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    • 6. 发明授权
    • Method of making an integrated circuit package using a batch step for curing a die attachment film and a tool system for performing the method
    • 使用用于固化模具附着膜的批量步骤制造集成电路封装的方法和用于执行该方法的工具系统
    • US06517656B1
    • 2003-02-11
    • US09412889
    • 1999-10-05
    • Vincent DiCaprio
    • Vincent DiCaprio
    • B32B3120
    • H01L24/83H01L24/75H01L2224/2919H01L2224/8319H01L2224/83855H01L2224/83856H01L2924/01005H01L2924/01006H01L2924/01027H01L2924/01033H01L2924/01074H01L2924/014H01L2924/0665H01L2924/07802H01L2924/14H01L2924/00
    • Methods of making packages for integrated circuit devices, and in particular for attaching a plurality of integrated circuit die to a substrate strip, are disclosed. The substrate includes a plurality of die mounting sites. A B-staged epoxy film is on each site. An exemplary method includes placing an integrated circuit die on the adhesive film of each site. After a plurality of integrated circuit die are individually placed on the substrate, the adhesive films of a plurality of sites are cured simultaneously in a batch process. The curing permanently attaches the die to the substrate. Subsequently, the die are wire bonded to their respective substrate sites and encapsulated. The encapsulated substrate is cut to form individual packages. A tool system for performing the die attachment process includes a head for picking up a die and placing the die on an adhesive film on the substrate strip, and a pair of opposing plates capable of pressing together and applying pressure and heat to a plurality of sites simultaneously so as to cure the adhesive film of the plurality of sites.
    • 公开了用于集成电路器件的封装的方法,特别是用于将多个集成电路管芯附着到衬底条上的方法。 基板包括多个模具安装位置。 每个站点都有一个B级环氧膜。 一种示例性方法包括将集成电路管芯放置在每个部位的粘合膜上。 在将多个集成电路芯片分别放置在基板上之后,多个部位的粘合膜在批处理中同时固化。 固化将模具永久地附着到基底上。 随后,管芯被引线键合到它们各自的衬底部位并封装。 封装的衬底被切割以形成单独的封装。 用于执行模具附接工艺的工具系统包括用于拾取模具并将模具放置在衬底条上的粘合剂膜上的头部,以及一对能够压在一起并向多个部位施加压力和热量的相对板 同时固化多个部位的粘合膜。
    • 8. 发明授权
    • Wafer-scale production of chip-scale semiconductor packages using wafer mapping techniques
    • 使用晶片映射技术晶圆尺寸生产芯片级半导体封装
    • US06589801B1
    • 2003-07-08
    • US09385694
    • 1999-08-30
    • Ju-Hoon YoonDae-Byung KangIn-Bae ParkVincent DiCaprioMarkus K. Liebhard
    • Ju-Hoon YoonDae-Byung KangIn-Bae ParkVincent DiCaprioMarkus K. Liebhard
    • H01L2166
    • H01L22/20H01L24/94H01L2224/32225H01L2224/48091H01L2224/4824H01L2224/48465H01L2224/73215H01L2224/78301H01L2224/85009H01L2224/94H01L2924/01004H01L2924/01013H01L2924/01029H01L2924/01033H01L2924/01075H01L2924/01079H01L2924/01082H01L2924/014H01L2924/15311H01L2924/3025H01L2924/00014H01L2224/85H01L2924/00
    • A method is disclosed for manufacturing chip-scale semiconductor packages at a wafer-scale level using wafer mapping techniques. In the method, a semiconductor wafer and/or a circuit substrate, each respectively comprising a plurality of individual chips and circuit pattern units, is/are pre-tested and discriminated in terms of the quality and/or grade of each individual chip unit and/or circuit pattern unit contained therein. The test results are marked on the lower surface of each chip unit and/or on each pattern unit. The substrate is laminated to the wafer to form a laminated assembly prior to performing the packaging process, which typically includes a wire bonding step, an encapsulation step and a solder ball welding step. A plurality of connected package units are thereby formed in the laminated substrate-wafer assembly. The package units are then singulated from each other and the laminated assembly by a cutting process. Using the pre-testing results, the method eliminates wasteful packaging of defective chips. The quality and/or grade of packaged units are marked on the chips in accordance with the pre-testing data, thereby enabling defective packages to be distinguished from good packages without need for post-singulation testing. The method permits using only good circuit pattern units, thereby preventing expensive chip units from being packaged with defective pattern units. In addition, the method permits both a package pick-and-place step and a package marking step to be combined into a single operation using a single device.
    • 公开了一种使用晶片映射技术在晶片级别制造芯片级半导体封装的方法。 在该方法中,分别包括多个单独芯片和电路图案单元的半导体晶片和/或电路基板在每个单独芯片单元的质量和/或等级方面被预先测试和鉴别,并且 /或其中包含的电路图案单元。 测试结果标记在每个芯片单元的下表面和/或每个图案单元上。 在执行包装工艺之前,将衬底层压到晶片上以形成层压组件,其通常包括引线键合步骤,封装步骤和焊球焊接步骤。 由此,在叠层基板 - 晶片组件中形成多个连接的封装单元。 然后通过切割工艺将包装单元彼此分离并且层压组件。 使用预测试结果,该方法消除了有缺陷的芯片的浪费包装。 封装单元的质量和/或等级根据预测数据在芯片上标记,从而使有缺陷的封装与良好的封装区分开,而不需要进行后分离测试。 该方法仅允许使用良好的电路图案单元,从而防止昂贵的芯片单元与缺陷图案单元一起封装。 此外,该方法允许使用单个设备将包装拾取步骤和包装标记步骤组合成单个操作。