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    • 8. 发明授权
    • Evaporator apparatus and method for making nanoparticles
    • 蒸发器及其制造方法
    • US5618475A
    • 1997-04-08
    • US557206
    • 1995-11-14
    • D. Lynn JohnsonVinayak P. Dravid
    • D. Lynn JohnsonVinayak P. Dravid
    • B01J13/02B01J13/04B22F1/00B22F9/12B22F9/14C01B13/20C01B21/06C01B31/30C01B35/04B29B9/00
    • B82Y30/00B01J13/02B01J13/04B22F1/0018B22F1/0088B22F9/12B22F9/14C01B13/20C01B21/06C01B31/30C01B35/04B01J2219/0822C01P2004/51C01P2004/64C01P2004/80Y10S423/40Y10S977/773Y10S977/843Y10S977/844Y10S977/845Y10S977/896Y10S977/901
    • Nanoparticles of a material less than about 100 nm in diameter are made by evaporating the material in an evaporation chamber residing in an entrainment chamber having a gaseous atmosphere therein. The evaporator is disposed in but isolated from the entrainment chamber, except for a gaseous jet discharge opening. A carrier gas is introduced to the evaporation chamber to carry vapor of the material in the evaporation chamber through the discharge opening into the entrainment chamber as a gaseous jet. The gaseous jet entrains the gaseous atmosphere for quenching the vapor to form nanoparticles. Solid material is supplied at a feedrate to a supply opening of the evaporation chamber, melted at an end region remote from the supply opening, and evaporated at the end region at an evaporation rate equal to the feed rate of the solid material. First and second metals having different vapor pressures can be supplied to respective first and second evaporation chambers and their vapors collected in a common vapor collection chamber having the discharge opening therein. The carrier gas is introduced to the vapor collection chamber to carry the metal vapors together through the discharge opening as a gaseous jet into the entrainment chamber where nanoparticles comprising the two metals are formed.
    • 直径小于约100nm的材料的纳米颗粒通过在其中具有气体气氛的夹带室中的蒸发室中蒸发掉材料来制备。 除了气体喷射排出口之外,蒸发器设置在与夹带室隔离的位置。 将载气引入蒸发室以将蒸发室中的材料的蒸气通过排放口带入作为气体射流的夹带室。 气态气流夹带气态气体以猝灭蒸气形成纳米颗粒。 固体材料以进给速度供给到蒸发室的供应开口,在远离供应开口的端部区域熔化,并以与固体材料的进料速率相等的蒸发速率在端部区域蒸发。 可以将具有不同蒸汽压的第一和第二金属供应到相应的第一和第二蒸发室,并且其蒸气被收集在其中具有排放口的公共蒸气收集室中。 载气被引入蒸气收集室,以将金属蒸气作为气体射流通过排放口输送到夹带室中,其中形成了包含两种金属的纳米颗粒。
    • 9. 发明授权
    • Method of making nanopatterns and nanostructures and nanopatterned functional oxide materials
    • 制备纳米图案和纳米结构和纳米图案化功能氧化物材料的方法
    • US08647814B2
    • 2014-02-11
    • US11805546
    • 2007-05-23
    • Vinayak P. DravidSuresh K. DonthuZixiao Pan
    • Vinayak P. DravidSuresh K. DonthuZixiao Pan
    • G03C5/00B44C1/17
    • G03F7/405H01L21/0272H01L21/0277H01L21/31144
    • Method for nanopatterning of inorganic materials, such as ceramic (e.g. metal oxide) materials, and organic materials, such as polymer materials, on a variety of substrates to form nanopatterns and/or nanostructures with control of dimensions and location, all without the need for etching the materials and without the need for re-alignment between multiple patterning steps in forming nanostructures, such as heterostructures comprising multiple materials. The method involves patterning a resist-coated substrate using electron beam lithography, removing a portion of the resist to provide a patterned resist-coated substrate, and spin coating the patterned resist-coated substrate with a liquid precursor, such as a sol precursor, of the inorganic or organic material. The remaining resist is removed and the spin coated substrate is heated at an elevated temperature to crystallize the deposited precursor material.
    • 无机材料如陶瓷(例如金属氧化物)材料和有机材料(例如聚合物材料)在各种基底上的纳米图案化方法,以形成具有尺寸和位置控制的纳米图案和/或纳米结构,所有这些都不需要 蚀刻材料并且不需要在形成纳米结构的多个图案化步骤之间进行重新对准,例如包括多种材料的异质结构。 该方法包括使用电子束平版印刷图案化抗蚀剂涂覆的基底,去除抗蚀剂的一部分以提供图案化的抗蚀剂涂覆的基底,并用液体前体如溶胶前体旋涂涂敷图案化的抗蚀剂涂覆的基底, 无机或有机材料。 除去剩余的抗蚀剂,并将旋转涂覆的基材在升高的温度下加热以使沉积的前体材料结晶。