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    • 9. 发明授权
    • Resistless device fabrication method
    • 无电阻器件制造方法
    • US6124146A
    • 2000-09-26
    • US79634
    • 1998-05-15
    • Kumar Shiralagi
    • Kumar Shiralagi
    • H01L21/285H01L21/00
    • H01L21/2855
    • A method of depositing a material to a semiconductor device having a first mesa structure, a second mesa structure and a valley. Material is deposited from a first angular direction sufficient to substantially mask the valley with a first of the mesa structures and from a second angular direction sufficient to substantially mask the valley with the second mesa structure to form a first lip and a second lip on the respective first and second mesa structures overlying the valley and defining a space therebetween less than the width of the valley. Material is then deposited to the device from a third direction in substantial opposition to the device, the space operating to guide material deposition to the valley to provide discrete material deposition in the valley to form a discrete feature in the valley.
    • 一种将材料沉积到具有第一台面结构,第二台面结构和谷的半导体器件的方法。 材料从第一角度方向沉积,该第一角度方向足以基本上用第一台面结构掩蔽谷,并且从第二角度方向沉积足以基本上利用第二台面结构掩蔽谷以形成第一唇缘和第二唇缘 第一和第二台面结构覆盖在谷上并且在其之间限定小于谷宽度的空间。 然后将材料从与第三方向相反的装置沉积到装置上,该装置的作用是将材料沉积到谷上以在谷中提供离散的材料沉积,以在谷中形成离散的特征。