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1. 发明授权

US07479189B2 Coating plant with a charging lock and device therefor 有权
标题翻译：涂装厂带有充电锁及其装置
公开(公告)号：US07479189B2
公开(公告)日：2009-01-20
申请号：US10547718
申请日：2004-03-11
申请人： Uwe Schüssler , Stefan Bangert , Jürgen Henrich
发明人： Uwe Schüssler , Stefan Bangert , Jürgen Henrich
IPC分类号： B05C15/00
CPC分类号： C03C17/001 , C03C17/002 , C23C14/56 , C23C14/566 , F16K1/2007 , F16K1/205 , F16K1/2085 , F16K1/24 , F16K51/02
摘要： The present invention relates to a coating plant, especially a vacuum coating plant, with a charging lock, especially a rectangular vacuum lock for a coating chamber, with a lock aperture (13) having a length of at least 1000 mm that comprises a shutter (6) for closing and opening the lock aperture and a latch (7) to secure the shutter, wherein there are provided means for moving the shutter and the latch from a first open position to a second closed position, and vice versa, these means assuring also that the movements of the shutter (6) and the latch (7) will be coupled with each other in such manner that the shutter (6) will be automatically secured by the latch (7) after the shutter has been closed and will be released again before it is opened.
摘要翻译：本发明涉及一种具有充电锁，特别是用于涂覆室的矩形真空锁的涂覆设备，特别是真空镀膜设备，其具有长度至少为1000mm的锁定孔（13），其包括快门（ 6）用于关闭和打开锁定孔，以及用于固定闸门的闩锁（7），其中设置有用于将闸板和闩锁从第一打开位置移动到第二关闭位置的装置，反之亦然，这些装置确保还有，快门（6）和闩锁（7）的运动将以这样的方式彼此联接，使得在快门关闭之后快门（6）将被闩锁（7）自动固定，并且将是在开放之前再次释放。

2. 发明授权

US06857307B2 Method and device for the determination of the gas permeability of a container 失效
标题翻译：用于确定容器的气体渗透性的方法和装置
公开(公告)号：US06857307B2
公开(公告)日：2005-02-22
申请号：US10149179
申请日：2000-12-22
申请人： Thomas Gebele , Jürgen Henrich
发明人： Thomas Gebele , Jürgen Henrich
IPC分类号： G01M3/32 , G01N15/08
CPC分类号： G01M3/3281
摘要： The invention relates to a method and device for the determination of the gas permeability of a container, for example, a PET bottle. Said container is enclosed by a sheath, which hermetically seals the container from the environment. The intermediate space, between the container and the sheath, has only a very small volume in comparison to the volume of the container. The determination of the gas permeability is begun by bringing said intermediate space to, for example, atmospheric pressure, whilst the container is filled with a test gas by means of a special feed, until the container is at an overpressure relative to the intermediate space. The pressure in the intermediate space increases by means of the resulting diffusion of the test gas through the wall of the container into said intermediate space. The increase in pressure per unit time is a measure of the permeability of the container.
摘要翻译：本发明涉及一种用于确定容器（例如PET瓶）的透气性的方法和装置。所述容器由护套封闭，护套将容器与环境密封。在容器和护套之间的中间空间与容器的体积相比只有非常小的体积。通过使所述中间空间达到例如大气压，同时通过特殊进料填充试验气体，直到容器相对于中间空间处于过压状态，开始确定气体渗透性。中间空间中的压力通过试验气体通过容器的壁进入所述中间空间而增加。每单位时间的压力增加是容器的渗透性的量度。

