专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20180292783A1 System and Method for Generating a Lithographic Image with the Use of a Reflective Concave Curvilinear Surface and a Digital Hologram in a Diverging Beam 审中-公开
公开(公告)号：US20180292783A1
公开(公告)日：2018-10-11
申请号：US15480334
申请日：2017-04-05
申请人： Vadim Rakhovsky , Mikhail Borisov , Aleksey Shamaev , Dmitry Chelyubeev , Vitaly Chernik , Peter Mikheev
发明人： Vadim Rakhovsky , Mikhail Borisov , Aleksey Shamaev , Dmitry Chelyubeev , Vitaly Chernik , Peter Mikheev
IPC分类号： G03H1/00 , G03H1/22 , G02B5/32 , G03H1/04 , G03H1/08 , G03F7/20
CPC分类号： G03H1/0005 , G02B5/32 , G03F7/702 , G03F7/70233 , G03F7/70408 , G03H1/0486 , G03H1/0891 , G03H1/2205 , G03H1/2294 , G03H2001/0094 , G03H2001/221 , G03H2222/23 , G03H2222/52 , G03H2223/24 , G03H2226/02
摘要： A system for generating a lithographic image contains a a light source that emits a diverging light beam and a reflective concave curvilinear surface onto which the diverging light beam falls and which reflects the diverging beam in the form of a converging beam. A digital hologram, which is placed into a diverging beam between the light source and the reflective surface, is coded in accordance with the lithographic image either preliminarily or dynamically, with the use of a spatial light modulator. From the curvilinear surface the spatially modulated beam is reflected in the form of a converging beam which falls onto an image-receiving substrate that is located in the image restoration plane and on which the lithographic image is generated.

2. 发明授权

US10162307B2 System and method for generating a lithographic image with the use of a reflective concave curvilinear surface and a digital hologram in a diverging beam 有权
公开(公告)号：US10162307B2
公开(公告)日：2018-12-25
申请号：US15480334
申请日：2017-04-05
申请人： Vadim Rakhovsky , Mikhail Borisov , Aleksey Shamaev , Dmitry Chelyubeev , Vitaly Chernik , Peter Mikheev
发明人： Vadim Rakhovsky , Mikhail Borisov , Aleksey Shamaev , Dmitry Chelyubeev , Vitaly Chernik , Peter Mikheev
IPC分类号： G03H1/08 , G03H1/00 , G03H1/22 , G02B5/32 , G03H1/04 , G03F7/20
摘要： A system for generating a lithographic image contains a light source that emits a diverging light beam and a reflective concave curvilinear surface onto which the diverging light beam falls and which reflects the diverging beam in the form of a converging beam. A digital hologram, which is placed into a diverging beam between the light source and the reflective surface, is coded in accordance with the lithographic image either preliminarily or dynamically, with the use of a spatial light modulator. From the curvilinear surface the spatially modulated beam is reflected in the form of a converging beam which falls onto an image-receiving substrate that is located in the image restoration plane and on which the lithographic image is generated.

3. 发明授权

US09952516B1 System and method for generating a lithographic image with the use of a digital hologram and a reflective concave in curvilinear surface 有权
公开(公告)号：US09952516B1
公开(公告)日：2018-04-24
申请号：US15473363
申请日：2017-03-29
申请人： Vadim Rakhovsky , Mikhail Borisov , Aleksey Shamaev , Dmitry Chelyubeev , Vitaly Chernik , Peter Mikheev
发明人： Vadim Rakhovsky , Mikhail Borisov , Aleksey Shamaev , Dmitry Chelyubeev , Vitaly Chernik , Peter Mikheev
IPC分类号： G03F7/20 , G03H1/04 , G03H1/00 , G02B19/00
CPC分类号： G03F7/70408 , G02B19/0023 , G03H1/0005 , G03H1/0443 , G03H1/2286 , G03H1/2294 , G03H2001/0094 , G03H2001/085 , G03H2222/54 , G03H2223/24 , G03H2225/32
摘要： A system for generating a lithographic image contains a alight source that emits a diverging light beam and a reflective concave curvilinear surface onto which the diverging light beam falls and which reflects the diverging beam in the form of a converging beam. A digital hologram, which is coded in accordance with the initial lithographic image either preliminarily or dynamically with the use of a spatial light modulator, is placed into the converging beam between the reflective surface and the image-receiving object. The image of an initial lithographic image formed on the image-receiving object is subsequently used in the processes of microlithography.

