung WangDenny TangWen-Chin LinLi-Shyue Lai
    • Chao-Hsiung WangDenny TangWen-Chin LinLi-Shyue Lai
    • G21G5/00H01L21/027
    • H01J37/3174B82Y10/00B82Y40/00
    • A method and system is disclosed for concentrating high energy particles on a predetermined area on a target semiconductor substrate. A high energy source for generating a predetermined amount of high energy particles, and an electromagnetic radiation source for generating low energy beams are used together. The system also uses a mask set having at least one mask with at least one alignment area and at least one mask target area thereon, the mask target area passing more high energy particles then any other area of the mask. At least one protection shield is incorporated in the system for protecting the alignment area from being exposed to the high energy particles, wherein the mask is aligned with the predetermined target semiconductor substrate by passing the low energy beams through the alignment area, wherein the high energy particles generated by the high energy source pass through the mask target area to land on the predetermined area on the target semiconductor substrate.
    • 公开了一种用于将高能粒子集中在目标半导体衬底上的预定区域上的方法和系统。 用于产生预定量的高能粒子的高能量源和用于产生低能量束的电磁辐射源一起使用。 该系统还使用具有至少一个具有至少一个对准区域和至少一个掩模目标区域的掩模的掩模组,掩模目标区域通过更多的高能粒子,然后通过掩模的任何其它区域。 至少一个保护屏蔽被并入系统中,用于保护对准区域不暴露于高能粒子,其中通过使低能量束通过对准区域,掩模与预定目标半导体衬底对齐,其中高能量 由高能量源产生的粒子通过掩模对象区域落在目标半导体衬底上的预定区域上。
    • 9. 发明授权
    • Magnetoresistive structures and fabrication methods
    • 磁阻结构和制造方法
    • US07443638B2
    • 2008-10-28
    • US10907974
    • 2005-04-22
    • Yu-Jen WangChih-Huang LaiWen-Chin LinDenny TangChao-Hsiung Wang
    • Yu-Jen WangChih-Huang LaiWen-Chin LinDenny TangChao-Hsiung Wang
    • G11B5/39G11B5/33
    • G11B5/3929B82Y10/00G11B2005/3996
    • Disclosed herein is a magnetoresistive structure, for example useful as a spin-valve or GMR stack in a magnetic sensor, and a fabrication method thereof. The magnetoresistive structure uses twisted coupling to induce a perpendicular magnetization alignment between the free layer and the pinned layer. Ferromagnetic layers of the free and pinned layers are exchange-coupled using antiferromagnetic layers having substantially parallel exchange-biasing directions. Thus, embodiments can be realized that have antiferromagnetic layers formed of a same material and/or having a same blocking temperature. At least one of the free and pinned layers further includes a second ferromagnetic layer and an insulating layer, such as a NOL, between the two ferromagnetic layers. The insulating layer causes twisted coupling between the two ferromagnetic layers, rotating the magnetization direction of one 90 degrees relative to the magnetization direction of the other.
    • 这里公开了一种例如在磁传感器中用作自旋阀或GMR堆叠的磁阻结构及其制造方法。 磁阻结构使用扭转耦合来引起自由层和被钉扎层之间的垂直磁化对准。 使用具有基本平行的交换偏压方向的反铁磁层来交换耦合自由和被钉扎层的铁磁层。 因此,可以实现具有由相同材料形成的反铁磁层和/或具有相同阻挡温度的实施例。 自由和被钉扎层中的至少一个还包括在两个铁磁层之间的第二铁磁层和绝缘层,例如NOL。 绝缘层引起两个铁磁层之间的扭转耦合,使相对于另一个的磁化方向旋转90度的磁化方向。
    • 10. 发明授权
    • System and method for passing high energy particles through a mask
    • 将高能粒子通过掩模的系统和方法
    • US07151271B2
    • 2006-12-19
    • US10681541
    • 2003-10-08
    • Chao-Hsiung WangDenny TangWen-Chin LinLi-Shyue Lai
    • Chao-Hsiung WangDenny TangWen-Chin LinLi-Shyue Lai
    • A61N5/00G21G5/00
    • H01J37/3174B82Y10/00B82Y40/00
    • A method and system is disclosed for concentrating high energy particles on a predetermined area on a target semiconductor substrate. A high energy source for generating a predetermined amount of high energy particles, and an electro-magnetic radiation source for generating low energy beams are used together. The system also uses a mask set having at least one mask with at least one alignment area and at least one mask target area thereon, the mask target area passing more high energy particles then any other area of the mask. At least one protection shield is incorporated in the system for protecting the alignment area from being exposed to the high energy particles, wherein the mask is aligned with the predetermined target semiconductor substrate by passing the low energy beams through the alignment area, wherein the high energy particles generated by the high energy source pass through the mask target area to land on the predetermined area on the target semiconductor substrate.
    • 公开了一种用于将高能粒子集中在目标半导体衬底上的预定区域上的方法和系统。 用于产生预定量的高能粒子的高能量源和用于产生低能量束的电磁辐射源一起使用。 该系统还使用具有至少一个具有至少一个对准区域和至少一个掩模目标区域的掩模的掩模组,掩模目标区域通过更多的高能粒子,然后通过掩模的任何其它区域。 至少一个保护屏蔽被并入系统中,用于保护对准区域不暴露于高能粒子,其中通过使低能量束通过对准区域,掩模与预定目标半导体衬底对齐,其中高能量 由高能量源产生的粒子通过掩模对象区域落在目标半导体衬底上的预定区域上。