3. 发明授权

US06335054B1 Air lock for introducing substrates to and/or removing them from a treatment chamber 有权
标题翻译：用于将基材引入和/或将其从处理室中移出的气锁
公开(公告)号：US06335054B1
公开(公告)日：2002-01-01
申请号：US09631940
申请日：2000-08-03
申请人： Tomas Baumecker , Helmut Grimm , Jürgen Henrich , Klaus Michael , Gert Rödling , Jürgen Ulrich
发明人： Tomas Baumecker , Helmut Grimm , Jürgen Henrich , Klaus Michael , Gert Rödling , Jürgen Ulrich
IPC分类号： C23C1400
CPC分类号： C23C16/54 , B65G21/00 , C23C14/56
摘要： In an air lock for continuous introduction into and/or removal of workpieces from spaces (1, 4) separated atmospherically, the individual substrates (3, 13) are transported through a transfer channel (24). At least one lock chamber (7a-7m) serving to accommodate the substrates (3, 13) is arranged movably in the transfer channel (24). During the substrate transport in the transfer channel (24), the lock chamber (7a-7m) is atmospherically separated both from the exterior (1) having normal pressure and from the coating chamber (4). The air lock (2) includes a carrousel lock which has a carrousel housing (24) and a lock chamber wheel (10). On the periphery in the lock chamber wheel (10) individual lock chambers (7a-7m) are provided, in which the workpieces (3, 13) to be brought into the chamber to be loaded (4) are inserted freely accessible on the normal pressure side. By turning the lock chamber wheel (10), the substrates (3, 13) in the lock chambers (7a-7m) are transported from the coating station [sic; loading station] (A) to the transfer station (B) into the treatment chamber (4) diametrically opposite the normal pressure side. In the transfer station (B) the substrates (3, 13) are removed from the transfer channels (7a-7m) by means of a transfer device (17′) and are available for further treatment in the treatment chamber (4).
摘要翻译：在用于从空气分离的空间（1,4）中连续引入和/或移除工件的气锁中，各个基板（3,13）通过传送通道（24）传送。用于容纳基板（3,13）的至少一个锁定室（7a-7m）可移动地布置在输送通道（24）中。在传送通道（24）中的基板传送期间，锁定室（7a-7m）与具有常压的外部（1）和涂覆室（4）大气分离。气锁（2）包括具有转盘壳体（24）和锁室轮（10）的转盘锁。在锁定室轮（10）的周边上，设置有单独的锁定室（7a-7m），其中待进入待装载室（4）的工件（3,13）在正常情况下自由地接近压力侧。通过转动锁定室轮（10），锁定室（7a-7m）中的基板（3,13）从涂布站传送; 装载站]（A）到转运站（B）进入与正常压力侧直径相对的处理室（4）。在转运站（B）中，借助于转移装置（17'）将基板（3,13）从转移通道（7a-7m）中移出，并且可用于在处理室（4）中进一步处理。

4. 发明授权

US07763535B2 Method for producing a metal backside contact of a semiconductor component, in particular, a solar cell 失效
标题翻译：用于制造半导体部件，特别是太阳能电池的金属背面接触的方法
公开(公告)号：US07763535B2
公开(公告)日：2010-07-27
申请号：US12202123
申请日：2008-08-29
申请人： Roland Trassl , Jian Liu , Stephan Wieder , Jürgen Henrich , Gerhard Rist
发明人： Roland Trassl , Jian Liu , Stephan Wieder , Jürgen Henrich , Gerhard Rist
IPC分类号： H01L23/488
CPC分类号： H01L31/022425 , Y02E10/50
摘要： The present invention relates to a method for manufacturing a backside contact of a semiconductor component, in particular, of a solar cell, comprising a metallic layer on the backside of a substrate in a vacuum treatment chamber, and the use of a vacuum treatment system for performing said method. Through this method and its use, in particular silicon based solar cells, can be provided with a back contact in a simple manner in a continuous process sequence, wherein the process sequence can be provided particularly efficient and economical, since no handling systems for rotating the substrate are required, and in particular silk screening steps can be dispensed with.
摘要翻译：本发明涉及一种用于制造半导体部件，特别是太阳能电池的背面接触的方法，所述太阳能电池在真空处理室中在基板的背面上包括金属层，并且使用真空处理系统执行所述方法。通过这种方法及其使用，特别是硅基太阳能电池可以以连续的工艺顺序以简单的方式提供背面接触，其中可以提供特别有效和经济的工艺顺序，因为没有用于旋转基材是必需的，特别是可以省去丝印步骤。