4. 发明授权

US10768531B1 System and method of maskless lithography with the use of a curvilinear hologram 有权
公开(公告)号：US10768531B1
公开(公告)日：2020-09-08
申请号：US16438922
申请日：2019-06-12
申请人： Vadim Rakhovsky , Vitaly Chernik , Mikhail Borisov , Aleksey Shamaev , Dmitry Chelyubeev
发明人： Vadim Rakhovsky , Vitaly Chernik , Mikhail Borisov , Aleksey Shamaev , Dmitry Chelyubeev
IPC分类号： G03H1/08 , G03B27/42 , G03F7/20 , G03H1/22
摘要： A system that contains a semi-ellipsoidal SLM holder supporting a plurality of flat rectangular SLMs, which are placed onto the semi-ellipsoidal surface of the holder in the most surface-covering way. The system contains a coherent light source placed in the first focal point of the ellipsoid. The second focal point of the ellipsoid defines the area in which an image-receiving object is to be placed. All the SLMs are illuminated by a diverging light beam emitted from the coherent light source. In each SLM, the light is subjected to phase-amplitude modulation and is converted into an image-carrying beam, which convergently fells onto the object on which the target image is to be produced. Thus, a pattern is formed on the object by a maskless method in which a plurality of SLMs are combined into a common image-forming holographic unit.

5. 发明授权

US09310768B2 Method for synthesis and formation of a digital hologram for use in microlithography 有权
标题翻译：用于微光刻的数字全息图的合成和形成方法
公开(公告)号：US09310768B2
公开(公告)日：2016-04-12
申请号：US14142776
申请日：2013-12-28
申请人： Vadim Rakhovsky
发明人： Vadim Rakhovsky , Mikhail Borisov , Aleksey Shamaev , Dmitry Chelyubeev , Aleksandr Gavrikov , Vitaly Chernik , Peter Mikheev
IPC分类号： G03H1/22 , G03H1/08 , G03F7/20 , G03H1/00
CPC分类号： G03H1/0808 , G03F7/70408 , G03H2001/0094 , G03H2210/45 , G03H2260/63
摘要： The invention describes a method of manufacturing a holographic mask capable of producing an image pattern that contains elements of a sub-wavelength size along with decreased deviations from the original pattern. The original pattern is converted into a virtual electromagnetic field and is divided into a set of virtual cells with certain amplitudes and phases, which are mathematically processed for obtaining the virtual digital hologram. The calculation of the latter is based on parameters of the restoration wave, which is used to produce the image pattern from the mask, and on computer optimization by variation of amplitudes and phases of the set of virtual cells and/or parameters of the virtual digital hologram for reaching a satisfactory matching between the produced image pattern and the original pattern. The obtained virtual digital hologram provides physical parameters of the actual digital hologram that is to be manufactured.
摘要翻译：本发明描述了一种制造全息掩模的方法，该全息掩模能够产生包含亚波长尺寸的元素以及与原始图案的偏差减小的图像图案。将原始图案转换为虚拟电磁场，并将其划分成具有某些幅度和相位的一组虚拟单元，其被数学处理以获得虚拟数字全息图。后者的计算基于恢复波的参数，其用于从掩模产生图像图案，以及通过虚拟单元组和/或虚拟数字参数的幅度和相位的变化进行计算机优化全息图，用于在所产生的图像图案和原始图案之间达到令人满意的匹配。所获得的虚拟数字全息图提供要制造的实际数字全息图的物理参数。

6. 发明授权

US09557711B2 Method of static scaling of image in holographic lithography 有权
标题翻译：全息光刻中图像静态缩放的方法
公开(公告)号：US09557711B2
公开(公告)日：2017-01-31
申请号：US14267884
申请日：2014-05-01
申请人： Vadim Rakhovsky
发明人： Vadim Rakhovsky , Mikhail Borisov , Aleksey Shamaev , Dmitry Chelyubeev , Aleksandr Gavrikov , Vitaly Chernik , Peter Mikheev
IPC分类号： G03H1/08 , G03H1/16 , H01M2/14 , H01M2/16 , B29C47/00 , H01M10/052 , B29C47/08
CPC分类号： G03H1/0891 , B29C47/0021 , B29C47/0057 , B29C47/0898 , G03H1/0005 , G03H1/0808 , G03H1/16 , G03H2001/0094 , G03H2001/0816 , G03H2222/13 , H01M2/145 , H01M2/1653 , H01M10/052
摘要： Proposed is a method of static scaling of an image in holographic lithography. The method consists of generating a final virtual digital hologram of the original pattern through a sequence of mathematical calculations with participation of a virtual coherent light source having a predetermined wavelength λ1 and producing an actual hologram on the basis of the virtual digital hologram of the original pattern. The obtained hologram can be used for forming an actual original pattern in a predetermined size. When it is necessary to produce the original pattern in another size, this can be done by static scaling by merely selecting another wavelength for the laser source with adjustable wavelength. The method allows determining the wavelength range in which scalability is possible with substantially homothetic transformation of the image.
摘要翻译：提出的是全息光刻中图像的静态缩放的方法。该方法包括通过具有预定波长λ1的虚拟相干光源参与的数学计算序列生成原始图案的最终虚拟数字全息图，并且基于原始图案的虚拟数字全息图产生实际全息图。获得的全息图可以用于以预定尺寸形成实际的原始图案。当需要以其他尺寸产生原始图案时，可以通过静态缩放来仅通过选择波长可调的激光源的另一个波长来实现。该方法允许通过图像的基本上相似的变换来确定可伸缩性是可能的波长范围。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式