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1. 发明授权

US07368303B2 Method for temperature control in a rapid thermal processing system 有权
标题翻译：快速热处理系统中的温度控制方法
公开(公告)号：US07368303B2
公开(公告)日：2008-05-06
申请号：US10969475
申请日：2004-10-20
申请人： Wei-Ming You , Shi-Ming Wang , Cheng Wei Chen , Jian-Hua Huang , Yu-Lin Du
发明人： Wei-Ming You , Shi-Ming Wang , Cheng Wei Chen , Jian-Hua Huang , Yu-Lin Du
IPC分类号： G01R31/26 , H01L21/66
CPC分类号： H01L21/67248
摘要： A method is disclosed for a multi-zone interference correction processing for a rapid thermal processing (RTP) system. This processing allows for improved calibration/tuning of RTP systems by accounting for zone coupling. The disclosed method includes establishing baseline characteristic data and zone characteristic data, and then using the baseline and zone characteristic data to determine lamp-control parameters, such as temperature offset values, for temperature sensors of the RTP system. The baseline characteristic data includes information regarding baseline heating uniformity of an RTP system. The zone characteristic data is collected for a plurality of heating zones within the heating chamber of the RTP system, each zone being associated with a respective temperature probe. The zone characteristic data is collected based on controlled temperature sensor variations. The lamp-control parameters for temperature probes of the RTP system are then calculated based on the baseline characteristic data and the zone characteristic data.
摘要翻译：公开了一种用于快速热处理（RTP）系统的多区域干扰校正处理的方法。该处理允许通过考虑区域耦合来改进RTP系统的校准/调谐。所公开的方法包括建立基线特征数据和区域特征数据，然后使用基线和区域特征数据来确定用于RTP系统的温度传感器的灯控制参数，例如温度偏移值。基线特征数据包括关于RTP系统的基线加热均匀性的信息。针对RTP系统的加热室内的多个加热区收集区域特征数据，每个区域与相应的温度探针相关联。基于受控的温度传感器变化收集区域特征数据。然后根据基线特征数据和区域特征数据计算RTP系统温度探测器的灯控制参数。

2. 发明授权

US07158850B2 Wireless wafer carrier identification and enterprise data synchronization 有权
标题翻译：无线晶圆载体识别和企业数据同步
公开(公告)号：US07158850B2
公开(公告)日：2007-01-02
申请号：US10172089
申请日：2002-06-14
申请人： Chien-Fei Cheng , Bruce Chen , Yuan-Ching Lu , Li-Ren Lin , Shi-Ming Wang , Pei-Chen Yeh
发明人： Chien-Fei Cheng , Bruce Chen , Yuan-Ching Lu , Li-Ren Lin , Shi-Ming Wang , Pei-Chen Yeh
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： A semiconductor fabrication enterprise includes fabrication equipment, transportable containers for work—in—process and an enterprise information system. The transportable containers have associated radio frequency tags having identification codes uniquely identifying the carriers in the fabrication process. The enterprise information system contains data corresponding to each such identification code. The identification codes are read by a radio frequency interrogation device, and the radio frequency interrogation device carries out transactions with the enterprise data system to transfer the data corresponding to the identification codes to the radio frequency interrogation device. The radio frequency tags may be adapted for read/write functionality allowing for writing data to the radio frequency tags and synchronization of radio frequency tag data and enterprise information system data.
摘要翻译：半导体制造企业包括制造设备，在制品运输容器和企业信息系统。可移动容器具有相关联的射频标签，其具有唯一地识别制造过程中的载体的识别码。企业信息系统包含与每个这样的识别码对应的数据。识别码由射频询问装置读取，射频询问装置与企业数据系统进行交易，将与识别码对应的数据传送给射频询问装置。射频标签可以适于读/写功能，允许向射频标签写入数据，并且对射频标签数据和企业信息系统数据进行同步。