5. 发明授权

US06242053B1 Process for coating plastic containers or glass containers by means of a PCVD coating process 失效
标题翻译：通过PCVD涂覆工艺涂覆塑料容器或玻璃容器的方法
公开(公告)号：US06242053B1
公开(公告)日：2001-06-05
申请号：US09081209
申请日：1998-05-20
申请人： Friedrich Anderle , Jürgen Henrich , Wilfried Dicken , Heinrich Grünwald , Michael Liehr , Klaus Nauenburg , Rudolf Beckmann
发明人： Friedrich Anderle , Jürgen Henrich , Wilfried Dicken , Heinrich Grünwald , Michael Liehr , Klaus Nauenburg , Rudolf Beckmann
IPC分类号： C08F246
CPC分类号： C03C17/005 , B05D1/62 , C23C16/509 , C23C16/511 , H01J37/32082 , H01J2237/332 , H05H1/46 , H05H2001/463
摘要： A process and device is shown for coating the delineating surfaces of a hollow object, preferably a hollow object having at least one sealable opening, by means of plasma coating, via the action of plasma on the delineating surface of the hollow object that is to be coated.
摘要翻译：示出了一种工艺和装置，用于通过等离子体涂覆在中空物体的描绘表面上等离子体的作用来涂覆中空物体的描绘表面，优选具有至少一个可密封开口的中空物体涂层。

6. 发明授权

US06196154B1 Air lock for introducing substrates to and/or removing them from a treatment chamber 有权
标题翻译：用于将基材引入和/或将其从处理室中移出的气锁
公开(公告)号：US06196154B1
公开(公告)日：2001-03-06
申请号：US09249445
申请日：1999-02-12
申请人： Tomas Baumecker , Helmut Grimm , Jürgen Henrich , Klaus Michael , Gert Rödling , Jürgen Ulrich
发明人： Tomas Baumecker , Helmut Grimm , Jürgen Henrich , Klaus Michael , Gert Rödling , Jürgen Ulrich
IPC分类号： C23C1600
CPC分类号： C23C16/54 , B65G21/00 , C23C14/56
摘要： In an air lock for continuous introduction into and/or removal of workpieces from spaces (1,4) separated atmospherically, the individual substrates (3,13) are transported through a transfer channel (24). At least one lock chamber (7a-7m) serving to accommodate the substrates (3,13) is arranged movably in the transfer channel (24). During the substrate transport in the transfer channel (24), the lock chamber (7a-7m) is atmospherically separated both from the exterior (1) having normal pressure and from the coating chamber (4). The air lock (2) includes a carrousel lock which has a carrousel housing (24) and a lock chamber wheel (10). On the periphery in the lock chamber wheel (10) individual lock chambers (7a-7m) are provided, in which the workpieces (3,13) to be brought into the chamber to be loaded (4) are inserted freely accessible on the normal pressure side. By turning the lock chamber wheel (10), the substrates (3,13) in the lock chambers (7a-7m) are transported from the coating station (A) to the transfer station (B) into the treatment chamber (4) diametrically opposite the normal pressure side. In the transfer station (B) the substrates (3,13) are removed from the transfer channels (7a-7m) by means of a transfer device (17′) and are available for further treatment in the treatment chamber (4). The treatment chamber (4) includes, for instance, of a vacuum-coating chamber in which the workpieces (3,13) as the substrates to be coated are coated by a vacuum-supported coating method.
摘要翻译：在用于从气氛分离的空间（1,4）连续引入和/或移除工件的气锁中，各个基板（3,13）通过传送通道（24）传送。用于容纳基板（3,13）的至少一个锁定室（7a-7m）可移动地布置在输送通道（24）中。在传送通道（24）中的基板传送期间，锁定室（7a-7m）与具有常压的外部（1）和涂覆室（4）大气分离。气锁（2）包括具有转盘壳体（24）和锁室轮（10）的转盘锁。在锁室轮（10）的周边设有单独的锁定室（7a-7m），其中待进入待加载室的工件（3,13）可以在正常情况下自由地接近压力侧。通过转动锁定室轮（10），锁定室（7a-7m）中的基板（3,13）从涂覆站（A）到转印站（B）沿直径传送到处理室（4）与正常压力侧相反。在传送站（B）中，通过传送装置（17'）从传送通道（7a-7m）移除基板（3,13），并且可用于在处理室（4）中进一步处理。处理室（4）例如包括真空涂布室，其中作为待涂布的基板的工件（3,13）通过真空支撑的涂覆方法被涂覆。

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