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    • 4. 发明授权
    • Microdevice for the in situ detection of particles of interest in a fluid medium and operating method
    • 用于在流体介质中原位检测感兴趣的颗粒的微型装置和操作方法
    • US08334702B2
    • 2012-12-18
    • US12731963
    • 2010-03-25
    • Vincent AgacheGuillaume Delapierre
    • Vincent AgacheGuillaume Delapierre
    • G01R27/32G01N11/00
    • G01N27/127B82Y15/00G01N27/122
    • The invention relates to a detection device of small size, allowing direct in situ detection of particles with no labelling, enabling the particles to be rapidly analysed, and having both a specificity and a sensitivity that are at least equivalent to the existing devices. In one embodiment, the invention provides a device havinga nanowire, intended for interacting with the particles of interest, which is suspended between two anchors that define a source and a drain, the source and the drain are configured to be connected to an AC voltage generator and to a DC voltage generator, respectively, in order to generate a first input signal;an excitation electrode, placed laterally facing the nanowire and configured to be connected to an AC voltage generator, in order to generate a second input signal; anda measurement electrode placed opposite the excitation electrode relative to the nanowire and generating a single output signal representative of the particles of interest.
    • 本发明涉及一种小尺寸的检测装置,允许直接原位检测没有标记的颗粒,使得能够快速分析颗粒,同时具有至少等同于现有装置的特异性和灵敏度。 在一个实施例中,本发明提供了一种具有纳米线的装置,其旨在与感兴趣的颗粒相互作用,所述颗粒悬挂在限定源极和漏极的两个锚点之间,源极和漏极被配置为连接到AC电压 发电机和DC电压发生器,以便产生第一输入信号; 激励电极,横向面对纳米线并且被配置为连接到AC电压发生器,以便产生第二输入信号; 以及与激发电极相对于纳米线放置的测量电极,并产生表示感兴趣的颗粒的单个输出信号。
    • 5. 发明授权
    • Device for the gravimetric detection of particles in a fluid medium, comprising an oscillator between two fluid channels
    • 用于重量测量流体介质中的颗粒的装置,包括两个流体通道之间的振荡器
    • US08746048B2
    • 2014-06-10
    • US12993513
    • 2009-04-24
    • Vincent AgacheFrançois BalerasOlivier Constantin
    • Vincent AgacheFrançois BalerasOlivier Constantin
    • G01N29/02
    • G01G3/13G01G3/16
    • The invention provides a device for the gravimetric detection of particles in a fluid medium, comprising a flat electromechanical oscillator (1), means for supporting the oscillator, means (15a, 15b, 15c, 15d) for actuating said oscillator and, on either side of the plane of the oscillator (1), two cavities (3, 5) enabling the oscillator (1) to vibrate when it is activated by the actuation means (15a, 15b, 15c, 15d), characterized in that at least one of the two cavities (3, 5) forms an integral part of a channel (2, 4) for the passage of a fluid over at least one of the faces (1a, 1b) of the oscillator and in that said actuation means (15a, 15b, 15c, 15d) take the form of at least one electrode (15a, 15b, 15c, 15d) lying in the same plane as that of the electromechanical oscillator and at a defined distance (g) from the oscillator, so as to ensure that the oscillator vibrates in its plane.
