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1. 发明授权

US07368303B2 Method for temperature control in a rapid thermal processing system 有权
标题翻译：快速热处理系统中的温度控制方法
公开(公告)号：US07368303B2
公开(公告)日：2008-05-06
申请号：US10969475
申请日：2004-10-20
申请人： Wei-Ming You , Shi-Ming Wang , Cheng Wei Chen , Jian-Hua Huang , Yu-Lin Du
发明人： Wei-Ming You , Shi-Ming Wang , Cheng Wei Chen , Jian-Hua Huang , Yu-Lin Du
IPC分类号： G01R31/26 , H01L21/66
CPC分类号： H01L21/67248
摘要： A method is disclosed for a multi-zone interference correction processing for a rapid thermal processing (RTP) system. This processing allows for improved calibration/tuning of RTP systems by accounting for zone coupling. The disclosed method includes establishing baseline characteristic data and zone characteristic data, and then using the baseline and zone characteristic data to determine lamp-control parameters, such as temperature offset values, for temperature sensors of the RTP system. The baseline characteristic data includes information regarding baseline heating uniformity of an RTP system. The zone characteristic data is collected for a plurality of heating zones within the heating chamber of the RTP system, each zone being associated with a respective temperature probe. The zone characteristic data is collected based on controlled temperature sensor variations. The lamp-control parameters for temperature probes of the RTP system are then calculated based on the baseline characteristic data and the zone characteristic data.
摘要翻译：公开了一种用于快速热处理（RTP）系统的多区域干扰校正处理的方法。该处理允许通过考虑区域耦合来改进RTP系统的校准/调谐。所公开的方法包括建立基线特征数据和区域特征数据，然后使用基线和区域特征数据来确定用于RTP系统的温度传感器的灯控制参数，例如温度偏移值。基线特征数据包括关于RTP系统的基线加热均匀性的信息。针对RTP系统的加热室内的多个加热区收集区域特征数据，每个区域与相应的温度探针相关联。基于受控的温度传感器变化收集区域特征数据。然后根据基线特征数据和区域特征数据计算RTP系统温度探测器的灯控制参数。

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