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1. 发明授权

US07285963B2 Method and system for measurement of dielectric constant of thin films using a near field microwave probe 失效
标题翻译：使用近场微波探针测量薄膜介电常数的方法和系统
公开(公告)号：US07285963B2
公开(公告)日：2007-10-23
申请号：US11101517
申请日：2005-04-08
申请人： Vladimir V. Talanov , Andrew R. Schwartz , Andre Scherz , Robert L. Moreland
发明人： Vladimir V. Talanov , Andrew R. Schwartz , Andre Scherz , Robert L. Moreland
IPC分类号： H01P7/00 , G01R27/04
CPC分类号： G01R27/2676 , G01Q60/22
摘要： A measurement technique based on a microwave near-field scanning probe is developed for non-contact measurement of dielectric constant of low-k films. The technique is non-destructive, non-invasive and can be used on both porous and non-porous dielectrics. The technique is based on measurement of resonant frequency shift of the near-field microwave resonator for a plurality of calibration samples vs. distance between the probe tip and the sample to construct a calibration curve. Probe resonance frequency shift measured for the sample under study vs. tip-sample separation is fitted into the calibration curve to extract the dielectric constant of the sample under study. The calibration permits obtaining a linear calibration curve in order to simplify the extraction of the dielectric constant of the sample under study.
摘要翻译：开发了基于微波近场扫描探针的测量技术，用于非接触式测量低k膜的介电常数。该技术是非破坏性的，非侵入性的，可用于多孔和无孔电介质。该技术基于对于多个校准样品的近场微波谐振器的谐振频移与探针尖端和样品之间的距离的测量，以构建校准曲线。在研究样品测量的探针共振频移与尖端样品分离相匹配，以提取正在研究的样品的介电常数。校准允许获得线性校准曲线，以简化研究中样品的介电常数的提取。

2. 发明授权

US06680617B2 Apertured probes for localized measurements of a material's complex permittivity and fabrication method 失效
标题翻译：用于材料的复介电常数和制造方法的局部测量的孔径探针
公开(公告)号：US06680617B2
公开(公告)日：2004-01-20
申请号：US10266611
申请日：2002-10-09
申请人： Robert L. Moreland , Hans M. Christen , Vladimir V. Talanov , Andrew R. Schwartz
发明人： Robert L. Moreland , Hans M. Christen , Vladimir V. Talanov , Andrew R. Schwartz
IPC分类号： G01R2704
CPC分类号： G01Q60/22 , G01R27/2617 , Y10T29/49002 , Y10T29/49007 , Y10T29/49117
摘要： A probe for non-destructive determination of complex permittivity of a material and for near field optical microscopy is based on a balanced multi-conductor transmission line structure created on a dielectric substrate member which confines the probing field within a sharply defined sampling volume in the material under study.
摘要翻译：用于非破坏性测定材料和近场光学显微镜的复介电常数的探针基于在电介质基底构件上产生的平衡的多导体传输线结构，其将探测场限制在材料中明确定义的采样体积内正在研究中

3. 发明授权

US06959481B2 Apertured probes for localized measurements of a material's complex permittivity and fabrication method 失效
标题翻译：用于材料的复介电常数和制造方法的局部测量的孔径探针
公开(公告)号：US06959481B2
公开(公告)日：2005-11-01
申请号：US10392918
申请日：2003-03-21
申请人： Robert L. Moreland , Hans M. Christen , Vladimir V. Talanov , Andrew R. Schwartz
发明人： Robert L. Moreland , Hans M. Christen , Vladimir V. Talanov , Andrew R. Schwartz
IPC分类号： G01R27/06 , G01N22/00 , G01Q10/00 , G01Q60/18 , G01Q60/22 , G01Q60/46 , G01Q70/16 , G01R1/06 , G01R27/26 , H01S4/00
CPC分类号： G01Q60/22 , G01R27/2617 , Y10T29/49002 , Y10T29/49007 , Y10T29/49117
摘要： A probe for non-destructive determination of complex permittivity of a material and for near field optical microscopy is based on a balanced multi-conductor transmission line structure created on a dielectric substrate member which confines the probing field within a sharply defined sampling volume in the material under study. A method for manufacturing dielectric support member based probes includes anisotropically depositing a 50-100 Å thick underlayer of Cr, Ni, W or Ta onto the dielectric support member, anisotropically depositing conductive material onto the Cr, Ni, W or Ta underlayer, and removing the unwanted conductive material at the sides of the dielectric support member to electrically isolate the created conductive strips.
摘要翻译：用于非破坏性测定材料和近场光学显微镜的复介电常数的探针基于在电介质基底构件上产生的平衡的多导体传输线结构，其将探测场限制在材料中明确定义的采样体积内正在研究中用于制造基于电介质支撑元件的探针的方法包括将各向异性地沉积50-100厚的Cr，Ni，W或Ta的底层到电介质支撑件上，各向异性地将导电材料沉积到Cr，Ni，W或Ta底层上，在电介质支撑构件的侧面处的不需要的导电材料以电隔离所产生的导电条。

4. 发明授权

US06856140B2 System and method for quantitative measurements of a material's complex permittivity with use of near-field microwave probes 失效
标题翻译：使用近场微波探针对材料的复介电常数进行定量测量的系统和方法
公开(公告)号：US06856140B2
公开(公告)日：2005-02-15
申请号：US10412295
申请日：2003-04-14
申请人： Vladimir V. Talanov , Robert L. Moreland , Andrew R. Schwartz , Hans M. Christen
发明人： Vladimir V. Talanov , Robert L. Moreland , Andrew R. Schwartz , Hans M. Christen
IPC分类号： G01R27/06 , G01N22/00 , G01Q10/00 , G01Q60/18 , G01Q60/22 , G01Q60/46 , G01Q70/16 , G01R27/04
CPC分类号： G01Q60/22
摘要： A method for measuring a material's complex permittivity is provided where a near-field microwave probe is positioned a predetermined distance from a first and a second standard sample for measuring a relative resonant frequency shift of the near-field microwave probe for standard samples. Based on measurements, calibration coefficients are calculated. A relative resonant frequency shift of the near-field microwave probe for a sample under study is measured by fast frequency sweep technique while the distance between the tip of the probe and the sample under the study is maintained nominally at the distance between the tip of the probe and each standard sample during a calibration procedure by a shear-force based distance control mechanism. Also, the change in the quality factor of the probe for unloaded and loaded resonator is measured. The dielectric constant of the sample under study is calculated using the resonant frequency shift and the change in the quality factor of the near-field microwave probe for the sample under study and the calibration coefficients obtained during the calibration procedure.
摘要翻译：提供了一种用于测量材料的复介电常数的方法，其中近场微波探针位于与用于标准样品的近场微波探针的相对共振频移的第一和第二标准样本预定距离处。基于测量，计算校准系数。通过快速扫频技术测量用于所研究的样品的近场微波探针的相对共振频移，同时探针尖端与研究下的样品之间的距离标称地保持在探头和每个标准样品在校准过程中通过基于剪切力的距离控制机制。此外，测量了用于无负载和负载的谐振器的探头的品质因数的变化。使用研究中的样品的谐振频率偏移和近场微波探针的质量因子的变化以及校准过程中获得的校准系数来计算正在研究的样品的介电常数。

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