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    • 2. 发明授权
    • Capacitive pressure sensor or capacitive differential pressure sensor
    • 电容式压力传感器或电容差压传感器
    • US06374680B1
    • 2002-04-23
    • US09511723
    • 2000-02-21
    • Ulfert DrewesAndreas RossbergElke SchmidtFrank HegnerThomas Velten
    • Ulfert DrewesAndreas RossbergElke SchmidtFrank HegnerThomas Velten
    • G01L912
    • G01L9/0075
    • The electrodes of these pressure or differential pressure sensors are formed using a technique other than silk-screen printing or sputtering: The pressure sensor (10) has a substrate (1) and a first major surface (11), a second major surface (12) and a circumferential surface (13. A plate-shaped electrode (14) of electrically conductive material is secured in a recess (15) in the major surface (11) in a high-pressure-resistant and high-vacuum-tight manner by a joining material (16). A through connection (17) is provided from the electrode (14) through the substrate (1) to the major surface (12) or the circumferential surface (13). A diaphragm (2) of ceramic, glass, or single-crystal material is attached to the substrate (1) outside the recess (15) along a joint (18) by a joining material (26), and forms itself a further electrode or is covered, on a surface facing the electrode (14), with a further electrode (24) which is contacted through the joint (18). Substrate and diaphragm consist of a ceramic, glass, or single-crystal material. Respective differential pressure sensors have either a common central diaphragm and two substrates or a common substrate and two diaphragms.
    • 这些压力传感器或差压传感器的电极使用丝网印刷或溅射以外的技术来形成:压力传感器(10)具有基板(1)和第一主表面(11),第二主表面(12) )和圆周表面(13)。导电材料的板状电极(14)以高耐压和高真空密封的方式固定在主表面(11)的凹部(15)中,由 连接材料(16),从电极(14)穿过基板(1)到主表面(12)或圆周表面(13)提供贯通连接件(17),陶瓷的隔膜(2) 玻璃或单晶材料通过接合材料(26)沿着接头(18)附接到凹部(15)外部的基板(1)上,并且在其上面形成另外的电极或被覆盖在面向 电极(14),具有通过接头(18)接触的另一个电极(24)。基板和隔膜 t的陶瓷,玻璃或单晶材料。 各差压传感器具有共同的中心隔膜和两个基板或公共基板和两个隔膜。
    • 3. 发明授权
    • Capacitive pressure sensor cells or differential pressure sensor cells and methods for manufacturing the same
    • 电容式压力传感器单元或差压传感器单元及其制造方法
    • US06267009B1
    • 2001-07-31
    • US09505489
    • 2000-02-16
    • Ulfert DrewesElke SchmidtAndreas RossbergFrank HegnerThomas Velten
    • Ulfert DrewesElke SchmidtAndreas RossbergFrank HegnerThomas Velten
    • G01L912
    • G01L9/0075G01L9/0044
    • These capacitive pressure sensor cells have joints between substrates and diaphragms being both pressure and/or tension-proof and high-vacuum-tight and long-term-stable. The sensor cell comprises a ceramic substrate (1) having a cylindrical surface (11), a major surfaces (12, 13). The major surface (12) includes a concave central area (121) merging, in the direction of and up to said cylindrical surface (11), into a convex surface (124) having a vertex line (125) and forming a planar ring surface (126) in its area. An electrode (122) is located in the concave area (121). An electrical connection (123) extends from electrode (122) through the substrate (1) to surface (13). A ceramic diaphragm (5) has a planar inner surface (51) on which an electrode (52) is located and which rests on the ring surface (126) of the substrate (1). The diaphragm (5) is joined to the substrate by an active brazing solder forming a circumferential wedge zone (91) in the area of the substrate between the ring surface (126) and the cylindrical surface (11). An electrical connection to the electrode (52) is made through the wedge zone (91). Respective differential pressure sensors can comprise a central substrate (2) and two outer diaphragms (61, 71) or a central diaphragm (8) and two outer substrates (3, 4).
    • 这些电容式压力传感器单元在基板和隔膜之间具有接头,其压力和/或抗张力和高真空密封性和长期稳定性。 传感器单元包括具有圆柱形表面(11),主表面(12,13)的陶瓷基底(1)。 主表面(12)包括凹入的中心区域(121),其在所述圆柱形表面(11)的方向上并且与所述圆柱形表面(11)一起合并成具有顶点线(125)的凸形表面(124)并形成平面环表面 (126)。 电极(122)位于凹部(121)中。 电连接(123)从电极(122)穿过衬底(1)延伸到表面(13)。 陶瓷膜片(5)具有平面的内表面(51),电极(52)位于该平面内表面上,并且该陶瓷膜片位于衬底(1)的环表面(126)上。 膜片(5)通过在环形表面(126)和圆柱形表面(11)之间的衬底区域中形成周向楔形区域(91)的活性钎焊焊料与衬底接合。 通过楔形区域(91)制成与电极(52)的电连接。 各差压传感器可以包括中央基板(2)和两个外隔膜(61,71)或中央隔膜(8)和两个外基板(3,4)。
    • 4. 发明授权
    • Relative pressure measuring instrument
    • 相对压力测量仪
    • US06752021B2
    • 2004-06-22
    • US10195148
    • 2002-07-15
    • Dietfried BurczykThomas VeltenTanja Stöcklin
    • Dietfried BurczykThomas VeltenTanja Stöcklin
    • G01L900
    • G01L19/0645G01L19/0038
    • A relative pressure measuring instrument has a reference pressure feed that offers a high measure of safety and is easy to produce. Included is a relative pressure measuring cell having a pressure sensitive element, on whose process-facing side there is present during operation a pressure (p) to be measured, on whose process-averted side there is present during operation a reference pressure (pR) to which the pressure (p) to be measured is to be referred, a support on which the relative pressure measuring cell is arranged and which is enclosed in a housing, a process connection, that is connected to a process-facing end of the housing, a measuring instrument housing that is arranged at a process-averted end of the housing, and a reference pressure feed through which during operation the reference pressure (pR) is led to the process-averted side of the pressure sensitive element, and which leads completely out of the relative pressure measuring instrument laterally through the support and a single bore through the housing.
    • 相对压力测量仪器具有参考压力进给,提供高度的安全性,易于生产。 包括具有压力敏感元件的相对压力测量单元,在操作期间在其处理面侧存在待测量的压力(p),在工作过程中存在参考压力(pR) 要对其进行测量的压力(p),安装有相对压力测量单元并被封装在壳体中的支撑件,连接到壳体的面向过程的端部的过程连接 ,布置在壳体的过程避免端的测量仪器壳体和参考压力进给器,在参考压力进给期间,参考压力(pR)被引导到压敏元件的过程避免侧,并且其引导 完全从相对压力测量仪器横向通过支撑件和单个孔穿过外壳。