    • 本发明提供了一种用于重量检测流体介质中的颗粒的装置,包括平面机电振荡器(1),用于支撑振荡器的装置,用于致动所述振荡器的装置(15a,15b,15c,15d),以及在任一侧 振荡器(1)的平面的两个空腔(3,5)能够使振荡器(1)在被致动装置(15a,15b,15c,15d)激活时振动,其特征在于,至少一个 两个空腔(3,5)形成通道(2,4)的整体部分,用于使流体在振荡器的至少一个面(1a,1b)上通过,并且所述致动装置(15a, 15b,15c,15d)以与机电振荡器相同的平面中的至少一个电极(15a,15b,15c,15d)的形式并且与振荡器限定距离(g),以确保 振荡器在其平面上振动。
    • 6. 发明申请
    • Device For The Gravimetric Detection Of Particles In A Fluid Medium, Comprising An Oscillator Between Two Fluid Channels, Production And Method Of Employing The Device
    • 包含两个流体通道之间的振荡器的流体介质中的颗粒的重量检测装置,生产和使用装置的方法
    • US20110138891A1
    • 2011-06-16
    • US12993513
    • 2009-04-24
    • Vincent AgacheFrancois BalerasOlivier Constantin
    • Vincent AgacheFrancois BalerasOlivier Constantin
    • G01G17/04H05K13/00
    • G01G3/13G01G3/16
    • The invention provides a device for the gravimetric detection of particles in a fluid medium, comprising a flat electromechanical oscillator (1), means for supporting the oscillator, means (15a, 15b, 15c, 15d) for actuating said oscillator and, on either side of the plane of the oscillator (1), two cavities (3, 5) enabling the oscillator (1) to vibrate when it is activated by the actuation means (15a, 15b, 15c, 15d), characterized in that at least one of the two cavities (3, 5) forms an integral part of a channel (2, 4) for the passage of a fluid over at least one of the faces (1a, 1b) of the oscillator and in that said actuation means (15a, 15b, 15c, 15d) take the form of at least one electrode (15a, 15b, 15c, 15d) lying in the same plane as that of the electromechanical oscillator and at a defined distance (g) from the oscillator, so as to ensure that the oscillator vibrates in its plane.
    • 本发明提供了一种用于重量检测流体介质中的颗粒的装置,包括平面机电振荡器(1),用于支撑振荡器的装置,用于致动所述振荡器的装置(15a,15b,15c,15d),以及在任一侧 振荡器(1)的平面的两个空腔(3,5)能够使振荡器(1)在被致动装置(15a,15b,15c,15d)激活时振动,其特征在于,至少一个 两个空腔(3,5)形成通道(2,4)的整体部分,用于使流体在振荡器的至少一个面(1a,1b)上通过,并且所述致动装置(15a, 15b,15c,15d)以与机电振荡器相同的平面中的至少一个电极(15a,15b,15c,15d)的形式并且与振荡器限定距离(g),以确保 振荡器在其平面上振动。
    • 7. 发明授权
    • Method for functionalising fluid lines contained in a micromechanical device, micromechanical device including functionalised lines, and method for manufacturing same
    • 包含在微机械装置中的流体线的功能化方法,包括功能化线的微机械装置及其制造方法
    • US08968673B2
    • 2015-03-03
    • US13805491
    • 2011-06-29
    • Vincent AgacheAntoine HoangFrançoise Vinet
    • Vincent AgacheAntoine HoangFrançoise Vinet
    • G01N33/00G03F7/24B81C1/00F04B19/00
    • G03F7/24B81B2201/0214B81B2201/058B81B2201/06B81C1/00206B81C2201/0154F04B19/006
    • The present invention relates to a method for functionalizing fluid lines (1b) in a micromechanical device, the walls of which include an opaque layer. For this purpose, the invention provides a method for functionalizing a micromechanical device provided with a fluid line including a peripheral wall (5) having a surface (2) outside the line and an inner surface (3) defining a space (1b) in which a fluid can circulate, the peripheral wall at least partially including a silicon layer (5a). The method includes the following steps: a) providing a device, the peripheral wall (5) of which at least partially includes a silicon layer (5a) having, at least locally, a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm; c) silanizing at least the inner surface of the fluid line; d) the localized, selective photo-deprotection on at least the inner surface of the silanized device by exposing the peripheral wall (5) at the point at which said wall has a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm.