3. 发明申请

US20060084188A1 Method for temperature control in a rapid thermal processing system 有权
标题翻译：快速热处理系统中的温度控制方法
公开(公告)号：US20060084188A1
公开(公告)日：2006-04-20
申请号：US10969475
申请日：2004-10-20
申请人： Wei-Ming You , Shi-Ming Wang , Cheng Chen , Jian-Hua Huang , Yu-Lin Du
发明人： Wei-Ming You , Shi-Ming Wang , Cheng Chen , Jian-Hua Huang , Yu-Lin Du
IPC分类号： H01L21/66
CPC分类号： H01L21/67248
摘要： A method is disclosed for a multi-zone interference correction processing for a rapid thermal processing (RTP) system. This processing allows for improved calibration/tuning of RTP systems by accounting for zone coupling. The disclosed method includes establishing baseline characteristic data and zone characteristic data, and then using the baseline and zone characteristic data to determine lamp-control parameters, such as temperature offset values, for temperature sensors of the RTP system. The baseline characteristic data includes information regarding baseline heating uniformity of an RTP system. The zone characteristic data is collected for a plurality of heating zones within the heating chamber of the RTP system, each zone being associated with a respective temperature probe. The zone characteristic data is collected based on controlled temperature sensor variations. The lamp-control parameters for temperature probes of the RTP system are then calculated based on the baseline characteristic data and the zone characteristic data.
摘要翻译：公开了一种用于快速热处理（RTP）系统的多区域干扰校正处理的方法。该处理允许通过考虑区域耦合来改进RTP系统的校准/调谐。所公开的方法包括建立基线特征数据和区域特征数据，然后使用基线和区域特征数据来确定用于RTP系统的温度传感器的灯控制参数，例如温度偏移值。基线特征数据包括关于RTP系统的基线加热均匀性的信息。针对RTP系统的加热室内的多个加热区收集区域特征数据，每个区域与相应的温度探针相关联。基于受控的温度传感器变化收集区域特征数据。然后根据基线特征数据和区域特征数据计算RTP系统温度探测器的灯控制参数。

4. 发明授权

US07261508B2 Method for aligning a loadport to an overhead hoist transport system 有权
标题翻译：将负载运动对准起重运输系统的方法
公开(公告)号：US07261508B2
公开(公告)日：2007-08-28
申请号：US10127111
申请日：2002-04-22
申请人： Li-Ren Lin , Shi-Ming Wang , Cheng-Chang Chang
发明人： Li-Ren Lin , Shi-Ming Wang , Cheng-Chang Chang
IPC分类号： H21L21/677
CPC分类号： H01L21/67775
摘要： A method for aligning a loadport of a process machine to an overhead hoist transport (OHT) system which can be carried out by first providing an OHT rail overhanging a cleanroom floor; setting a reference point in the cleanroom in proximity to the OHT rail; marking on the cleanroom floor boundary reference lines for each row of process machines based on the reference point; positioning a process machine on the cleanroom floor with a boundary line of the machine aligned to the boundary reference line; mounting a loadport onto the process machine; and fine tuning a center line of the loadport to a reference line on the floor that is 200 mm apart from and parallel to the boundary reference line.
摘要翻译：一种用于将加工机器的加载口与顶置式起重机运输（OHT）系统对准的方法，其可以通过首先提供悬挂在净室地板上的OHT导轨来执行; 在OHT铁路附近的无尘室设置参考点; 基于参考点，对每行加工机床的洁净室地板边界参考线进行标记; 将加工机器放置在洁净室地板上，机器的边界线与边界参考线对齐; 将加载端口安装到加工机器上; 并将负载端口的中心线微调到距离边界参考线200平方米的地板上的参考线。

5. 发明授权

US06195857B1 Automated device and method for stripping residual yarn from yarn tube 失效
标题翻译：用于从纱管中剥离残余纱线的自动装置和方法
公开(公告)号：US06195857B1
公开(公告)日：2001-03-06
申请号：US09628032
申请日：2000-07-27
申请人： Lung-Wu Chang , Shi-Ming Wang , Albert Day , Chin-Lung Liu , Chien-Hua Li , Tzu-Yang Wang
发明人： Lung-Wu Chang , Shi-Ming Wang , Albert Day , Chin-Lung Liu , Chien-Hua Li , Tzu-Yang Wang
IPC分类号： B65H7300
CPC分类号： B65H73/00 , B65H2701/31
摘要： A device is designed to automate the process of stripping residual yarn from a yarn tube. The device comprises a feeding mechanism, an index dial, a residual yarn removing mechanism, a compression mechanism, and an arranging mechanism. The automated device enhances the recycling quality of the stripped residual yarn and minimizes the likelihood that the yarn tube is damaged in the stripping process.
摘要翻译：设备被设计成使从纱管中剥离残余纱线的过程自动化。该装置包括进给机构，分度盘，剩余纱线去除机构，压缩机构和排列机构。自动化装置提高剥离的残余纱线的回收质量，并最大限度地减少纱线管在剥离过程中损坏的可能性。

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