    • 本发明涉及一种在微机械装置中功能化流体管线(1b)的方法,该方法的壁包括不透明层。 为此,本发明提供了一种功能化微机械装置的方法,该微机械装置具有流体管线,该流体管线包括在管线外部具有表面(2)的周壁(5)和限定空间(1b)的内表面(3) 流体可以循环,周壁至少部分地包括硅层(5a)。 该方法包括以下步骤:a)提供一种器件,其外围壁(5)至少部分地包括硅层(5a),该硅层至少局部地具有大于100nm的厚度(e)并且小于 200nm,有利地为160〜180nm; c)至少使流体管线的内表面硅烷化; d)通过在所述壁的厚度(e)大于100nm且小于200nm的点处暴露外围壁(5),至少在硅烷化装置的内表面上进行局部选择性光 - 去保护 ,有利地为160至180nm。
    • 9. 发明申请
    • Method for Functionalising Fluid Lines Contained in a Micromechanical Device, Micromechanical Device Including Functionalised Lines, and Method for Manufacturing Same
    • 包含在机械装置中的流体线的功能化方法,包括功能化线的微机械装置及其制造方法
    • US20130149196A1
    • 2013-06-13
    • US13805491
    • 2011-06-29
    • Vincent AgacheAntoine HoangFrancoise Vinet
    • Vincent AgacheAntoine HoangFrancoise Vinet
    • G03F7/24
    • G03F7/24B81B2201/0214B81B2201/058B81B2201/06B81C1/00206B81C2201/0154F04B19/006
    • The present invention relates to a method for functionalising fluid lines (1b) in a micromechanical device, the walls of which include an opaque layer. For this purpose, the invention provides a method for functionalising a micromechanical device provided with a fluid line including a peripheral wall (5) having a surface (2) outside the line and an inner surface (3) defining a space (1b) in which a fluid can circulate, the peripheral wall at least partially including a silicon layer (5a). The method includes the following steps: a) providing a device, the peripheral wall (5) of which at least partially includes a silicon layer (5a) having, at least locally, a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm; c) silanising at least the inner surface of the fluid line; d) the localised, selective photo-deprotection on at least the inner surface of the silanised device by exposing the peripheral wall (5) at the point at which said wall has a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm.
    • 本发明涉及一种在微机械装置中功能化流体管线(1b)的方法,其中壁部包括不透明层。 为此,本发明提供了一种功能化微机械装置的方法,该微机械装置具有流体管线,该流体管线包括具有在管线外部的表面(2)的周壁(5)和限定空间(1b)的内表面(3),其中 流体可以循环,周壁至少部分地包括硅层(5a)。 该方法包括以下步骤:a)提供一种器件,其外围壁(5)至少部分地包括硅层(5a),该硅层至少局部地具有大于100nm的厚度(e)并且小于 200nm,有利地为160〜180nm; c)至少对流体管线的内表面进行硅烷化; d)通过在所述壁的厚度(e)大于100nm且小于200nm的点处暴露周壁(5),至少在硅烷化装置的内表面上进行局部选择性光 - 去保护 ,有利地为160至180nm。
    • 10. 发明申请
    • Microdevice for the In Situ Detection of Particles of Interest in a Fluid Medium and Operating Method
    • 用于在流体介质中感兴趣的颗粒的原位检测的微型设备和操作方法
    • US20100244855A1
    • 2010-09-30
    • US12731963
    • 2010-03-25
    • Vincent AgacheGuillaume Delapierre
    • Vincent AgacheGuillaume Delapierre
    • G01R27/04
    • G01N27/127B82Y15/00G01N27/122
    • The invention relates to a detection device of small size, allowing direct in situ detection of particles with no labelling, enabling the particles to be rapidly analysed, and having both a specificity and a sensitivity that are at least equivalent to the existing devices. In one embodiment, the invention provides a device having a nanowire, intended for interacting with the particles of interest, which is suspended between two anchors that define a source and a drain, the source and the drain are configured to be connected to an AC voltage generator and to a DC voltage generator, respectively, in order to generate a first input signal; an excitation electrode, placed laterally facing the nanowire and configured to be connected to an AC voltage generator, in order to generate a second input signal; and a measurement electrode placed opposite the excitation electrode relative to the nanowire and generating a single output signal representative of the particles of interest.
    • 本发明涉及一种小尺寸的检测装置,允许直接原位检测没有标记的颗粒,使得能够快速分析颗粒,同时具有至少等同于现有装置的特异性和灵敏度。 在一个实施例中,本发明提供了一种具有纳米线的装置,其旨在与感兴趣的颗粒相互作用,所述颗粒悬挂在限定源极和漏极的两个锚点之间,源极和漏极被配置为连接到AC电压 发电机和DC电压发生器,以便产生第一输入信号; 激励电极,横向面对纳米线并且被配置为连接到AC电压发生器,以便产生第二输入信号; 以及与激发电极相对于纳米线放置的测量电极,并产生表示感兴趣的颗粒的单个输出信号。